Leica EM ACE200 Service Manual
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Leica EM ACE200 Service Manual

Leica EM ACE200 Service Manual

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  • Page 2 Revision Record VERSION VERSION NEW PAGES AMENDMENT DATE NUMBER DETAIL Dez 2012 Version 1.0 Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 3: Service Documentation

    Leica Service Manual EM ACE 200 Version 1.0 Produced by: Leica Microsystems GmbH Hernalser Hauptstraße 219 1170 Vienna Austria Phone: +431 48899-0 Fax: +431 48899 8350 © Leica Microsystems GmbH Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 4 Service Menu Chapter 10 Adjustments & Software update Chapter 11 Spare parts & Tools Chapter 12 Preventative maintenance Chapter 13 Trouble shooting & Error codes Chapter 14 Decontamination Certificate Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 5 Chapter1 Introduction & Safety instructions Chapter 1 Introduction & Safety instructions Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 6: Table Of Contents

    Labels on the instrument: ................10 1.2.8 Abbreviations: ....................11 1.2.9 Hazard Warning Carbon Dioxide CO²: ............12 1.2.10 Hazard Warning LIQUID NITROGEN (LN²): ..........15 1.2.11 Safety data sheet ARGON (AR): ..............16 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 7: General Information

    Produkte. Insoweit sind allein die ver- contract provisions agreed between ourselves traglichen Bestimmungen zwischen uns und and our customers. Leica reserves the right to unseren Kunden maßgeblich. Leica behält change technical specifications as well as sich das Recht vor, Änderungen der tech- manufacturing processes without prior notice.

  • Page 8: Designated Use

    3. Teilebeschreibung. Spare parts can be obtained from your 4. Gewünschte Menge (Anzahl). local Leica office or from: Leica Microsystems GmbH Ersatzteile erhalten Sie von Ihrer Leica- Vertretung vor Ort oder direkt von: Hernalser Hauptstraße 219 Leica Microsystems GmbH 1170 Vienna Austria Hernalser Hauptstraße 219...

  • Page 9: Warranty And Service

    Leica Microsysteme GmbH steht dafür ein, subjected to a comprehensive quality control dass das gelieferte Vertragsprodukt einer procedure based on the Leica in-house testing umfassenden Qualitätskontrolle nach den standards, and that the product is faultless and Leica-hausinternen Prüfungsmaßstäben...

  • Page 10: Safety Instructions

    6. Bei Arbeiten am eingeschalteten Gerät auf operational. einem isolierten Untergrund stehen, also 8. This list does not necessarily contain all sicherstellen, dass keine Erdung vorliegt. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 11: Qualified Personnel

    1.2.2 Qualifiziertes Personal who are familiar with installation, maintenance, im Sinne dieser Service-Anleitung sind repair and operation of the product Leica IP S, Personen, die mit Aufstellung, Montage, and who have Inbetriebsetzung und Betrieb received adequate training in order to carry out des Produktes vertraut sind und über die ihrer...

  • Page 12: How To Ensure Safe Operation

    • Sie verstehen und befolgen die nonindustrial accident prevention. Sicherheitsinformationen • To inform Leica immediately in writing if the und die Instruktionen auf dem Produkt equipment becomes unsafe. sowie in der Betriebsanleitung. • Sie kennen die ortsüblichen gesetzlichen, betrieblichen und außerbetrieblichen...

  • Page 13: Symbols Used In This Manual

    • vor Fehlanwendungen zu schützen. property damage follow the safety messages Die Hinweise sind unbedingt zu befolgen, um given in this document! General Warning /Attention Important information Maintenance recommendation Danger Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 14: Labels On The Instrument

    To ignore them may result in damages at the unit or hazards for persons. Wear Gloves! In manual Service vacuum system, ion-Gun, table flange Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 15: Abbreviations

    Wear Safety Glasses! In Manual Use with LN2 (refill Dewar) 1.2.8 Abbreviations: CO² Carbon Dioxide Process Chamber Iinit Initialisation End Switch Process Chamber temperature Process Chamber pressure Liquid Nitrogen Argon Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 16: Hazard Warning Carbon Dioxide Co²

