SevenStar CS200-C User Manual
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SevenStar CS200-C User Manual

Mfc/mfm
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CS200-C MFC/MFM
User's Manual
Jan, 2023

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Summary of Contents for SevenStar CS200-C

  • Page 1 Security: Unclassified CS200-C MFC/MFM User’s Manual Jan, 2023...

  • Page 2: Table Of Contents

    5.1 Initial check ............. 2.3.2.2 Compression Fitting Installation ....5.2 Troubleshooting ..........2.4 Electrical Installation ........SECTION 6 WARRANTY AND SERVICES 2.5 Checking Before Operation....... 6.1 Guarantee of Sevenstar ........6.2 Product Warranty…………………………... SECTION3 FUNCTIONS 6.3 Services ............3.1 General............6.4 Disclaimer ............

  • Page 3: Declaration

    The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.

  • Page 4: Attention

    User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.

  • Page 5: General

    & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS200-C MFC/MFM are a latest generation MFC for use in semiconductor 3 of 38...
  • Page 6 RS-485，DeviceNet and ProfiBus digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. CS200-C series have wide range of power supply(available for ± 8 ～ ± 16 VDC or +14 ～ +28 VDC).

  • Page 7: Specification

    1.5 Specification Type CS200C Full scale range ( 0～2,3,5,10,20,30,50,100,200,300,500)SCCM ( 0～1,2,3,5,10,20,30)SLM Accuracy ±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (＜35% F.S.) Linearity ±0.5% F.S. Repeatability ±0.2% F.S. ≤ 0.8 sec (SEMI E17-0600) Response Time Normally Closed Valve Rest Position No Valve Normally Open (0.05～0.35) MPa（≤10slm）...

  • Page 8: Calibration Features

    Tem — 273.15K ( 0 º C ); Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale 1.6 Calibration Features...

  • Page 9: Section 2 Installation

    2.2 Unpacking The CS200-C MFC/MFM are assembled，calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room.

  • Page 10: Mechanical Installation

    It is recommended that you install an in-line filter upstream to the controller in order to prevent MFC from contamination. CS200-C should be mounted in the position accord with the requirement in the purchase order. The gas should be clean and dry. The mounting should be free from shock or vibration.
  • Page 11 Figure 2-1 CS200-C MFC/MFM 9 of 38...
  • Page 12 Figure 2-2 Product dimensions 10 of 38...
  • Page 13 C-seal Figure 2-3a Product with dimensions 11 of 38...
  • Page 14 Figure 2-3b Product with W-seal dimensions 12 of 38...
  • Page 15 Figure 2-4 Product dimensions 13 of 38...
  • Page 16 Figure 2-5 Product with EtherCAT dimensions 14 of 38...

  • Page 17: Installation

    Table 2-1 The length of the product with different fittings Compression Fittingφ6; VCR1/4〞 M 1.5〞W-seal Compression Fittingφ3 VCO1/4〞 M Fitting Compression Fitting1/4; Ф4(inner)×1hose 1.5〞C-seal Length Ф6(inner)×1hose Compression Fittingφ10 A-seal Compression Fitting1/8; Ф5(inner)×1.5hose Compression Fitting3/8 L（mm） 112.8 117.6 105.2 Attention : The height (which is showing in figure 2-2 and figure 2-4 ) of 132mm are height without electric connectors of cable.

  • Page 18: Compression Fitting Installation

    Figure 2-6 VCR original style gasket Figure 2-7 VCR retainer gasket 2.3.2.2 Two-ferrule (Compression Fitting) Connection Refer to figure 2-8. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-8.

  • Page 19: Electrical Installation

    2.4 Electrical Installation 2.4.1 General With simple switching power supply, CS200-C MFC/MFM are available for ± 8 to ± 16 VDC (dual-ending) and +14 to +28 VDC (single-ending). Customer can choose as need. Customer can choose 9 pin male Sub-D or 15 pin male sub-D connector. 9 pin male Sub-D connector is the SEMI Standard compatible, only 0-5V analog signal control and output available.
  • Page 20 Attention : Although sharing with the same appearance of CS200-C MFC, the 0~5V Setpoint Input, the 4~20mA or 0～20mA Setpoint Input and the valve Over-ride are not available. That means pin1 and pin6 of D-sub 9 and pin1, pin7, pin8 and pin12 of D-sub 15 are not available.
  • Page 21 Figure 2-15 ProfiBus connector of Figure 2-16 ProfiBus connector of 9-pin female sub-D 15-pin male sub-D connector 1、TX+ 2、TX- 3、RX+ 6、RX- Figure 2-17 EtherCAT connector of RJ45 interface 19 of 38...
  • Page 22 2.4.3 Table of Selecting Type of Cable and its Illustration of Connection D08- To USB D08- 1/2/4 2F/3F/4F Input Input 2B/3B/4B Serial of D08-1F/1FM/1FS/8C/8CM/1G/1GM ± 15V +24V 2E/3E/4E Computer QCX-19/ QCX-17/QCX-P17 QCX-P19 QCX-41 QCX-43 QCX-34 QCX-50 (DB15 Pin) QCX-46 QCX-48 QCX-20/ QCX-18/QCX-P18 QCX-P20...
  • Page 23 Figure 2-18 CS Product and Illustration of Connecting Power Figure 2-19 CS Product and Illustration of Connecting Power 21 of 38...
  • Page 24 Figure 2-20 Illustration of Connecting CS Product Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 22 of 38...

