Table Of Contents - Ulvac VPC-260F User Manual

To Safely Use This Equipment
(1) Before Using .............................................................................. 1
1. Target Users .......................................................................... 1
2. Read the Manual Thoroughly ................................................ 1
3. Keep This Manual in a Safe Place ......................................... 1
4. Warranty ................................................................................ 1
5. Statutory Requirements for Disposal ..................................... 1
6. Safety during Repair .............................................................. 1
(2) Product Overview ....................................................................... 2
1. Purpose of This Product and Actions that are Prohibited ...... 2
2. Safety Device and its Purpose and Functions ....................... 2
3. Product Specifications ........................................................... 3
4. Individual Unit Specifications ................................................. 3
5. Standard Accessories ............................................................ 5
6. How to Use Switches, Handles, and Operation Levers ......... 6
7. Layout of Switches, Handles, and Operation Levers ............. 7
Evacuation system drawing .................................................. 7
Electrical system drawing ...................................................... 7
(3) Opening the Package and Installation ........................................ 8
1. General Cautions ................................................................... 8
2. Package upon Delivery .......................................................... 8
3. Installation Site ...................................................................... 8
4. Power Supply ........................................................................ 9
5. Necessary Tool List ............................................................. 10
Evaporation power supply cables connection diagram ....... 10
(4) Operations................................................................................ 11
1. Risks and Safety Measures upon Operations ...................... 11
2. Evacuation Device Operation Procedure ............................. 12
2-1 Preparation ................................................................... 12
2-2 Operations .................................................................... 12
2-3 Stop .............................................................................. 12
3. Deposition Steps ................................................................. 13
3-1 Releasing the vacuum chamber .................................... 13
3-2 Vacuum evacuation of vacuum chamber ...................... 13

Table of Contents

Items with shade include description on safety.