Table Of Contents - Edwards AIM-S-NW25 Instruction Manual

Contents
Section
1 INTRODUCTION .................................................................................... 1
1.1 Scope ...................................................................................................................... 1
1.2 Description ................................................................................................................ 1
1.3 Gas dependency .......................................................................................................... 2
2 TECHNICAL DATA ................................................................................. 3
2.1 Mechanical Data ......................................................................................................... 3
2.2 Performance, Operating and Storage Conditions ................................................................... 4
2.3 Electrical Data ........................................................................................................... 4
2.4 Materials Exposed to Vacuum .......................................................................................... 4
3 INSTALLATION ..................................................................................... 5
3.1 Unpck and Inspect ....................................................................................................... 5
3.2 Fit the AIM Gauge to the Vacuum System ............................................................................ 5
3.3 Electrical Connections .................................................................................................. 5
3.3.1 Connect to Edwards Controllers or AGD Display .................................................................... 5
3.3.2 Connect to Your Own Supply and Control Equipment .............................................................. 5
4 OPERATION ........................................................................................ 7
4.1 Safety ...................................................................................................................... 7
4.2 Enable and Disable the AIM Gauge .................................................................................... 7
4.3 Pressure Measurement .................................................................................................. 7
4.4 Error Output Signal ...................................................................................................... 9
5 MAINTENANCE ................................................................................... 11
5.1 Introduction .............................................................................................................11
5.2 Replace the Body Tube ................................................................................................11
5.2.1 Remove the AIM Gauge from the Vacuum System .................................................................11
5.2.2 Fit the New Body Tube .................................................................................................11
5.2.3 Refit the AIM Gauge to the Vacuum System ........................................................................11
5.3 Replace the Electrode Assembly .....................................................................................13
5.4 Replacing the Electronics and Magnet Housing ....................................................................13
5.5 Clean the Internal Components ....................................................................................... 13
5.6 Fault Finding .............................................................................................................14
6 STORAGE AND DISPOSAL ....................................................................... 15
6.1 Storage ...................................................................................................................15
6.2 Disposal ...................................................................................................................15
6.3 Return the equipment or components for service..................................................................15
7 SPARES AND ACCESSORIES ..................................................................... 17
7.1 Introduction .............................................................................................................17
7.2 Spares .....................................................................................................................17
7.3 Accessories ...............................................................................................................17
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NRA737880 Issue E
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