    1.2.9 Hazard Warning Carbon Dioxide CO²: Emergency Overview Carbon Dioxide CO² - Simple asphyxiant - Contents under pressure - Keep at temperatures below 52°C / 125°F Appearance: Colorless Physical State: Compressed gas Odor: Odorless Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 17 Protective Equipment and As in any fire, wear self-contained breathing apparatus pressure- Precautions for Firefighters: demand, MSHA/NIOSH (approved or equivalent) and full protective gear. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 18 Emergency Use: Use positive pressure airline respirator with escape cylinder or self contained breathing apparatus for oxygen-deficient atmospheres (<19.5%). Hygiene Measures: Handle in accordance with good industrial hygiene and safety practice. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 19: Hazard Warning Liquid Nitrogen (Ln²)

    Burns - LN boils at -196°C. It is extremely cold and can cause serious burns. Please read the safety instructions provided with all Leica products for the correct handling of liquid nitrogen! Service Manual / Leica ACE200 Version 1.0 - 12/2012...

  • Page 20: Safety Data Sheet Argon (Ar)

    Chapter1 Introduction & Safety instructions 1.2.11 Safety data sheet ARGON (AR): Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 21 Chapter1 Introduction & Safety instructions Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 22 Chapter1 Introduction & Safety instructions Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 23 Chapter1 Introduction & Safety instructions Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 24: Product Description

    Chapter 2 Product description Chapter 2 Product description Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 25 Chapter 2 Product description Table of contents 2.1 Product description ....................3 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 26 Pumping time to 2x10 mbar approx. 2 min. * Instrument with a KF 25 connection and metal hose and a rotary vane pump 5 m3/h, prepumped User interface Integrated touch panel Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 27 Diameter 80 mm, flat with recess for glass slide (76x26/3x1 inch) Optional: Planetary, diameter 80mm for 4x4 SEM stubs, 30°pre-tilted Foil target (diameter) 54 mm, max 1mm thickness Carbon Thread Leica single or double carbon thread (4 sections) Minimum Maximum Working distance (from source) 30mm 100mm...

  • Page 28: Unpacking & Packing

    Chapter 3 Unpacking & Packing Chapter 3 Unpacking & Packing Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 29 Chapter 3 Unpacking & Packing Table of contents 3.1 Unpacking & Assembly ................... 3 3.1.1 Unpacking ...................... 3 3.1.2 Packing ......................4 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 30: Unpacking And Assembly

    Fill in the rotary pump oil To the level indicated by the white bar. Min. / max. Level indication Lift up the top cover of the box for the coating unit. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 31 Lift out the unit and place it on a table. Connect rotary pump, Argon gas and mains cable. 3.1.2 Packing Packing has to be done in reverse order of steps described in chapter Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 32 Chapter 4 Installation Chapter 4 Installation Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 33 4.1.6 Pumping Test ...................... 7 4.1.7 Carbon thread evaporation process preparation ..........8 4.1.8 Sputter coating process preparation ..............11 4.1.9 Glow Discharge process preparation ..............14 4.1.10 Inspection protocol (check list) ................ 16 Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 34: Installation

    Open the drain screw on the bottom for emptying the oil. Close the oil screw on the bottom and refill the oil. Do not overfill!! Fill the oil within the white marking Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 35: Oil Mist Filter Insert/Exchange

    Chapter 4 Installation 4.1.3 Oil mist filter insert/exchange Open oil mist filter Remove spring and press plate Exchange filter insert Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 36: Start Instrument

    0.5 bar over atm.  Connector size: 6mm 4.1.5 Quartz Crystal thickness measurement preparation Mount quartz head, holder and connect the measuring cable. Remove the sample stage to have better access. Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 37 The frequency of a new crystal is ~6 MHz. and should be stable! The latest number can slightly move. The quartz is useable between 3.9 – 6 Mhz Below 3.9 Mhz the quartz should be exchanged. Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 38: Pumping Test

    When vacuum does not achieves 3x10 mbar , ultimate vacuum of the Rotary pump, according to the pump manual has to be tested or vacuum leak needs to be found! Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 39: Carbon Thread Evaporation Process Preparation

