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Related Manuals for SevenStar CS100D MFC
Summary of Contents for SevenStar CS100D MFC
- Page 1 CS100D MFC/MFM User’s Manual July. 2020...
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Page 2: Table Of Contents
2.3.2.2 Compression Fitting Installation ....5.1 Initial check ............. 2.4 Electrical Installation ........5.2 Troubleshooting ..........2.5 Checking Before Operation....... SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar ........SECTION3 FUNCTIONS 6.2 Product Warranty…………………………... 3.1 General............6.3 Services ............3.2 Control Mode .......... -
Page 3: Declaration
The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Flow Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar. -
Page 4: Attention
User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual. -
Page 5: General
& matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS100D MFC/MFM are a latest generation MFC for use in semiconductor 3 of 30... - Page 6 The CS100D MFC/MFM incorporate a dual interface, voltage and RS-485. It is possible to operate the instrument completely digitally or it can be operated in analog mode .
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Page 7: Specification
1.5 Specification CS100 CS100D Type Valve Normally Closed No Valve Rest Position (0～10,20,30,50,100,200,300,500) SCCM Full scale range (0～1,2,3,5,10,20,30) Accuracy ±1.0% S.P. (≥35% F.S.)； ±0.35% F.S.(＜35% F.S.) Linearity ±0.5% F.S. Repeatability ±0.2% F.S. Response ≤ 1sec Time Differential 0.05～0.35MPa；FLOW≤10 SLM ＜0.02 MPa Pressure 0.1～0.35MPa；10＜FLOW≤30 SLM Temperature... -
Page 8: Calibration Features
Tem — 273.15K ( 0 º C ); Standard Situation: Air Pressure — 101325 Pa (760mm Hg) For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 º C ,1atm”, and the unit of SLM is identical to “L/min, 0 º C ,1atm”. F.S. : Full Scale 1.6 Calibration Features... -
Page 9: Section 2 Installation
flow rate can represent mass flow rate. The standard mounting position is horizontal, And other positions such as vertical(inlet up or down)，flatwise or customized position are optional. The mounting position should be specified by the customer to ensure the best accuracy. 1.6.2 Manufacturing Environment The MFC are assembled in a class 100 clean room, calibrated, packaged and controlled in class 1000 environment. -
Page 10: Mechanical Installation
The CS100D MFC/MFM are assembled，calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room. In order to minimize the contamination, the second clean bag should be removed in the clean room when MFC installed in the system. - Page 11 Figure 2-1 Product dimensio 9 of 30...
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Page 12: Installation
Fitting Compression Fittingφ6mm; φ6(inner)x1hose; Length VCR1/4〞 M Compression Fittingφ3mm; Φ4(inner)x1hose φ5(inner)x1.5hose; Compression Fitting1/4; Compression Fitting1/8; L（mm） 122.2 115.5 Table 2-1 The length of the product with different fittings Attention : The height (which is showing in figure 2-1 ) of 132mm are height without electric connectors of cable. It should be added around 50mm more after adding the electric connector. -
Page 13: Compression Fitting Installation
Figure 2-3 VCR retainer gasket 2.3.2.2 Two-ferrule (Compression Fitting) Connection Refer to figure 2-4. Check the gland to gland space. Remove the gland protector caps. Insert the tubing to the shoulder inside the fitting, and check that the ferrules are positioned as shown in figure2-4. -
Page 14: Electrical Installation
2.4 Electrical Installation 2.4.1 General CS100D MFC/MFM are available for ± 15 VDC . Customer can choose 9 pin male Sub-D or 15 pin male sub-D connector. CS100D MFC/MFM can communicate with PC via RS485 . 2.4.2 Connections The 9 pin male Sub-D connector, 15 pin male sub-D connector, RS485 connector ,... - Page 15 Figure 2-7 RS485 connector Figure 2-8 3 pin male O connector Figure 2-9 15 pin male D-sub（Digital，+24V）connector Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 13 of 30...
