Ulvac CRYO-U 12HSPL Manuals

Manuals and User Guides for Ulvac CRYO-U 12HSPL. We have 1 Ulvac CRYO-U 12HSPL manual available for free PDF download: Instruction Manual

Ulvac CRYO-U 12HSPL Instruction Manual

Ulvac CRYO-U 12HSPL Instruction Manual (102 pages)

Brand: Ulvac | Category: Water Pump | Size: 3.71 MB

Table of Contents

Table of Contents
9
8-2 Cryo-U
12
Safety Instructions
13
Disposal Consideration
25
SECTION 1 Cryopump Description
27
Typical CRYO-U
27
Cryopump System
27
Specifications
28
Environmental Requirements
29
External Drawing of CRYO-U
30
Cryopump
30
SECTION 2 Inspection
33
2.1 Shipping List
33
Shipping List for Cryopump System
33
Shipping List for Cryopump Assembly
33
2.2 First Inspection of Cryopump
34
SECTION 3 Quick Installation
35
Quick Installation
35
Quick Installation Process Flow
36
Auxiliary Equipments Required
37
Example of CRYO-U
38
Cryopump Vacuum System
38
Installation
38
Mounting the Cryopump to the Vacuum System
39
Connecting Roughing Pump
41
Connecting Purge Gas Line
41
Connecting Exhaust Pipe
42
Connecting Cooling Water Pipe
43
Connecting the Cryopump to the Compressor Unit (Connecting Flexible Hoses)
43
Connecting the Cryopump to the Compressor Unit
43
Connecting Remote Wiring
44
Connecting Electrical Cables
44
Connecting Flexible Hoses
45
Prior to Startup
47
Rough Pumping
47
Pressure Buildup Test
48
Startup and Cooldown
48
Operation
48
Rough Pumping
48
Normal Operation
49
Crossover
50
Shutdown Procedures
52
Handling of Hazardous Materials
52
SECTION 6 Regeneration
53
The General
53
Regeneration Time
54
Warm-Up Method
54
Regeneration Flow Chart
56
Disconnecting Flexible Hose････････････････････････････7-1
61
Storage･･･････････････････････････････････････････････7-2
62
Disconnecting Flexible Hose
62
SECTION 8 Maintenance
65
Scheduled and Unscheduled Maintenance
65
Consumables
67
Cleaning the Cryopump
68
Charging Helium Gas
69
Charging Helium Gas
71
Helium Circuit Decontamination
72
Disconnecting Flexible Hose
73
Connecting Flexible Hoses
77
Troubleshooting
79
Flexible Hose
87
Conversion of Thermometer Readings
89
Principle of Cryopump Operation
91
Vapor Pressure of Various Kinds of Gas
92
Principle of Refrigerator Operation
93
Principle of Refrigeration
93
Two-Stage Refrigerator
96
Dew Condensation
97
Service Network
99
Major Components
101

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