The copy right of The user’s manual of mass flow controller and mass flow meter is subjected to Beijing Sevenstar Electronics Co., Ltd (following abbr. Sevenstar), which is not allowed to duplicate, store and distribute any part of this manual in mean of electric, mechanical, photocopy, recording or other way without permission of Sevenstar.
User of the product should read and comprehend this manual and pay attention to the text with labels and notices. Sevenstar assumes no liability for the customer’s failure to comply with this manual. This manual is necessary for your installation and maintenance, please keep it carefully. 1.3 The notice of safety Please pay attention to the below notices when reading this manual.
e) Please abide by proper steps of purging. Product should be purged and handled with gloves. f) Do not use the instrument in explosive environment. Do not use the instrument in explosive environment, unless the safety certificate is available. g) Please use proper fittings and keep the rules. All fittings of instrument must be matched according to the listing in manual.
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& matching gas system, capillary flow control system, gas chromatograph and other analytical instruments. The CS200-F MFC is a latest generation MFC for use in semiconductor applications and demanding industrial uses where its high accuracy and flexibility in interfacing are required.
Attention MFC/MFM is calibrated by N as a standard gas. Units: SCCM (Standard Cubic Centimeter/Min); (Standard Liter/Min) Tem ——273.15K ( 0 ºC ); Standard Situation: Air Pressure——101325 Pa (760mm Hg) F.S : Full Scale 1.6 Calibration Features Normally, the MFC are calibrated close to customer’s requirement (the require should be accorded with the specification).
volume flow rate is equal to the mass flow rate. Therefore at the standard state, the volume flow rate can represent mass flow rate. The standard mounting position is horizontal, And other positions such as vertical(inlet up or down),flatwise or customized position are optional. The mounting position should be specified by the customer to ensure the best accuracy.
The CS200-F MFC are assembled,calibrated and clean packaged under clean room conditions. These series products are packaged with two separately sealed plastic bags. The outside is common plastic bag, the inside is clean bag. The outside bag should be removed in the entrance to the clean room.
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Figure 2-4 Product dimensions Fitting Length VCR1/4〞 M Compression FittingΦ6; Compression Fitting1/4”;Compression Fitting3/8”; Compression FittingΦ10;Compression FittingΦ3; Compression Fitting1/8” VCO1/4〞 M L(mm) 157.8 Table 2-1 The length of the product with different fittings 11of34...
Attention : The height (which is showing in figure 2-2 and figure 2-4) of 132mm are height without electric connectors of cable. It should be added around 50mm more after adding the electric connector. 2.3.2 Installation Place MFC according to the flow direction. 2.3.2.1 1/4〞VCR Connection Refer to figure 2-5 and figure 2-6.
2.4 Electrical Installation 2.4.1 General With simple switching power supply, CS200-F MFC is available for ±8 to ±16 VDC (dual-ending) and +14 to +28 VDC (single-ending). Customer can choose as need. The 13of34...
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Sub-D connector is the SEMI Standard compatible, only 0-5V analog signal control and output available. 15 pin male sub-D connector, both 4-20mA and 0-5V analog signal control and output available. CS200-F MFC/MFM can communicate with PC via RS485 、 DeviceNet or ProfiBus . 2.4.2 Connections 9 pin male Sub-D connector, 15 pin male Sub-D connector , RS485 connector,...
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2.4.3 Table of Selecting Type of Cable and its Illustration of Connection D08- To USB D08- 1/2/4 2F/3F/4F Input Input 2B/3B/4B Serial of D08-1F/1FM/1FS/8C/8CM/1G/1GM ±15V +24V 2E/3E/4E Computer QCX-19/ QCX-17/QCX-P17 QCX-P19 QCX-41 QCX-43 QCX-34 QCX-50 (DB15 Pin) QCX-46 QCX-48 QCX-20/ QCX-18/QCX-P18 QCX-P20 QCX-42...
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Figure 2-17 CS Product and Illustration of Connecting Power Figure 2-18 CS Product and Illustration of Connecting Power 17of34...
Figure 2-19 Illustration of Connecting CS Product Sevenstar manufactures all standard cables, RS485 adaptor, customized cables and some accessories. For more details, contact Sevenstar or its local agent. 2.5 Checking Before Operation Before operating the MFC the following checks should be completed:...
