The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Electronics Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.
User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.
e) Please abide by proper steps of purging. Product should be purged and handled with gloves. f) Do not use the instrument in explosive environment. Do not use the instrument in explosive environment, unless the safety certificate is available. g) Please use proper fittings and keep the rules. All fittings of instrument must be matched according to the listing in manual.
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etching, sputtering, ion implantation, vacuum deposition equipment, optical fiber melting, micro-reaction equipment, mixing & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS200J MFC is a latest generation MFC for use in semiconductor applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required.
Attention MFC/MFM is calibrated by N as a standard gas. Units: SCCM (Standard Cubic Centimeter/Min); (Standard Liter/Min) Tem ——273.15K ( 0 ºC ); Standard Situation: Air Pressure——101325 Pa (760mm Hg) F.S : Full Scale 1.6 Calibration Features Normally, the MFC are calibrated close to customer’s requirement (the require should be accorded with the specification).
volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume flow rate can represent mass flow rate. The standard mounting position is horizontal, And other positions such as vertical(inlet up or down),flatwise or customized position are optional. The mounting position should be specified by the customer to ensure the best accuracy.
The CS200J MFC are assembled,calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room.
Table 2-1 The length of the product with different fittings Fitting Length VCR1/4〞 M Compression FittingΦ6;Compression Fitting1/4”; Compression Fitting3/8”; VCO1/4〞 M Compression FittingΦ10; Compression FittingΦ3;Compression Fitting1/8” L(mm) 157.8 Attention : The height (which is showing in figure 2-2 ) of 132mm are height without electric connectors of cable. It should be added around 50mm more after adding the electric connector.
Figure 2-3 VCR original style gasket Figure 2-4 VCR retainer gasket 2.3.2.2 Two-ferrule (Compression Fitting) Connection Refer to figure 2-5. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-6.
Attention : When installing the fitting, you should manually use spanner to wrench it tighten by 1/2 turn pulling up, (imported Compression Fitting should use spanner to be tighten in 1,25 turns) to prove its not blow-by after your installing the front ferrule 、back ferrule and nut.
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Attention : Note: Although sharing with the same appearance of CS200J MFC, the 0~10V Setpoint Input, the 4~20mA Setpoint Input and the valve Over-ride are not available. That means pin1 and pin6 of D-sub 9 and pin1, pin7, pin8 and pin12 of D-sub 15 are not available. Figure 2-6 9 pin male D-sub connector Figure 2-7 15 pin male D-sub connector Figure 2-8 RS485 connector...
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2.4.3 Table of Selecting Type of Cable and its Illustration of Connection D08- To USB D08- 1/2/4 2F/3F/4F Input Input 2B/3B/4B Serial of D08-1F/1FM/1FS/8C/8CM/1G/1GM ±15V +24V 2E/3E/4E Computer QCX-19/ QCX-17/QCX-P17 QCX-P19 QCX-41 QCX-43 QCX-34 QCX-50 (DB15 Pin) QCX-46 QCX-48 QCX-20/ QCX-18/QCX-P18 QCX-P20 QCX-42...
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Figure 2-11 CS Product and Illustration of Connecting Power Figure 2-12 CS Product and Illustration of Connecting Power 15 of 32...
Figure 2-13 Illustration of Connecting CS Product Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 2.5 Checking Before Operation Before operating the MFC the following checks should be completed:...
2.5.1 Check that tubing is leak free. 2.5.2 Check the process sequence and proper function of all other gas components involved. 2.5.3 Check the voltage of command signals and power supply to the MFC. 2.5.4 Check that the appropriate type of gas is being supplied at the rated pressure. 2.5.5 Allow the MFC to warm up for 20 minutes, and then check the zero level output.
digital or analog mode. Please refer to “Digital MFC Communication User Manual” for more details. 3.3 Zero The Zero function can be commanded through the digital interface or zero-button. Before zero MFC, please make sure that no gas flow through MFC. Then zero MFC by the digital interface or zero-button.
CS200J MFC is available for valve-close by input digital signal or analog voltage directly. The Valve Command Mode is used to select one way to interpret the analog signal of Valve Command. Please refer to “Digital MFC Communication User Manual” for more details.
3.9 Total Flow Accumulator The Total Flow accumulator will record the amount of gas (in SCC) that has been delivered by CS200J MFC. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, means the amount of gas delivered by MFC is 3000SCC Please refer to “Digital MFC Communication User Manual”...
It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden...
Attention : For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to purge the controller could cause a fire or explosion resulting in death.
* Mark indicates that reparation and adjustment must be dealt under specialist advices。For any other problems, contact Sevenstar. SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaw of the material 23 of 32...
Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.
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Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.
6.4 Disclaimer Beijing Sevenstar Electronics Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;...
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CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] [t] – Type - [J] MFC with shut-off valve in the front [g,g,g] – Gas Standard: SEMI52-0302 (029 NH is unavailable) For example -[ 013 ] N2 -[ 007 ] H2 -[ 000 ] Mixture Gases (please consult [d] for details) [v] –...
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-[ - ]:Default Value The letters on cover and tag:In English Differential Pressure: (0.05 ~ 0.35) MPa (7.3~50.8 psid) (FLOW≤10SLM) < (0.1 ~ 0.35) MPa (14.5~50.8 psid) (10SLM FLOW≤30SLM ) < (0.2 ~ 0.45) MPa (29.0~65.3 psid) (30SLM FLOW) CS200-JXXXN:<0.02MPa (2.9psid) Max inlet pressure :3 MPa (435.1 psig) Calibration temperature :(22±2)℃...
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CS200 - J 500C R GG V Model:CS200 Type: MFC with shut-off valve Gas: Type of Valve: Normally closed Full range Electronic connector:DB9 Fittings:Compression Fittingφ6mm Seal material: Viton Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ APPENDIX II CONVERSION FACTOR 29 of 32...
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by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n” sorts of gases, could calculate the conversion factors C by the following formula: Basic Formula:...
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Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.,Ltd. CS Series Mass Flow Controller Beijing Sevenstar Electronics Co., Ltd. Mass Flow Meter Subsidiary Co., Ltd. Address: No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China P.O.BOX 3#741, Beijing, China Post code: 100015 Tel:...
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