SevenStar CS100A MFC User Manual
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SevenStar CS100A MFC User Manual

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CS100A MFC/MFM
User's Manual
Jan, 2023

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Summary of Contents for SevenStar CS100A MFC

  • Page 1 Security: Unclassified CS100A MFC/MFM User’s Manual Jan, 2023...

  • Page 2: Table Of Contents

    2.3.2.1 1/4VCR Installation ......... 2.3.2.2 Compression Fitting Installation ....5.2 Troubleshooting ..........2.4 Electrical Installation ........SECTION 6 WARRANTY AND SERVICES 2.5 Checking Before Operation....... 6.1 Guarantee of Sevenstar ........6.2 Product Warranty…………………………... SECTION3 FUNCTIONS 6.3 Services ............3.1 General............6.4 Disclaimer ............

  • Page 3: Declaration

    The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.

  • Page 4: Attention

    User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.

  • Page 5: General

    & matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS100A MFC/MFM are a latest generation MFC for use in semiconductor 3 of 34...
  • Page 6 The CS100A MFC/MFM incorporate a dual interface, voltage and RS-485. It is possible to operate the instrument completely digitally or it can be operated in analog mode .

  • Page 7: Specification

    1.5 Specification CS100A Type Valve Normally Closed No Valve Rest Position (0～10,20,30,50,100,200,300,500) SCCM Full scale range (0～1,2,3,5,10,20,30,50) Accuracy ±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.) Linearity ±0.5% F.S. Repeatability ±0.2% F.S. Response ≤ 1sec Time 0.05～0.35MPa； FLOW≤10 SLM Differential 0.1～0.35MPa ； 10＜FLOW≤30 SLM ＜0.02 MPa Pressure 0.25～0.45MPa ；...

  • Page 8: Calibration Features

    Tem — 273.15K ( 0 º C ); Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale 1.6 Calibration Features...

  • Page 9: Section 2 Installation

    flow rate can represent mass flow rate. The standard mounting position is horizontal, And other positions such as vertical(inlet up or down)，flatwise or customized position are optional. The mounting position should be specified by the customer to ensure the best accuracy. 1.6.2 Manufacturing Environment The MFC are assembled in a class 100 clean room, calibrated, packaged and controlled in class 1000 environment.

  • Page 10: Mechanical Installation

    The CS100A MFC/MFM are assembled，calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room. In order to minimize the contamination, the second clean bag should be removed in the clean room when MFC installed in the system.
  • Page 11 Figure 2-1 Product dimensions 9 of 34...
  • Page 12 Figure 2-2 Product dimensions 10 of 34...
  • Page 13 Figure 2-3 Product dimensions 11 of 34...
  • Page 14 Figure 2-4 CS100A of 3 pin male O 12 of 34...
  • Page 15 Figure 2-5 The Dimensions of CS100A of 3 pin male O 13 of 34...

  • Page 16: Installation

    Length Compression Fittingφ6mm; φ6(inner)x1hose; VCR1/4〞 M Compression Fittingφ3mm; Φ4(inner)x1hose φ5(inner)x1.5hose; Compression Fitting1/4; Fitting Compression Fitting1/8; L（mm） 122.2 115.5 Table 2-1 The length of the product with different fittings Attention : The height (which is showing in figure 2-1 ，figure 2-2 and figure 2-3 ) of 132mm are height without electric connectors of cable.

  • Page 17: Compression Fitting Installation

    Figure 2-7 VCR retainer gasket 2.3.2.2 Two-ferrule (Compression Fitting) Connection Refer to figure 2-8. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-8.

  • Page 18: Electrical Installation

    2.4 Electrical Installation 2.4.1 General CS100A MFC/MFM are available for ± 15 VDC . Customer can choose 9 pin male Sub-D or 15 pin male sub-D connector. CS100A MFC/MFM can communicate with PC via RS485 . 2.4.2 Connections The 9 pin male Sub-D connector, 15 pin male sub-D connector, RS485 connector ,...
  • Page 19 Figure 2-11 RS485 connector Figure 2-12 3 pin male O connector Figure 2-13 15 pin male D-sub（Digital，+24V）connector Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 17 of 34...

  • Page 20: Checking Before Operation

    The flow output of the CS100 MFC/MFM will be available through the RS485 interface, even in the analog control mode. The setting of the CS100A MFC/MFM can be provided to the MFC through one of three sources, in 18 of 34...