    Switch on the mains switch at unit backplane: Start screen will appear Press Pump button to start pumping Vent after process is deactivated Vent after process is activated Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 40 Cut off thickness Stage height When vacuum of 3x10 was achieved , Press Start Follow to the process Status: Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 41 4 ,until coating thickness has reached! Coating in progress: Coating has finished: Chamber can be vented now, in case of exchanging of the carbon threads, flange needs to be cleaned from loose coating particles. Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 42: Sputter Coating Process Preparation

    Switch on the mains switch at unit backplane: Start screen will appear Press “Sputtering” button Press button To select coating material For the use of thickness measurement choose thickness using + and - Choose (WD) Coating distance Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 43 When vacuum of 3x10 was achieved , Press Start Start button can be pressed at any time ,process will start automatically when 3x10 mbar was achieved. Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 44 Preparing argon flow for purging Purging Stabilize argon flow to process vacuum When sputter process is activated, check plasma on target. Follow thickness measurement Actual coating thickness is indicated Sputter plasma Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 45: Glow Discharge Process Preparation

    Prepare shutter with glow Discharge plate inserted Mount shutter and connect HV - Cable Switch on the mains switch at unit backplane: Start screen will appear Press “Glow Discharge” button Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 46 Select glow discharge time and current (15mA max.) Then press Start After gas (air) flow regulation has finished, high voltage switches on and Glow Discharge plasma between HV- plate and stage appears. Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...

  • Page 47: Inspection Protocol (Check List)

    Sputter process tested Carbon thread evap. Process tested Planetary drive sample table tested Chamber door locking sensor tested Instruction to customer Further comments regarding the installation: (pls write in capital letters) Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 48 Chapter 5 Instrument Overview Chapter 5 Instrument Overview Version 1.0 Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 49 5.2.1 Option: “Glow Discharge” .................. 20 5.2.2 Glow Discharge “Display Screenshot” ............... 21 5.2.3 Upgrade for ACE200 ..................21 Opening the instrument ..................22 5.3.1 Opening the instrument ..................22 Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 50: Schematic Instrument Overview

    Chapter 5 Instrument Overview 5.1 Schematic Instrument Overview LEICA EM ACE200 – Low Vacuum Sputter and Carbon Coaters 230 V / 50 – 60 Hz 115 V / 60 Hz The basic instrument is pre-configured either as a Sputter or a Carbon...

  • Page 51: Carbon Thread "Front View

    Chapter 5 Instrument Overview 5.1.3 Carbon Thread “Front view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 52: Carbon Thread "Cw View

    Chapter 5 Instrument Overview 5.1.4 Carbon thread “CW view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 53: Carbon Thread "Ccw View

    Chapter 5 Instrument Overview 5.1.5 Carbon thread “CCW view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 54: Components: Ace 200 Carbon Thread Coater (16771580)

    Power Supply SWS600L-15 (Carbon Thread) Venting Valve Shutter Sensor Over Current Protective Switch 10A Only for Version CT&GD High Voltage Transformer CT & GD High Voltage Control (PCB) for CT & GD Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 55: Em Ace 200 Sputter Coater

    Chapter 5 Instrument Overview 5.1.7 EM ACE 200 SPUTTER Coater Leica EM ACE200 Sputter Coater - Basic Unit consisting of  Metal vacuum chamber  Integrated power supply for sputtering  Height adjustable specimen table to hold 18 SEM Stubs ...

  • Page 56: Sputter Coating "Front View

    Chapter 5 Instrument Overview 5.1.9 Sputter coating “Front view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 57: Sputter Coating "Cw View

    Chapter 5 Instrument Overview 5.1.10 Sputter coating “CW view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 58: Sputter Coating "Ccw View

    Chapter 5 Instrument Overview 5.1.11 Sputter coating “CCW view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 59: Components: Ace 200 Sputter Coater (16771582)

    Control Valve (only for GD or SP) Shutter Sensor Throttle Value (only for GD or SP) High Voltage Transformer SP / SP & GD / GD Over Current Protective Switch 10A Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 60: Em Ace 200 Sputter And Carbon Thread Coater (Combi)

    Chapter 5 Instrument Overview 5.1.13 EM ACE 200 SPUTTER and CARBON Thread Coater (COMBI) Leica EM ACE200 Sputter and Carbon Thread Coater - Basic Unit consisting of:  Metal vacuum chamber  Integrated power supplies for sputtering and carbon thread ...

