SevenStar CS210-C MFC User Manual
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SevenStar CS210-C MFC User Manual

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CS210-C MFC/MFM
User's Manual
2022.11

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Summary of Contents for SevenStar CS210-C MFC

  • Page 1 Security: Unclassified CS210-C MFC/MFM User’s Manual 2022.11...

  • Page 2: Table Of Contents

    5.1 Initial check ..........2.3.2.2 Compression Fitting Installation ..... 5.2 Troubleshooting ..........2.4 Electrical Installation ......... SECTION 6 WARRANTY AND SERVICES 2.5 Checking Before Operation....... 6.1 Guarantee of Sevenstar ........ 6.2 Product Warranty…………………………... SECTION3 FUNCTIONS 6.3 Services ............3.1 General............6.4 Disclaimer .............

  • Page 3: Declaration

    The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.

  • Page 4: Attention

    User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.

  • Page 5: General

    & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS210-C MFC/MFM are a latest generation MFC for use in semiconductor 3 of 36...
  • Page 6 The CS210-C MFC/MFM incorporate a dual interface RS-485 and EtherCAT digital interfaces. CS210-C series have wide range of power supply(available for +20.4 ～ +26.4 VDC).

  • Page 7: Specification

    1.5 Specification Type CS210C Full scale range ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM ( 0～1,2,3,5,10,20,30)SLM ±1.0% S.P. (≥35% F.S.) ± 0.35% F.S. (＜35% F.S.) Accuracy Linearity ±0.5% F.S. Repeatability ±0.2% F.S. ≤ 0.8 sec (SEMI E17-0600) Response Time Normally Closed Valve Rest Position No Valve Normally Open (0.05～0.35) MPa（≤10slm）...

  • Page 8: Calibration Features

    Tem — 273.15K ( 0 º C ); Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale 1.6 Calibration Features...

  • Page 9: Section 2 Installation

    2.2 Unpacking The CS210-C MFC/MFM are assembled，calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room.

  • Page 10: Mechanical Installation

    second clean bag should be removed in the clean room when MFC installed in the system. 2.3 Mechanical Installation 2.3.1 General Most applications will require a positive shutoff valve in line with the MFC. Pressurized gas trapped between the two devices can cause purge effects, and consideration must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the process sequencing.
  • Page 11 Figure 2-1 CS210-C (RS-485) MFC/MFM 9 of 36...
  • Page 12 Figure 2-2 CS210-C(RS-485) Product dimensions 10 of 36...
  • Page 13 Figure 2-2a Product with A-seal dimensions 11 of 36...
  • Page 14 Figure 2-3 CS210-C (EtherCAT) MFC/MFM 12 of 36...
  • Page 15 Figure 2-4 CS210-C(EtherCAT) Product dimensions 13 of 36...

  • Page 16: Installation

    Table 2-1 The length of the product with different fittings Fitting VCR1/4〞 M 1.5〞 Compression Fittingφ6; Compression Fittingφ3 Length VCO1/4〞 M W-seal Ф4(inner)×1hose Compression Fitting1/4; Compression Fittingφ10 Ф6(inner)×1hose 1.5〞C-seal Compression Fitting1/8; Compression Fitting3/8 Ф5(inner)×1.5hose A-seal L（mm） 112.8 117.6 105.2 Attention : The height (which is showing in figure 2-2 and figure 2-4 ) of 132mm are height without electric connectors of cable.

  • Page 17: 1/4Vcr Installation

    Figure 2-5 VCR original style gasket Figure 2-6 VCR retainer gasket 2.3.2.2 Two-ferrule (Compression Fitting) Connection Refer to figure 2-8. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-8.

  • Page 18: Compression Fitting Installation

    Attention : When installing the fitting, you should manually use spanner to wrench it tighten by 1/2 turn pulling up, (imported Compression Fitting should use spanner to be tighten in 1,25 turns) to prove its not blow-by after your installing the front ferrule 、back ferrule and nut. Please note you should use two spanners to operating, one spanner for locking the fitting stable and another one for revolving the nut.
  • Page 19 Figure 2-9 RS485 connector 1、TX+ 2、TX- 3、RX+ 6、RX- Figure 2-10 EtherCAT connector of RJ45 2.4.3 Table of Selecting Type of Cable and its Illustration of Connection Table 2-2 Table of Selecting Type of Cable D08- To USB D08- 1/2/4 2F/3F/4F Input 2B/3B/4B Serial of...
  • Page 20 QCX-20/ QCX-18/QCX-P18 QCX-P20 QCX-34 QCX-50 QCX-47 (DB9 pin) QCX-49 QCX-34 QCX-50 （EtherCAT） Figure 2-11 CS Product and Illustration of Connecting Power D08-1D/1F 18 of 36...
  • Page 21 Figure 2-12 CS Product and Illustration of Connecting Power 19 of 36...