  • Page 25: Checking Before Operation

    CS200-C MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS200-C MFC/MFM can be provided to the MFC through one of three sources, in digital or analog mode.

  • Page 26: Zero

    3.6 Valve Command Mode CS200-C MFC/MFM are available for valve-close or valve-open by input digital signal or analog voltage directly. The Valve Command Mode is used to select one of three ways to interpret the analog signal of Valve Command. For more information, please refer towww.mfcsevenstar.cn.Path:Service>>Downloads>>Software .download>>Communicati...

  • Page 27: Multi-Gas And Multi-Flow

    The Total Flow accumulator will record the amount of gas (in SCC) that has been delivered by CS200-C MFC/MFM. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, means the amount of gas delivered 3000SCC.For...

  • Page 28: Led

    Valve Coil Failure or Valve Disconnected Temperature Out of Operating Range After power up the LED on the top of the CS200-C MFC/MFM is turned GREEN. A warning condition will be announced by a blinking RED and whenever an alarm condition is detected it will be set continuously to RED.For more information, please refer to...

  • Page 29: Section 4 Maintenance

    It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden...

  • Page 30: Section 5 Troubleshooting

    Check closure of series shutoff valve Output reading, present without gas flow, is Zero drift Zero MFC not zero other *Contact Sevenstar Gas connection incorrect Check gas connection Pressure incorrect Check pressure condition Change the control mode by the Wrong control mode software...

  • Page 31: Section 6 Warranty And Services

    Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.
  • Page 32 Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.

  • Page 33: Services

    6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;...
  • Page 34 Ⅰ CS200 Selection Guide Appendix CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] Type – - [C] Metal type, stainless steel VV, 10Ra （Input 、Output Signal 0～5V） [g,g,g] – Standard: SEMI52-0302（Note:029 NH available to type C） For example -[ 013 ] N -[ 007 ] H -[ 000 ] Mixture Gases (please consult [d] for details) Type of Valve...
  • Page 35 ＜ (0.1 ~ 0.35) MPa (14.5~50.8 psid) (10SLM FLOW≤30SLM ) ＜ (0.2 ~ 0.45) MPa (29.0~65.3 psid) (30SLM FLOW) CS200-A、CS200-C、CS200-D XXXN：＜0.02MPa (2.9psid) Proof pressure :3 MPa (435.1 psig) Calibration temperature :(22± 2)℃ Valve command mode :2 Power Supply: +24V Command type:DeviceNet default digital mode; Profibus default mode for Profibus; other analog voltage -[ S ] Customized Requirement For Example: I/O sign:4~20mA；...
  • Page 36 Take CS200-C013C500CDGGVHS as the example CS200 - C 500C D GG M Model：CS200 Type: Metal type Gas: Type of Valve: Normally closed Full range Electronic connector：DB15 Fittings：Compression Fittingφ6mm Seal material: Metal type Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 34 of 38...

  • Page 37: Appendixⅱ

    APPENDIX II CONVERSION FACTOR GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (g/l 0℃) (SEMIE52-0302) FACTOR 0.2400 1.2930 1.001 0.1250 1.7837 1.420 0.1168 3.4780 0.673 0.0647 11.1800 0.378 0.1217 5.2270 0.450 0.1779 3.0250 0.508 0.5020 1.2350 0.441 0.1297 6.8600 0.306 0.1659 3.9636...
  • Page 38 GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (g/l 0℃) (SEMIE52-0302) FACTOR 0.1405 3.4180 0.570 3.4224 0.0899 1.010 0.0861 3.6100 0.999 0.1911 1.6270 0.988 0.3482 0.8930 1.001 0.0545 5.707 1.000 0.2278 1.5200 0.802 1.2418 0.1786 1.420 0.0593 3.7390 1.431 0.2486 1.2500 1.000...
  • Page 39 Conversion Factors Instruction： MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...

  • Page 40: Appendixⅲ

    APPENDIX Ⅲ Software Download Address: en.mfcsevenstar.com Please register first and then download software. Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn mfcoversea@sevenstar.com.cn 38 of 38...
  • Page 41 Beijing Sevenstar Flow Co., Ltd. CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd. Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area Post code： 100176 Tel： (+86)-10-56178088 Fax： (+86)-10-56178099 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn Shanghai Office: Room802-803, Building 3, No. 88 Shengrong Road, Pudong New District, Shanghai Tel：...

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