  • Page 61: Sputter And Carbon Thread "Front View

    Chapter 5 Instrument Overview 5.1.15 Sputter and Carbon Thread “Front view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 62: Sputter And Carbon Thread "Cw View

    Chapter 5 Instrument Overview 5.1.16 Sputter and Carbon Thread “CW view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 63: Sputter And Carbon Thread "Ccw View

    Chapter 5 Instrument Overview 5.1.17 Sputter and Carbon Thread “CCW view” Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 64: Components: Ace 200 Sp And Ct Coater (16771584)

    Throttle Value (only for GD or SP) High Voltage Transformer for SP / SP & GD / CT & GD / GD Over Current Protective Switch 10A Carbon Thread (PCB) Power Supply SWS600L-15 (Carbon Thread) Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 65: Sputter And Carbon Thread Schematic Diagram

    Chapter 5 Instrument Overview 5.1.19 Sputter and Carbon Thread Schematic diagram Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 66 Chapter 5 Instrument Overview Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 67: Option For Ace 200

    - High Voltage power supply for glow discharge - Operating software This is an optional outfit for a carbon coating unit Components: GD connector complete connector spring Electrode plate Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 68: Glow Discharge "Display Screenshot

    - Fully integrated QSG for ACE 200 Fully integrated layer thickness monitor 16771586 - Quartz head with snap plug - Quartz head holder - Set of quartz crystals (Pack of 10) Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 69: Opening The Instrument

    5.3 Opening the instrument 5.3.1 Opening the instrument Remove 4 screws of the back plane Open the flange cover and remove 2 screws. Slide back / side cover backward out. Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 70 For most service work ,no additional covers needs removing. For removing of all covers remove display panel first : Remove screws from both side Slide display housing to front to remove. Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 71 Chapter 5 Instrument Overview Lift up and remove chamber door. Slide front cover to the front to remove. All covers are removed now. Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 72 Chapter 6.0 Mechanical Chapter 6 Mechanical Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 73 6.1.5.2 Carbon Thread Evaporation Flange Assembly ..........8 6.1.5.3 Carbon Thread Evaporation Flange cleaning ..........10 6.1.6 Exchanging of the shaft seal for shutter (Simmering) ........10 6.1.7 Chamber O-ring exchange ................13 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 74: Mechanical & Assembly

    .Shutter can be removed now. Clean shutter by a sand blast unit, scotch prite, metal brush or sand paper. 6.1.2.3 Shutter Motor Assembly Remove stepping motor, motor support and magnet flange. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 75: Chamber Cleaning

    Remove Chamber protection shield for cleaning. Use scotch brite or a sand blasting unit for cleaning, followed by ethanol or acetone. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 76: Sputter Flange

    The magnetron housing is connected to a voltage of 200 -500 VDC for ionize of the argon. The magnetron focuses the argon plasma towards of the target what starts the sputtering process. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 77: Sputter Flange Assembly

    Lift up the contact plate Take magnet housing apart Isolation ring Magnet housing Contact ring O-ring Magnet Beware of the correct orientation of the magnet as shown on the picture. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 78: Sputter Flange Cleaning

    Max. at a low Voltage of 16 Volt DC is connected to the carbon threads through the high current feed through. This current generates the heat to evaporate the carbon thread. High current feed through Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 79: Carbon Thread Evaporation Flange Assembly

    6.1.5.2 Carbon Thread Evaporation Flange Assembly Unscrew the five contact screws and lift out the contact plate with putting the screws inside. Remove contact plate with screws inside. Contact plate backside view. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 80 For the assembly of the flange , the flat side of the feed through needs to be aligned to the flange centre. The profile of the feed through needs to fit to the cut-out of the contact plate. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 81: Carbon Thread Evaporation Flange Cleaning