  • Page 22: Checking Before Operation

    Figure 2-13 Illustration of Connecting CS Product Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 2.5 Checking Before Operation Before operating the MFC the following checks should be completed:...

  • Page 23: Section3 Functions

    CS210-C MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS210-C MFC/MFM can be provided to the MFC through one of three sources, in digital or analog mode.

  • Page 24: Soft-Start

    3.6 Valve Command Mode CS210-C MFC/MFM are available for valve-close or valve-open by input digital signal directly. The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command. For more information, please refer to www.mfcsevenstar.cn.

  • Page 25: Multi-Gas And Multi-Flow

    The Total Flow accumulator will record the amount of gas (in SCC) that has been delivered by CS210-C MFC/MFM. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, means the amount of gas delivered 3000SCC.For...

  • Page 26: Led

    Valve Coil Failure or Valve Disconnected Temperature Out of Operating Range After power up the LED on the top of the CS210-C MFC/MFM is turned GREEN. A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED.For more information, please refer to...

  • Page 27: Caution

    For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden The used gas should be purified without dust，liquid and oil stain. If necessary, the filter should be added to gas system for purification. If the outlet of MFC is connected to liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC.

  • Page 28: Section 6 Warranty And Services

    Baud rate error Check baud rate of MFC PCB problems *Contact Sevenstar Attention : * Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other problems, contact Sevenstar. SECTION 6 WARRANTY AND SERVICES 26 of 36...

  • Page 29: Guarantee Of Sevenstar

    Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.
  • Page 30 Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.

  • Page 31: Services

    6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;...
  • Page 32 Ⅰ CS210 Selection Guide Appendix CS210-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] Type – - [C] Metal type, stainless steel VV, 10Ra [g,g,g] – Standard: SEMI52-0302（Note:029 NH available to type C） For example -[ 013 ] N -[ 007 ] H -[ 000 ] Mixture Gases (please consult [d] for details) Type of Valve –...
  • Page 33 -[ - ]：Default Value The letters on cover and tag：In English Differential Pressure: (0.05 ~ 0.35) MPa (7.3~50.8 psid) (FLOW≤10SLM) ＜ (0.1 ~ 0.35) MPa (14.5~50.8 psid) (10SLM FLOW≤30SLM ) ＜ (0.2 ~ 0.45) MPa (29.0~65.3 psid) (30SLM FLOW) CS200-A、CS210-C、CS200-D XXXN：＜0.02MPa (2.9psid) Proof pressure :3 MPa (435.1 psig) Calibration temperature :(22±...
  • Page 34 Take CS210-C013C500CDGGVHS as the example CS210 - C 500C J Model：CS210 Type: Metal type Gas: Type of Valve: Normally closed Full range Electronic connector：DB9 Fittings：Compression Fittingφ6mm Seal material: Metal type Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 32 of 36...
  • Page 35 APPENDIX II CONVERSION FACTOR GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (SEMIE52-0302) (g/l 0℃) FACTOR 0.2400 1.2930 1.001 0.1250 1.7837 1.420 0.1168 3.4780 0.673 0.0647 11.1800 0.378 0.1217 5.2270 0.450 0.1779 3.0250 0.508 0.5020 1.2350 0.441 0.1297 6.8600 0.306 0.1659 3.9636...
  • Page 36 GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (SEMIE52-0302) (g/l 0℃) FACTOR 0.1405 3.4180 0.570 3.4224 0.0899 1.010 0.0861 3.6100 0.999 0.1911 1.6270 0.988 0.3482 0.8930 1.001 0.0545 5.707 1.000 0.2278 1.5200 0.802 1.2418 0.1786 1.420 0.0593 3.7390 1.431 0.2486 1.2500 1.000...

  • Page 37: Appendixⅱ

    Conversion Factors Instruction： MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...

  • Page 38: Appendixⅲ

    APPENDIX Ⅲ Software Download Address: en.mfcsevenstar.com Please register first and then download software. Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn mfcoversea@sevenstar.com.cn 36 of 36...
  • Page 39 Beijing Sevenstar Flow Co., Ltd. CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd. Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area Post code： 100176 Tel： (+86)-10-56178088 Fax： (+86)-10-56178099 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn Shanghai Office: Room 511 Building.29, No.368, Zhangjiang Road, Pudong New District, Shanghai Tel：...

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