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Brooks Instrument SLA6900 Series Installation And Operation Manual

Uhp and metal seal mass flow controllers and meters
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Brooks Instrument SLA6900 Series Installation And Operation Manual

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  • Page 1 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...
  • Page 2 Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 ® Brooks Delta Class SLA6900 Series UHP and SLA6800 Series Metal Seal Mass Flow Controllers and Meters Model SLA6950A Analog I/O Mass Flow Controller Model SLA6950D...
  • Page 3 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
  • Page 4 We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of flow measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
  • Page 5 Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG August, 2009 Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 6: Table Of Contents

    Contents Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Paragraph Page Number Number Section 1 Introduction Scope ............................... 1-1 Purpose ............................1-1 Description ............................1-1 Specifications ........................... 1-2 Section 2 Installation General ............................
  • Page 7 Contents Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Figures Figure Page Number Number Model SLA6950/SLA6850 Series MFC Dimensions ................ 1-5 Model SLA6960/SLA6860 Series MFM Dimensions ................ 1-6 Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC's ............

  • Page 8: Section 1 Introduction

    These instruments feature ultra-polished internal surfaces (SLA6900 Series) and all metal inboard and outboard seals (SLA6900 & SLA6800 Series). Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 9: Specifications

    Section 1 Introduction Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 1-4 Specifications WARNING Do not operate this instrument in excess of the specifications listed below. Failure to heed this warning can result in serious personal injury and/or damage to the equipment.
  • Page 10 Non-Operating: -25°C to 100°C (-13°F to 212°F) Maximum Fluid Operating Temperature 0°C to 65°C (32°F to 149°F) PHYSICAL: Materials of Construction (SLA6900 Series) 316L Vacuum Arc Remelt (VAR), 316L, and high-alloy ferritic stainless steel. External/internal seals: Nickel Valve seat: 316L stainless steel - standard...
  • Page 11 Section 1 Introduction Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Power Requirements Watts, typ. Watts, max. Analog I/O option, no valve: 1.80 Analog I/O option, with valve: 2.60 4.00 DeviceNet I/O option, no valve:...
  • Page 12 Section 1 Introduction Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Anaolg I/O D Connector 1/4" VCR Connections Analog I/O D-Connector Downport Connections Figure 1-1 SLA6950/SLA6850 Series Analog I/O MFC Dimensions. Artisan Technology Group - Quality Instrumentation ...
  • Page 13 Section 1 Introduction Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Digital I/O DeviceNet 1/4" VCR Connections Digital I/O DeviceNet Downport Connections Figure 1-2 SLA6960/SLA6860 Series Digital I/O DeviceNet MFM Dimensions. Artisan Technology Group - Quality Instrumentation ...

  • Page 14: Model Sla6950/Sla6850 Series Digital I/O Devicenet Mfc's

    Section 1 Introduction Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Digital I/O, DeviceNet 1/4" VCR Connections Digital I/O DeviceNet Downport Connections Figure 1-3 Model SLA6950/SLA6850 Series Digital I/O DeviceNet MFC Dimensions Artisan Technology Group - Quality Instrumentation ...
  • Page 15 Section 1 Introduction Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 16: Section 2 Installation

    A report should be submitted to the Product Service Department, Brooks Instrument, 407 West Vine Street, Hatfield, Pennsylvania 19440. Remove the envelope containing the packing list. Outside of your clean area, carefully remove the equipment from the packing case.

  • Page 17: Recommended Storage Practice

    2-3 Recommended Storage Practice If intermediate or long-term storage is required for equipment, as supplied by Brooks Instrument, it is recommended that said equipment be stored in accordance with the following: a. In the original vacuum bag and shipping container.

  • Page 18: Gas Connections

    Section 2 Installation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 2-6 Gas Connections Standard inlet and outlet connections supplied on the SLA6900/SLA6800 Series are 1/4"(M) VCR. Prior to installation ensure all piping is clean and free from obstructions.

  • Page 19: In-Line Filter

    Section 2 Installation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM' August, 2009 2-8 In-Line Filter It is recommended that an in-line filter be installed upstream from the mass flow controller or meter to prevent the possibility of any foreign material entering the flow sensor or control valve (MFC).

  • Page 20: Operation Check Procedure

    Section 2 Installation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 NOTICE The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).

  • Page 21: D-Connector Shielded Cable Hookup Diagram - Voltage I/O Versions

    Section 2 Installation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM' August, 2009 Analog I/O Pin Connections: Signal: 15-pin D-conn 9-pin D-conn Setpoint/Command Common Flow/Signal Out +15v -15v (unused) Setpoint/Command In Power Supply Common SIgnal Common, Output Return +5v reference...

  • Page 22: Section 3 Operation

    Section 3 Operation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 3-1 Overview This section contains the following information: • Theory of Operation • Features 3-2 Theory of Operation for Flow Measurement The thermal mass flow measurement system consists of two components: the restrictor and the flow sensor.

  • Page 23: Features

    Section 3 Operation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 3-3 Features Note: All SLA6950/SLA6850 Series mass flow controllers and SLA6960/ SLA6860 Series mass flow meters are configured at the factory according to customer order and do not require adjustment.

  • Page 24: Externally Accessible Adjustment

    Section 3 Operation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 ZERO BUTTON Figure 3-2 Externally Accessible Adjustment. customer order Model SLA6900/SLA6800's containing a single calibration will have that calibration stored in calibration #1. Artisan Technology Group - Quality Instrumentation ...

  • Page 25: Adaptive Valve Control

    Section 3 Operation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 3-4 Adaptive Valve Control (MFC only) The SLA6950/SLA6850 Series offers a feature, called adaptive valve control, which allows the instrument to learn about the process gas and operating conditions.
  • Page 26 Section 3 Operation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 E. Calibration Select Pin Connector pin 13 on the 15 pin 'D' connector, allows selection of one of ten calibrations stored in the device.

