The manually actuated EVN 116 Dosing valve is used Intended Use for both, gas dosing and shutting off a defined gas flow without changing the gas flow setting. The EVN 116 must not be used in connection with liquid gases. Functional Principle Dosing knob...
7 Maintenance 8 Repair 9 Accessories Storage Returning the Product Disposal For cross-references within this document, the symbol (→ XY) is used, for cross-references to other docu- ments, the symbol (→ [Z]). BP 5005 BEN (1111) EVN 116.oi...
Skilled personnel All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the product. BP 5005 BEN (2011-11) EVN 116.oi...
Communicate the safety instructions to all other users. Pfeiffer Vacuum assumes no liability and the warranty 1.4 Liability and becomes null and void if the end-user or third parties Warranty •...
Dimensions ø42 DN 16 ISO-KF Inlet filter (standard) Preferred flow direction Valve seat DN 16 ISO-KF Gas flow with standard filter 1250 mbar l/s Gas flow without standard filter 3100 mbar l/s BP 5005 BEN (2011-11) EVN 116.oi...
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Accessories Filter Inlet filter (standard) Filter vacuum side Accessories → 19 Gas flow 700 mbar l/s Filter Inlet filter (standard) Filter vacuum side Accessories → 19 ø10 Gas flow 1000 mbar l/s BP 5005 BEN (1111) EVN 116.oi...
Caution Caution: vacuum component Dirt and damages impair the function of the vacuum component. When handling vacuum components, take appropriate measures to ensure cleanliness and prevent damages. Keep the protective lids. BP 5005 BEN (2011-11) EVN 116.oi...
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Flow direction Preferred flow direction Vacuum connection Remove the protective lids and connect the valve to the vacuum system using the small flange connections. Clamp Seal with centering ring DN 16 ISO-KF Protective lid BP 5005 BEN (1111) EVN 116.oi...
The product is ready for operation as soon as it has been installed. DANGER DANGER: hot surface °C Touching the hot surface (>55 °C) can cause burns. Wear protective gloves. ≤80 °C °C 55 °C ≤80 °C BP 5005 BEN (2011-11) EVN 116.oi...
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During the compensation phase, one could come to the false conclusion that the valve is not tight. Leak flow rate for pressure compensation = mbar l/s × pressure difference BP 5005 BEN (1111) EVN 116.oi...
Gas flow for air at a pressure difference of 1 bar 5.2 Conversion Table Gas flow mbar l/s Torr l/s sccm atm cm³ /s 0.75 59.2 0.987 mbar l/s 1.33 78.9 1.32 Torr l/s 1.69×10 1.27×10 1.67×10 sccm 1.01 0.76 59.8 atm cm³ /s BP 5005 BEN (2011-11) EVN 116.oi...
Touching the product or parts thereof with bare hands increases the desorption rate. Always wear clean, lint-free gloves and use clean tools when working in this area. Vent the vacuum system and let it cool down to <55 °C. BP 5005 BEN (1111) EVN 116.oi...
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Remove the small flange fittings and put the pro- tective lids in place. Clamp Seal with centering ring DN 16 ISO-KF Protective lid BP 5005 BEN (2011-11) EVN 116.oi...
(e.g. seals, filter), are not covered by the warranty. Cleaning the filter(s) Remove the valve from the vacuum system according to section "Deinstallation". Remove the protective lids. Protective lid Protective lid BP 5005 BEN (1111) EVN 116.oi...
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Cleaning agents can be detrimental to health and environment. Adhere to the relevant regulations and take the necessary precautions when handling cleaning agents and disposing of them. Consider possible reactions with the product materials (→ 6). BP 5005 BEN (2011-11) EVN 116.oi...
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The compressed air must meet the following specifications: • free of oil • dry • free of particles >25 µm Reinstall the filter and connect the Dosing valve to the vacuum system according to section "Installation". BP 5005 BEN (1111) EVN 116.oi...
8 Repair We recommend returning the product to your local Pfeiffer Vacuum service center for repair. Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if any repair work is carried out by the end-user or third parties.
Filter vacuum side (gas flows 700 mbar l/s) Ordering number PT 420 462-T Filter vacuum side (gas flow 1000 mbar l/s) Ordering number PT 420 463-T Inlet side BP 5005 BEN (1111) EVN 116.oi...
Contaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental to health and environment. Products returned to Pfeiffer Vacuum should preferably be free of harmful substances. Ad- here to the forwarding regulations of all in- volved countries and forwarding companies...
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