SevenStar CS200-A MFC User Manual
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SevenStar CS200-A MFC User Manual

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CS200-A MFC/MFM
User's Manual
Jan, 2023

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Summary of Contents for SevenStar CS200-A MFC

  • Page 1 Security: Unclassified CS200-A MFC/MFM User’s Manual Jan, 2023...

  • Page 2: Table Of Contents

    5.1 Initial check ............. 2.3.2.2 Compression Fitting Installation ..5.2 Troubleshooting ..........2.4 Electrical Installation ........SECTION 6 WARRANTY AND SERVICES 2.5 Checking Before Operation....... 6.1 Guarantee of Sevenstar ........6.2 Product Warranty…………………………... SECTION3 FUNCTIONS 6.3 Services ............3.1 General............6.4 Disclaimer ............

  • Page 3: Declaration

    The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.

  • Page 4: Attention

    User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.

  • Page 5: General

    & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS200-A MFC/MFM are a latest generation MFC for use in semiconductor 3 of 37...
  • Page 6 The CS200-A MFC/MFM incorporate a dual interface, voltage and current as well as RS-485，DeviceNet and ProfiBus digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring.

  • Page 7: Specification

    1.5 Specification Type CS200A ( 0～5,10,20,30,50,100,200,300,500)SCCM Full scale range (N ( 0～1,2,3,5,10,20,30,50)SLM Accuracy ± 1.0% S.P. (≥35% F.S.) ± 0.35% F.S. (＜35% F.S.) Linearity ± 0.5% F.S. Repeatability ± 0.2% F.S. ≤1sec Response Time Valve Rest Position Normally Closed or Normally Open（F.S.≤30slm）...

  • Page 8: Calibration Features

    Tem — 273.15K ( 0 º C ); Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale 1.6 Calibration Features...

  • Page 9: Section 2 Installation

    2.2 Unpacking The CS200-A MFC/MFM are assembled，calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room.

  • Page 10: Mechanical Installation

    second clean bag should be removed in the clean room when MFC installed in the system. 2.3 Mechanical Installation 2.3.1 General Most applications will require a positive shutoff valve in line with the MFC. Pressurized gas trapped between the two devices can cause purge effects, and consideration must be given to the sitting of the shutoff valve (upstream or downstream) in relation to the process sequencing.
  • Page 11 Figure 2-1 CS200-A MFC/MFM 9 of 37...
  • Page 12 Figure 2-2 Product dimensions 10 of 37...
  • Page 13 Figure 2-3a Product with A-seal dimensions 11 of 37...
  • Page 14 Figure 2-4 Product dimensions 12 of 37...
  • Page 15 Figure 2-5 Product with EtherCAT dimensions 13 of 37...

  • Page 16: Installation

    Table 2-1 The length of the product with different fittings Fitting VCR1/4〞 M Compression Fittingφ6; Compression Fittingφ3 1.5〞W-seal VCO1/4〞 M Compression Fitting1/4; Compression Fittingφ10 1.5〞C-seal Ф4(inner)×1hose Ф6(inner)×1hose Compression Fitting1/8; Compression Fitting3/8 A-seal Ф5(inner)×1.5hose Length L（mm） 112.8 117.6 105.2 Attention : The height (which is showing in figure 2-2, figure 2-3a and figure 2-4 ) of 132mm are height without electric connectors of cable.

  • Page 17: Compression Fitting Installation

    Figure 2-7 VCR retainer gasket 2.3.2.2 Two-ferrule (Compression Fitting) Connection Refer to figure 2-8. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-8.

  • Page 18: Electrical Installation

    2-12 , figure2-13，figure2-14 , figure2-15 , figure2-16 and figure2-17. Attention : Although sharing with the same appearance of CS200-A MFC, the 0~5V Setpoint Input, the 4~20mA or 0～20mA Setpoint Input and the valve Over-ride are not available. That means pin1 and pin6 of D-sub 9 and pin1, pin7, pin8 and pin12 of D-sub 15 are not available.
  • Page 19 Figure 2-9 9 pin male D-sub connector Figure 2-10 15 pin male D-sub connector Figure 2-11 RS485 connector Figure 2-12 DeviceNet connector Figure 2-13 Analog Signal Interface Figure 2-14 RS232-RS485 connector 17 of 37...
  • Page 20 Figure 2-15 ProfiBus connector of Figure 2-16 ProfiBus connector of 9-pin female sub-D 15-pin male sub-D connector 1、TX+ 2、TX- 3、RX+ 6、RX- Figure 2-17 EtherCAT connector of RJ45 18 of 37...
  • Page 21 2.4.3 Table of Selecting Type of Cable and its Illustration of Connection Table 2-2 Table of Selecting Type of Cable D08- To USB D08- 1/2/4 2F/3F/4F Input Input 2B/3B/4B Serial of D08-1F/1FM/1FS/8C/8CM/1G/1GM ± 15V +24V 2E/3E/4E Computer QCX-19/ QCX-17/QCX-P17 QCX-P19 QCX-41 QCX-43 QCX-34...
  • Page 22 Figure 2-19 CS Product and Illustration of Connecting Power Figure 2-20 CS Product and Illustration of Connecting Power 20 of 37...
  • Page 23 Figure 2-21 Illustration of Connecting CS Product Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 21 of 37...