    6.1.6 Exchanging of the shaft seal for shutter (Simmering) Before starting the mains cable has to be disconnected, all work has to be done with gloves. Disconnect the spring and remove shutter Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 82 Loosen the screw of the motor clutch Remove the four screws from the motor flange, and disassemble carefully the complete motor. Now remove the shaft for opening the shutter. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 83 Note: screws are only for inserting the seal. Insert the seal carefully with tighten the screws. In reverse procedure assemble the motor and the shaft. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 84: Chamber O-Ring Exchange

    6.1.7 Chamber O-ring exchange For removing of the O-rings, use a tooth pick or equal. Use the cap for picking up the o-ring Service Manual / Leica ACE 200 Version 1.0 - 11/2012 Page...
  • Page 85 Chapter 7 Electronics Chapter 7 Electronics Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 86 Wiring diagram carbon thread power supply ..........5 7.1.5 Wiring diagram carbon thread flange ............. 6 7.1.6 Wiring diagram sputtering ................7 7.1.7 High Voltage Control (PCB) ................8 7.1.8 Electronic components ................... 9 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 87: Electronics

    Chapter 7 Electronics 7.1 Electronics 7.1.1 Schematic Diagram / Overview Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 88: Wiring Diagram Mains

    Chapter 7 Electronics 7.1.2 Wiring diagram mains 7.1.3 Wiring diagram stage rotation motor Motor connector Motor Service Manual / Leica ACE200 Version 1.0 - 01/2012 Page...

  • Page 89: Wiring Diagram Carbon Thread Power Supply

    Chapter 7 Electronics 7.1.4 Wiring diagram carbon thread power supply Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 90: Wiring Diagram Carbon Thread Flange

    Chapter 7 Electronics 7.1.5 Wiring diagram carbon thread flange Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 91: Wiring Diagram Sputtering

    Chapter 7 Electronics 7.1.6 Wiring diagram sputtering Sputter connector High Voltage pin Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 92: High Voltage Control (Pcb)

    Chapter 7 Electronics 7.1.7 High Voltage Control (PCB) Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 93: Electronic Components

    Chapter 7 Electronics 7.1.8 Electronic components Control Board Power Supply for carbon thread evaporation Power Supply for Sputtering HV - Board HV- Transformer 24Volt Power Supply for control functions Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 94 Electronics Touch screen display and USB board Shutter motor with control sensor Low vacuum gauge Safety Sensor for door and flange hood Solenoid valve for Argon regulation and vent function Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 95 Chapter 7 Electronics Quartz head for thickness measurement Solid-state relay for OFF/ON function for rotary pump Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 96 Chapter 8 Vacuum Chapter 8 Vacuum Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 11/2012 Page...
  • Page 97 8.1.1 Schematic Diagram ..................3 8.1.2 Rotary pump oil filling ..................3 8.1.3 Rotary pump oil exchange ................3 8.1.4 Maintenance ....................4 8.1.5 Oil mist filter exchange ................... 6 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 98: Vacuum System

    8.1.2 Rotary pump oil filling Fill the oil within the white marking 8.1.3 Rotary pump oil exchange Remove oil screw on top Open the drain screw on the bottom for emptying the oil. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 99: Maintenance

    Chapter 8 Vacuum 8.1.4 Maintenance Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 100 Chapter 8 Vacuum Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 101: Oil Mist Filter Exchange

    Chapter 8 Vacuum 8.1.5 Oil mist filter exchange Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 102 Chapter 8 Vacuum Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 103 Chapter 8 Vacuum Open oil mist filter Remove spring and press plate Exchange filter insert Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 104 Chapter 8 Vacuum Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 105 Chapter 9 Service Menu Chapter 9 Service Menu Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 106 Glow Discharge screen function description ..........10 9.1.11 Glow Discharge Vacuum – Voltage - Current graph ........11 9.1.12 Carbon Thread screen function description ..........11 9.1.13 Carbon Thread Control board ..............13 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 107: Service Menu

    Control boards IDversion Enabled you can swap from the use menu direct in to the service menu Only for factory Set all settings to factory values Enter the serial number Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 108: Vacuum Screen Function Description

    Follow to the instructions in the yellow box. After the adjustment fix the adjustment screw with the counter nut. When the adjustment has finished, don’t forget to connect the tubing again! Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 109: Motor Screen Function Description