The analog output will be available at all times. The flow output of the CS200-F MFC will be available through the RS485 interface, even in the analog control mode. The setting of the CS200-F MFC can be provided to the MFC through one of two sources, in 19of34...
After zero finished, the green LED will be on constantly. CS Product of the ProfiBus has the Zero function,but does not have the LED. 3.4 Soft-Start The CS200-F MFC support soft-start function. Soft-start allows customer change the setting of MFC with definite rate. Please refer to “Digital MFC Communication User Manual” for more details.
Customer can change gas convert factor, full scale of MFC via digital interface. Full scale of CS200-F MFC can be re-ranged from 30% to 110%F.S. For example, an MFC with 100 SCCM full scale , the new full scale can be re-ranged between from 30 SCCM to 110 SCCM.
The Total Flow accumulator will record the amount of gas (in SCC) that has been delivered by CS200-F MFC. The amount of purge will not be accumulated in the total flow amount. For example, the total reading is 3000, means the amount of gas delivered by MFC is 3000SCC Please refer to “Digital MFC Communication User Manual”...
It can be used about 3 or 4 years with an ultra-clean and non corrosive gas. It can be used about 1 or 2 years with a low purity gas or a corrosive gas. For any other problems, contact Sevenstar. 4.2 Caution...
4.2.1 Medium Forbidden The used gas should be purified without dust,liquid and oil stain. If necessary, the filter should be added to gas system for purification. If the outlet of MFC is connected to liquid sources, a One-way valve should be added to avoid the liquid back to destroy MFC. Attention : For the cases that the MFC/MFM used with toxic, pyrophoric, flammable or corrosive gas, you should ensure that the fixing and fitting are airtight.
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Check closure of series shutoff valve without gas flow, is present not zero Zero drift Zero MFC other *Contact Sevenstar Gas connection incorrect Check gas connection Pressure incorrect Check pressure condition Change the control mode by the Wrong control mode...
Warranty periods: One year 6.2.2 Buyers undertake to check and inspect the goods and to notify Sevenstar of shipment incidents by fax, phone or e-mail as soon as possible after receipting the goods.
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Users are responsible for following the safety rules applicable to each gas they use. Improper use of a Sevenstar MFC will void the warranty, and MFC that have been damaged as a result of improper use will not be replaced by Sevenstar.
6.4 Disclaimer Beijing Sevenstar Electronics Co., Ltd is not responsible to loss as following situation: 1. Nature disaster and calamity; 2. Unsuitable operation and unreasonable usage; 3. Operating and storing in inappropriate or execrable circumstance;...
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AppendixⅠ CS200 Selection Guide CS200-[t] [g,g,g] [v] [r,r,r,r] [a] [f,f] [s] [m] [d] [t] – Type - [F] MFC with shut-off valve [g,g,g] – Gas Standard: SEMI52-0302 (029 NH is unavailable) For example -[ 013 ] N2 -[ 007 ] H2 -[ 000 ] Mixture Gases (please consult [d] for details) [v] –...
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-[ E ] HESD(Horizontal Edge Side Down) -[ U ] Vertical Inlet Up -[ D ] Vertical Inlet Down [d] –Description -[ - ]:Default Value The letters on cover and tag:In English Differential Pressure: (0.05 ~ 0.35) MPa (7.3~50.8 psid) (FLOW≤10SLM) <...
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Take CS200-F013C500CDGGVHS as the example CS200 - F 500C R GG V Model:CS200 Type: MFC with shut-off valve Gas: Type of Valve: Normally closed Full range Electronic connector:DB9 Fittings:Compression Fittingφ6mm Seal material: Viton Mounting position For example Customized requirement: In Chinese. Differential pressure, (0.3-0.5)MPa, customized fittings, customized calibration temperature, 40℃...
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Conversion Factors Instruction: MFC and MFM are standard calibrated by N while it’s out of factory. Other gas calibrations can be approximated by converting of conversion factors of our instruction. While using other gas operating: One single gas: The conversion factors could find out in the users specification instruction. A mixture of two or more gases: Assume there is “n”...
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Beijing Sevenstar Qualiflow Electronic Equipment Manufacturing Co.,Ltd. CS Series Mass Flow Controller Beijing Sevenstar Electronics Co., Ltd. Mass Flow Meter Subsidiary Co., Ltd. Address: No.1 Jiuxianqiao East Rd., Chaoyang District, Beijing, China P.O.BOX 3#741, Beijing, China Post code: 100015 Tel:...
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