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Page 16: Checking Before Operation
2.5 Checking Before Operation Before operating the MFC the following checks should be completed: 2.5.1 Check that tubing is leak free. 2.5.2 Check the process sequence and proper function of all other gas components involved. 2.5.3 Check the voltage of command signals and power supply to the MFC/MFM. 2.5.4 Check that the appropriate type of gas is being supplied at the rated pressure. -
Page 17: Zero
Note: Please make sure that no gas flow through MFC; The Setpoint must to be zero; MFC should be warm up not less than 15 minutes. 3.5 Soft-Start The CS100D MFC/MFM support soft-start function. Soft-start allows customer change the setting of MFC with definite rate. For more information, please refer to www.mfcsevenstar.cn. -
Page 18: Valve Command Mode
Path: Service >> Downloads>>Software download>>Communication Protocol . 3.8 Valve Type CS100D MFC/MFM the type of valve: Normally closed(NC) . When MFC do not have power supply, the “NC” type valve is closed and gas can not flow through. Please mention the valve type when you order the MFC. -
Page 19: Total Flow Accumulator
value is a customer-programmed constant used to offset the flow output independently of all other sensor offset constants, including the zero process. For example, set Target Null Value: -20%F.S， then when no flow through MFC/MFM， the reading is -20%F.S， with gas flow 20%F.S through MFC/MFM，the reading is 0%F.S。Offset range is from -100%F.S to100%F.S。... -
Page 20: Led
It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution 4.2.1 Medium Forbidden... -
Page 21: Section 5 Troubleshooting
The used gas should be purified without dust，liquid and oil stain. If necessary, the filter should be added to gas system for purification. If the outlet of MFC is connected to liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC. Attention : For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight. -
Page 22: Section 6 Warranty And Services
SECTION 6 WARRANTY AND SERVICES 6.1 Guarantee of Sevenstar Sevenstar and its authorized distributors assure that there are not flaw of the material and quality of product within 12 months since the date of the product purchased by you. 20 of 30... -
Page 23: Product Warranty
Sevenstar shall not be responsible for any damage caused by gas leakage or the use of a dangerous gas. Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, 21 of 30... - Page 24 MFC, in which case the warranty will be invalidated. D，Gas connections: The fittings must be handled carefully. Sevenstar guarantees that all fittings have been individually inspected and are scratch-free. E，Fitting procedure: The fitting procedure set out in the manual must be followed meticulously.
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Page 25: Services
6.4 Disclaimer Beijing Sevenstar Flow Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;... - Page 26 Ⅰ CS100 Selection Guide Appendix CS100-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] Type – - [D] Metal type [g,g,g] – Standard: SEMI52-0302 For example -[ 013 ] N -[ 007 ] H -[ 000 ] Mixture Gases (please consult [d] for details) Type of Valve –...
- Page 27 - [ Z ] OX3 pin (6 pin RJ11，Digital, ±15V，available to type A only) [f,f] Fittings – -[MM] VCR 1/4" M -[XX ] customized fittings please consult [d] for details Seal Materials – -[ M ] Metal Mounting Position – -[ H ] Horizontal -[ E ] HESD(Horizontal Edge Side Down) -[ U ] Vertical Inlet Up...
- Page 28 Take CS100A013C500CDGGVHS as the example CS100 - D 500C D MM V Model：CS100 Type: Metal type Gas: Type of Valve: Normally closed Full range: 500SCCM Electronic connector：DB15 Fittings：VCR 1/4" M Seal material: Viton Mounting position: Horizontal For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃ 26 of 30...
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Page 29: Appendixⅱ
APPENDIX Ⅱ CONVERSION FACTOR GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (SEMIE52-0302) (g/l 0℃) FACTOR 0.2400 1.2930 1.001 0.1250 1.7837 1.420 0.1168 3.4780 0.673 0.0647 11.1800 0.378 0.1217 5.2270 0.450 0.1779 3.0250 0.508 0.5020 1.2350 0.441 0.1297 6.8600 0.306 0.1659 3.9636... - Page 30 GAS CODE SPECIFIC HEAT DENSITY CONVERSION ( Cal/g ℃) (SEMIE52-0302) (g/l 0℃) FACTOR 0.1405 3.4180 0.570 3.4224 0.0899 1.010 0.0861 3.6100 0.999 0.1911 1.6270 0.988 0.3482 0.8930 1.001 0.0545 5.707 1.000 0.2278 1.5200 0.802 1.2418 0.1786 1.420 0.0593 3.7390 1.431 0.2486 1.2500 1.000...
- Page 31 Conversion Factors Instruction： MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...
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Page 32: Appendixⅲ
APPENDIX Ⅲ Software Download Address: en.mfcsevenstar.com Please register first and then download software. Note: Please contact our people if you need disk to download software. Email address is weidongxia@sevenstar.com.cn mfcoversea@sevenstar.com.cn 30of 30... - Page 33 Beijing Sevenstar Flow Co.,Ltd. CS Series Mass Flow Controller Beijing Sevenstar Flow Co., Ltd. Address: No.8 Wenchang Avenue Beijing Economic-Technological Development Area Post code： 100176 Tel： (+86)-10-56178088 Fax： (+86)-10-56178099 Homepage： www.mfcsevenstar.cn E-Mail: mfcsales@sevenstar.com.cn Shanghai Office: Room 511, Building 29, No.368 Zhangjiang Road, Pudong New District, Shanghai Tel：...
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