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Summary of Contents for Edwards GXS 0-60 SLM
- Page 1 edwardsvacuum.com GXS Flow Monitor kit INSTRUCTION MANUAL DESCRIPTION ITEM NUMBER Flow Monitor 0-60 SLM A60027043 Flow Monitor 0-200 SLM A60027044 A60027880_A Original instructions...
- Page 2 Copyright notice ©Edwards Limited 2020. All rights reserved. Trademark credit Edwards and the Edwards logo are trademarks of Edwards Limited, Innovation Drive, Burgess Hill, West Sussex RH15 9TW. Disclaimer The content of this manual may change from time to time without notice. We accept no liability for any errors that may appear in this manual nor do we make any expressed or implied warranties regarding the content.
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Page 3: Table Of Contents
Contents 1. Introduction..........5 1.1 Scope and definitions. - Page 4 List of Figures Figure 1: Flow Monitor kit general arrangement ........10 Figure 2: Connect a tube fitting.
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Page 5: Introduction
1.1 Scope and definitions This manual provides installation, operation and maintenance instructions for the Edwards GXS Dry Pumping System Nitrogen Flow Monitor, abbreviated to Flow Monitor in the remainder of this manual. Use the Flow Monitor as specified in this manual. Use this manual in conjunction with the GXS pump manual. -
Page 6: Construction
A60027880_A - Introduction ▪ GXS450/2600 0‑200 SLM type is designed for: ▪ GXS450 ▪ GXS450/2600 ▪ GXS450/4200 ▪ GXS750 ▪ GXS750/2600 ▪ GXS750/4200 1.3 Construction Refer to Figure: Flow Monitor kit general arrangement on page The Flow Monitor kit has: ▪... -
Page 7: Technical Data
A60027880_A - Technical data 2. Technical data Table 1 Technical data Parameter Data Mass 0.6 kg 60 SLM: ± 3.5% Accuracy at 6.2 bar(g) 200 SLM: ± 2% Ambient operating temperature range 5 to 40 °C Maximum ambient operating humidity 90% RH (non condensing) Maximum working pressure 6.9 bar(g) (100 psi(g)) -
Page 8: Installation
A60027880_A - Installation 3. Installation 3.1 Safety WARNING: Obey the safety instructions and take note of appropriate precautions. Only suitably trained and supervised technicians may install the Flow Monitor. WARNING: The Flow Monitor is not intended to perform a safety function, it is not calibrated and must be used for indication only. -
Page 9: Install The Flow Monitor
A60027880_A - Installation Description Quantity Check Pipe M5 Screw Label 3.3 Install the Flow Monitor Install the Flow Monitor as shown in Figure: Flow Monitor kit general arrangement on page Before you start installation: ▪ Make sure that the electrical power supply to the system is switched off. ▪... - Page 10 A60027880_A - Installation Figure 1 Flow Monitor kit general arrangement Item no. Description Quantity Flow monitor Label Flow monitor to Purge manifold pipe M5 Screws Bracket Page 10...
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Page 11: Maintenance
A60027880_A - Maintenance 4. Maintenance 4.1 General Follow the procedure during the maintenance of the dry pumping system: ▪ Make sure that the Flow Monitor is clean and is not damaged. ▪ Make sure that the bracket is correctly installed to the pump rear bulkhead at the Flow Monitor body. -
Page 12: Storage
A60027880_A - Storage 5. Storage If the Flow Monitor is not used immediately, refit any protective packaging and store in cool, dry conditions until required. When required for use, install the kit as described in Install the Flow Monitor on page Page 12... -
Page 13: Disposal
A60027880_A - Disposal 6. Disposal Dispose of the Flow Monitor and any components in accordance with all local and national safety and environmental requirements. Page 13... -
Page 14: Appendix A1 - Tube Fittings
A60027880_A - Appendix A1 - Tube fittings 7. Appendix A1 - Tube fittings 7.1 Correct use of tube fittings Note: It is recommended to use an additional spanner when you remove or fit the tube connector, to make sure that the fitting does not move. You must know how to correctly fit and tighten tube fittings in order to prevent gas leaks. -
Page 15: Reconnect A Tube Fitting
A60027880_A - Appendix A1 - Tube fittings 7.1.2 Reconnect a tube fitting You can achieve an accurate seal against leakage, even if you disconnect the tube connector several times and re-connect again. Refer to Figure: Reconnect a tube fitting on page 15 Shows the tube connector after disconnection. -
Page 16: Return The Equipment Or Components For Service
8. Return the equipment or components for service Before you send your equipment to us for service or for any other reason, you must send us a completed Declaration of Contamination of Vacuum Equipment and Components – Form HS2. The HS2 form tells us if any substances found in the equipment are hazardous, which is important for the safety of our employees and all other people involved in the service of your equipment. - Page 17 This page has been intentionally left blank.
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