  • Page 24: Checking Before Operation

    CS200-A MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS200-A MFC/MFM can be provided to the MFC through one of three sources, in digital or analog mode.

  • Page 25: Zero

    3.6 Valve Command Mode CS200-A MFC/MFM are available for valve-close or valve-open by input digital signal or analog voltage directly. The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command. For more information, please refer to www.mfcsevenstar.cn...

  • Page 26: Multi-Gas And Multi-Flow

    The Total Flow accumulator will record the amount of gas (in SCC) that has been delivered by CS200-A MFC/MFM. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, means the amount of gas delivered by MFC is 3000SCC For more information, please refer to www.mfcsevenstar.cn...

  • Page 27: Led

    Valve Coil Failure or Valve Disconnected Temperature Out of Operating Range After power up the LED on the top of the CS200-A MFC/MFM is turned GREEN. A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED.

  • Page 28: Section 4 Maintenance

    It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden...

  • Page 29: Troubleshooting

    Address conflict Check address of MFC Baud rate error Check baud rate of MFC PCB problems *Contact Sevenstar Attention : * Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other problems, contact Sevenstar. 27 of 37...

  • Page 30: Section 6 Warranty And Services

    Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.
  • Page 31 Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.

  • Page 32: Services

    Please visit www.mfcsevenstar.cn for more information and find your nearest service and calibration centre. 6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage;...
  • Page 33 Ⅰ CS200 Selection Guide Appendix CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] Type – - [A] Elastomer type（Input 、Output Signal 0～5V） [g,g,g] – Standard: SEMI52-0302 For example -[ 013 ] N -[ 007 ] H -[ 000 ] Mixture Gases (please consult [d] for details) Type of Valve –...
  • Page 34 -[ U ] Vertical Inlet Up -[ D ] Vertical Inlet Down Description – -[ - ]：Default Value The letters on cover and tag：In English Differential Pressure: (0.05 ~ 0.35) MPa (7.3~50.8 psid) (FLOW≤10SLM) ＜ (0.1 ~ 0.35) MPa (14.5~50.8 psid) (10SLM FLOW≤30SLM ) ＜...
  • Page 35 Take CS200-A013C500CDGGVHS as the example CS200 - A 500C D GG V Model：CS200 Type: Elastomer type Gas: Type of Valve: Normally closed Full range Electronic connector：DB15 Fittings：Compression Fittingφ6mm Seal material: Viton Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 33 of 37...

  • Page 36: Appendixⅱ

    APPENDIX II CONVERSION FACTOR GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (g/l 0℃) (SEMIE52-0302) FACTOR 0.2400 1.2930 1.001 0.1250 1.7837 1.420 0.1168 3.4780 0.673 0.0647 11.1800 0.378 0.1217 5.2270 0.450 0.1779 3.0250 0.508 0.5020 1.2350 0.441 0.1297 6.8600 0.306 0.1659 3.9636...
  • Page 37 GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (g/l 0℃) (SEMIE52-0302) FACTOR 0.1405 3.4180 0.570 3.4224 0.0899 1.010 0.0861 3.6100 0.999 0.1911 1.6270 0.988 0.3482 0.8930 1.001 0.0545 5.707 1.000 0.2278 1.5200 0.802 1.2418 0.1786 1.420 0.0593 3.7390 1.431 0.2486 1.2500 1.000...
  • Page 38 Conversion Factors Instruction： MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...

  • Page 39: Appendixⅲ

    APPENDIX Ⅲ Software Download Address: en.mfcsevenstar.com Please register first and then download software. Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn or mfcoversea@sevenstar.com.cn . 37 of 37...
  • Page 40 Beijing Sevenstar Flow Co., Ltd. CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd. Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area Post code： 100176 Tel： (+86)-10-56178088 Fax： (+86)-10-56178099 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn Shanghai Office: Room802-803, Building 3, No. 88 Shengrong Road, Pudong New District, Shanghai Tel：...

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Cs200-a mfm

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