    Starts continuous open /close cycle No power on the stepper motor Stage rotation speed select able from 1 - 5 No power on the stepper motor Motor setting only for factory Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 110: Low Vacuum Control Board

    Vacuum P<2e-02mbar and the time in seconds to reach Vacuum P<9.9e-03mbar With the arrow left and right you can follow the graph from begin till to the end. Clear the screen. Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 111: Sputter Screen Function Description (High Voltage)

    Shutter Open / Close function Indicates actual mains voltage to HV power supply High Voltage ON for sputtering Sputter Current adjustment 5 – 150 mA Actual Sputter – Voltage and Current Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 112: High Voltage Board

    Chapter 9 Service Menu HV OFF show activated Current adjustable Show actual Current, Voltage and Time Sputter plasma 9.1.8 High Voltage board Tab on Board You can activate the Relay Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 113 Show the point of measurement. Activated Relay100VAC Show the point of measurement Activated Relay HV ON Show the point of measurement Activated Relay SP 1 Show the point of measurement Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 114: Sputter Vacuum - Current - Voltage Graph

    Note: only with a stabilize vacuum you can activate the Main Power Connects mains voltage to the HV power supply Indicates actual mains voltage to HV power supply Shutter Open / Close function Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 115: Glow Discharge Vacuum - Voltage - Current Graph

    The Graph show the characteristics of Vacuum, Voltage Current Graph for Glow Discharge coming soon 9.1.12 Carbon Thread screen function description Before you start with thread test activate the Main Power and the CT Power Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 116 Choose thread 1 to Activates Degas Settings Activates Flash Settings Degas ON time Degas Voltage Starts thread degas Stop degas Refreshing for actual Current and Voltage Current and Voltage indication Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 117: Carbon Thread Control Board

    Tab on Main Power Tab on CT Power Tab on Get Show the actual values. 9.1.13 Carbon Thread Control board Tab on Board Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 118 Chapter 9 Service Menu Connections overview screen Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 119 Chapter 10 Adjustments & SW Update Chapter 10 Adjustments & SW Update Version 1.0 Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 120 Chapter 10 Adjustments & SW Update Table of contents 10.1 Adjustments ......................3 10.2 SW-Update ......................3 10.2.1 SW update ..................... 3 Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 121 ACE USB port. Only the latest software version can be updated. If a zip file is sent via e.g. email, extract the file ‘Leica.zip’ on a stick to the root directory. Now the following folder structure should be seen: <Drive>:\Leica\ACExxx update ...
  • Page 122 You can track the update .The red bar moving from left to the right side A green check mark and the hint update is finished show you a successful update Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...
  • Page 123 The instrument will do a restart automatically. If the instrument not restart by himself please switch OFF and ON After the last software update change back to user screen. Service Manual / Leica ACE 200 Version 1.0 - 12/2012 Page...

  • Page 124: Spare Parts & Tools

    Chapter 11 Spare parts & Tools Chapter 11 Spare parts & Tools Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 125 ACE 200 SPUTTER and CARBON THREAD Coater (16771584) ....4 11.1.4 Glow Discharge ....................5 11.1.5 Carbon Thread Head..................5 11.1.6 Rotary Pump ....................5 11.2 Tools ........................5 11.2.1 Tools ......................5 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 126: Spare Parts

    O-ring for flange chamber side 16771531277 Low Vacuum (PCB) 16661561106 Shaft seal for shutter 16771531337 Safety Sensor (door) 16661561137 Shutter Motor 16302831106 Power Supply HWS100/24 16250040 Mains Voltage Outlet (for rotary pump) 16242014 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 127: Ace 200 Sputter And Carbon Thread Coater (16771584)

    Control Valve (only for GD or SP) 16771511813 Shutter Sensor 16661561134 Throttle Value (only for GD or SP) 16771531835 High Voltage Transformer 16661531001 for SP / SP & GD / CT & GD / GD Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 128: Glow Discharge