  • Page 27: Flow Control System Block Diagram (Mfc Only)

    Section 3 Operation Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Figure 3-3 Flow Control System Block Diagram. (MFC only) Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 28: Section 4 Maintenance & Troubleshooting

    Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 4-1 Overview No routine maintenance is required on the SLA6900/SLA6800 Series. If an in- line filter is used, the filtering elements should be periodically replaced. This section provides the following information: •...
  • Page 29 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 4-2 Troubleshooting This section contains suggestions to help diagnose MFC/MFM related problems in the gas distribution system and answers commonly asked questions.
  • Page 30 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 3. Clogged sensor tube. If the MFC sensor tube is clogged, the flow signal will be very low or zero while the actual flow will be at the valve’s maximum rate.

  • Page 31: Bench Troubleshooting Circuit

    Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-1 Bench Troubleshooting for MFC/MFM. Trouble Possible Cause Check/Corrective Action Output stays at zero level regardless Closed or clogged flow path up- or downstream or Open valve(s).
  • Page 32 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-2. Sensor Troubleshooting. SENSOR SCHEMATIC FUNCTION Heater Upstream Temperature Sensor (Su) Downstream Temperature Sensor (Sd) Sensor Common Heater Common Remove the sensor connector from the PC Board for this procedure.
  • Page 33 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-3 Orifice Capacities. Orifice Size (inches) Minimum Flow Rate (sccm) 0°C (21.1°C) 0.0013 (5.7) 0.002 12.5 (13.5)

  • Page 34: Orifice Sizing

    Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 = percentage (%) of gas n (by volume) Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl ) by volume.
  • Page 35 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Where: Nitrogen equivalent flow rate (sccm) NITROGEN Desired flow rate of the gas (sccm) ρ ρ ρ ρ ρ Density of Nitrogen at 70°F NITROGEN ρ...
  • Page 36 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Example: Find the Nitrogen equivalent for 20 slpm of a 20% Helium and 80% Chlorine gas mixture. (orifice conversion factor) Nitrogen 20 x 1.439...

  • Page 37: Restrictor Sizing

    Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 9. This point on the line is the minimum orifice size for the given conditions. If this point is between two orifice sizes, select the next largest size orifice to ensure adequate flow.
  • Page 38 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-4 Conversion Factors (Nitrogen Base). GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Acetylene 0.615...
  • Page 39 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-4 Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Ethylene...
  • Page 40 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-4 Conversion Factors (Nitrogen Base) Continued. GAS NAME FORMULA SENSOR ORIFICE DENSITY (KG/m FACTOR FACTOR @0°C, 1 atm Perfluoropropane...
  • Page 41 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Figure 4-2 Model SLA6950 Series Orifice Sizing Nomograph. 4-14 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...

  • Page 42: Example Nomograph

    Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Figure 4-3 Example Nomograph. 4-15 Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 43 Section 4 Maintenance Installation and Operation Manual X-TMF-SLA6900-SLA6800-TMF-eng & Troubleshooting Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Table 4-5 Model SLA6900/SLA6800 Series Standard Restrictors. Range SCCM Nitrogen Equivalent Flow* Part Number Size High ACLFE Wire Mesh...

  • Page 44: Section A Ce Certification

    CE mærkning af Masse Flow udstyr Dato Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC). Der skal dog gøres opmærksom på benyttelsen af signalkabler i forbindelse med CE mærkede udstyr.
  • Page 45 CE Certification of Mass Flow Equipment Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject Addendum to the Instruction Manual. Reference...
  • Page 46 CE Certificationof Mass Flow Equipment Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet Annexe au Manuel d’Instructions. Référence Certification CE des Débitmètres Massiques à...
  • Page 47 : Januari 1996 Dames en heren, Alle CE gemarkeerde elektrische en elektronische produkten van Brooks Instrument zijn met succes getest en voldoen aan de wetgeving voor Electro Magnetische Compatibiliteit (EMC wetgeving volgens 89/336/EEC). Speciale aandacht is echter vereist wanneer de signaalkabel gekozen wordt voor gebruik met CE gemarkeerde produkten.
  • Page 48 Januar 1996 Til den det angår Brooks Instrument elektrisk og elektronisk utstyr påført CE-merket har gjennomgått og bestått prøver som beskrevet i EMC forskrift om elektromagnetisk immunitet, direktiv 89/336/EEC. For å opprettholde denne klassifisering er det av stor viktighet at riktig kabel velges for tilkobling av det måletekniske utstyret.
  • Page 49 CE Certification of Mass Flow Equipment Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi...
  • Page 50 Installation and Operation Manual X-TMF-SLA6900-SLA6800-MFC-eng Part Number: 541B100AAG Delta Class SLA6900 UHP & SLA6800 Series Metal Sealed MFC's/MFM's August, 2009 THIS PAGE WAS INTENTIONALLY LEFT BLANK Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com...
  • Page 51 Europe +31 (0) 318 549 290 Asia +81 (0) 3 5633 7100 Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks ............Brooks Instrument, LLC TruCal ............Brooks Instrument, LLC VCO .................
  • Page 52 Artisan Technology Group is your source for quality new and certified-used/pre-owned equipment SERVICE CENTER REPAIRS WE BUY USED EQUIPMENT • FAST SHIPPING AND DELIVERY Experienced engineers and technicians on staff Sell your excess, underutilized, and idle used equipment at our full-service, in-house repair center We also offer credit for buy-backs and trade-ins •...

This manual is also suitable for:

Sla6800 seriesSla6950Sla6960Sla6850Sla6860

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