  • Page 21: Zero

    Note: Please make sure that no gas flow through MFC; The Setpoint must to be zero; MFC should be warm up not less than 15 minutes. 3.5 Soft-Start The CS100A MFC/MFM support soft-start function. Soft-start allows customer change the setting of MFC with definite rate. For more information, please refer to www.mfcsevenstar.cn.

  • Page 22: Valve Command Mode

    Downloads>>Software download>>Communication Protocol . 3.8 Valve Type CS100A MFC/MFM the type of valve: Normally closed(NC) . When MFC do not have power supply, the “NC” type valve is closed and gas can not flow through. Please mention the valve type when you order the MFC.

  • Page 23: Total Flow Accumulator

    Path: Service >> Downloads>>Software download>>Communication Protocol . 3.11 Alarm The CS100A MFC/MFM will monitor and store certain abnormal conditions as described below. These conditions can be read and reset from the RS485 interface. Provisions will be made for masking (disabling) the alarms or warnings on an individual basis.

  • Page 24: Led

    It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden...

  • Page 25: Section 5 Troubleshooting

    liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC. Attention : For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight. It becomes necessary to remove the controller from the system, purge the controller thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections.

  • Page 26: Section 6 Warranty And Services

    SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaw of the material and quality of product within 12 months since the date of the product purchased by you. The compensation for customer is only limited to invalid part for substitution, installation and processing flaw.

  • Page 27: Product Warranty

    Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.

  • Page 28: Services

    MFC, in which case the warranty will be invalidated. D，Gas connections: The fittings must be handled carefully. Sevenstar guarantees that all fittings have been individually inspected and are scratch-free. E，Fitting procedure: The fitting procedure set out in the manual must be followed meticulously.

  • Page 29: Disclaimer

    6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;...
  • Page 30 Ⅰ CS100 Selection Guide Appendix CS100-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] Type – - [A] Elastomer type [g,g,g] – Standard: SEMI52-0302 For example -[ 013 ] N -[ 007 ] H -[ 000 ] Mixture Gases (please consult [d] for details) Type of Valve –...
  • Page 31 [f,f] Fittings – -[AA] Compression Fittingφ3mm -[BB] Compression Fitting 1/8" -[CC] Compression Fitting 1/4" -[GG] Compression Fittingφ6mm -[MM] VCR 1/4" M -[RR] φ6(inner)x1hose -[VV] φ5(inner)x1.5hose -[TT] φ4(inner)x1hose -[XX ] customized fittings please consult [d] for details Seal Materials – -[ V ] Viton Mounting Position –...
  • Page 32 Take CS100A013C500CDGGVHS as the example CS100 - A 500C D GG V Model：CS100 Type: Elastomer type Gas: Type of Valve: Normally closed Full range: 500SCCM Electronic connector：DB15 Fittings：Compression Fittingφ6mm Seal material: Viton Mounting position: Horizontal For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 30 of 34...

  • Page 33: Appendixⅱ

    APPENDIX Ⅱ CONVERSION FACTOR GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (g/l 0℃) (SEMIE52-0302) FACTOR 0.2400 1.2930 1.001 0.1250 1.7837 1.420 0.1168 3.4780 0.673 0.0647 11.1800 0.378 0.1217 5.2270 0.450 0.1779 3.0250 0.508 0.5020 1.2350 0.441 0.1297 6.8600 0.306 0.1659 3.9636...
  • Page 34 GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (g/l 0℃) (SEMIE52-0302) FACTOR 0.1405 3.4180 0.570 3.4224 0.0899 1.010 0.0861 3.6100 0.999 0.1911 1.6270 0.988 0.3482 0.8930 1.001 0.0545 5.707 1.000 0.2278 1.5200 0.802 1.2418 0.1786 1.420 0.0593 3.7390 1.431 0.2486 1.2500 1.000...
  • Page 35 Conversion Factors Instruction： MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...

  • Page 36: Appendixⅲ

    APPENDIX Ⅲ Software Download Address: en.mfcsevenstar.com Please register first and then download software. Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn mfcoversea@sevenstar.com.cn 34of 34...
  • Page 37 Beijing Sevenstar Flow Co.,Ltd. CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd. Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area Post code： 100176 Tel： (+86)-10-56178088 Fax： (+86)-10-56178099 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn Shanghai Office: Room802-803, Building 3, No. 88 Shengrong Road, Pudong New District, Shanghai Tel：...

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