    11.2.1 Tools Title Order number Scotch brite (red) 16LZ04790KN Wenol Metal Polishers P=100g 16LZ02086KN Nylon Gloves “S” 16779931130 Nylon Gloves “M” 16779931131 Nylon Gloves “L” 16779931132 Nylon Gloves “XL” 16779931133 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 129 Chapter 12 Preventative Maintenance Chapter 12 Preventative Maintenance (PM) Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 130 12.1.1 Checklist Preventative Maintenance- EM ACE 200 CARBON Thread, Combination and SPUTTER Coater ................3 (Order number PM Kit: 16ACE200CARBONM12) ............3 (Order number PM Kit: 16ACE200COMBIPM12) ............3 (Order number PM Kit: 16ACE200SPUTERM12) ............3 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 131 (Order number PM Kit: 16ACE200COMBIPM12) (Order number PM Kit: 16ACE200SPUTERM12) Security Measures during Maintenance and Cleaning Maintenance work on this instrument should only be carried out by a qualified Leica trained engineer! Customer Date Engineer Instrument Type (catalog no.) Serial Number Job Sheet or ETR no.
  • Page 132 Final Function Test after PM Comments Total expenditure of working time: ca. 3-4 hours, depending on system status. CARBON Thread or “Combi” configuration only by SPUTTER configuration only by Service Manual / Leica ACE200 Version 1.0 – 12/2012 Page...
  • Page 133 Chapter 13 Trouble shooting Chapter 13 Trouble shooting Version 1.0 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...
  • Page 134 13.2.6 E2005 Sputter head ..................8 13.2.7 E2007 Mains voltage unstable ............... 8 13.2.8 E2010 , E2011 Sputter plasma error ............. 9 13.2.9 E2015, Sputter head not connected ............... 9 Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 135: Error Codes List

    E4009 Head over temperature > 65°C E4011 Mains voltage missing Check door switch E4012 Mains relay not on Check door switch E4015 Evaporation head not connected Detected by temp. sensor Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 136: E1003 , E1006 Shutter Motor

    E1006 Shutter motor sensor blocked in ON position Cause Elimination Sensor wire disconnected Check sensor wire connections Sensor defect Exchange sensor with cable For shutter motor test use service page “Motor” Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 137: Error1004 Shutter Motor

    One of the safety switches not closed or defect. Green colour indicates “closed” Go into service to check indication If needed ,exchange switch Safety switch not connected See diagram at 7.1.1 to check connections Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 138: E1015 Pump Timeout

    Check Argon cylinder pressure (0,5 bar) Could not regulate argon flow to correct Check argon regulation valve (see process value within 7 minutes. 7.1.8 and 9.1.3) Trouble E1018 Cause Elimination Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 139: E2002 , E2003 , E2004 Mains Voltage

    7.1.2 Missing mains contact Safety switch not closed See 13.2.2 Test To test the mains voltage: 1.) Pump chamber to 5X10 mbar 2.) Press 3.) Check Detected Line Voltage Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 140: E2005 Sputter Head

    E2007 Mains voltage unstable Cause Elimination Voltage from unit outside unstable Check voltage with a Voltmeter See diagram at 7.1.2 to check and measure Bad mains connection unit inside mains connections Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 141: E2010 , E2011 Sputter Plasma Error

    Missing wire contact for sputter head Check wire contacts to pin1 and pin 2 ,see Temp.sensor detection diagram 7.1.6 Exchange sensor ,see 6.1.4.2 for PT 1000 temperature sensor defect disassembling of the sputter head Service Manual / Leica ACE200 Version 1.0 - 12/2012 Page...

  • Page 142: Decontamination Certificate

    Decontamination Certificate Dear Customer, Any product that is to be returned to Leica Microsystems or serviced on site, must be cleaned and decontaminated in the appropriate manner. Since it is not possible to decontaminate for prion diseases, such as CJD, BSE, CWD etc., equipment exposed to specimens containing prion diseases cannot be returned to Leica Microsystems for repair.
  • Page 143 Phone Facsimile Leica Mikrosysteme GmbH · Hernalser Hauptstrasse 219 · A-1170 Vienna · Phone: +43 1 488 99 – 0 Fax: +43 1 488 99 350, email: Service.LNT@leica-microsystems.com Geschäftsführer: Stefan Träger · Colin Davis · Christoph Mätzig · www.leica-microsystems.com Page 2 of 2...

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