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Brooks Instrument GP200 Series Supplemental Manual

Ethercat mass flow controllers
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EtherCat
Supplemental Manual
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GP200 Series
Mass Flow Controllers
Beyond Measure

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Summary of Contents for Brooks Instrument GP200 Series

  • Page 1 EtherCat Supplemental Manual ® GP200 Series Mass Flow Controllers Beyond Measure...
  • Page 2 Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.

  • Page 3: Table Of Contents

    Contents Brooks Instrument Section 1 General Information Introduction ............................6 Definition of Terms .......................... 7 Numbers ............................7 Section 2 Quick Start Quck Start ............................8 Master Hardware ..........................8 Physical Interfaces .......................... 9 Power Supply ..........................9 LEDs ..............................10 Exceptions Display Codes and Reporting ..................
  • Page 4 Contents Brooks Instrument Section 4 Exceptions Implementation Exceptions Implementation ......................36 Error and Warning Condition Descriptions ..................40 Non-Volatile Mempry Failures (Display Codes 1, 2, 103, 105) ............40 Network Interface Failure (Display Code 4) ................... 40 Selected Calibration Invalid (Display Code 5) ................40 Identity Information Mismatch (Display Code 6) ................
  • Page 5 Contents Brooks Instrument Tables Table 1-1 – Definition of Terms ....................... 7 Table 2-1 – RUN Indicator States ....................10 Table 2-2 – ERROR Indicator States .................... 11 Table 2-3 – Display Code Summary ....................12 Table 3-1 – Object Dictionary Structure ..................14 Table 3-2 –...

  • Page 6: Introduction

    GP200 Series platform. ® This manual is a supplement to the Brooks GP200 Series Installation and Operation Manual. It is assumed that the owner of this EtherCAT mass flow controller is thoroughly familiar with the theory and operation of this device. If not, it is recommended that the owner read the installation and operation manual first before continuing with this supplement.

  • Page 7: Definition Of Terms

    Section 1 General Information Brooks Instrument Definition of Terms Table 1-1 – Definition of Terms Abbreviation Description Common Device Profile CAN Application Protocol over EtherCAT EtherCAT Slave Controller EtherCAT Slave Information (EtherCAT Device Description) EtherCAT Technology Group MFC/MFM Mass Flow Controller/Mass Flow Meter...

  • Page 8: Section 2 Quick Start

    Part 2xxx: Specific Device Profiles The Specific Device Profile (SDP) is based on Part 1 (CDP) and defines the data structure of the specific devices. The Brooks GP200 Series implementation of the Semi EtherCAT SDP conforms to ETG.5003.202x. For a complete specification of a device used in the semiconductor manufacturing industry a SDP shall be read complementary with the CDP.

  • Page 9: Physical Interfaces

    Section 2 Quick Start Brooks Instrument Physical Interfaces The available physical interfaces on the EtherCAT device are listed below. Refer to the GP200 Series Installation and Operation Manual for more details. • Integrated LCD display • Display push button - cycle through information and rotate display •...

  • Page 10: Leds

    Section 2 Quick Start Brooks Instrument Figure 2-3 – M8 Power Connector Drawing Pin 1: +24V Pin 3: Power Common LEDs The POWER LED indicates that the device is supplied sufficiently with power. The IN and OUT port LEDs indicate whether the respective removable port is connected.

  • Page 11: Table 2-2 - Error Indicator States

    Section 2 Quick Start Brooks Instrument The ERROR indicator shows errors such as watchdog timeouts and unsolicited state changes due to local errors (ex. input error). If, at a given time several errors are present, the error that occurred first shall be indicated. Refer to Table 2-2 below for error states and descriptions.

  • Page 12: Exceptions Display Codes And Reporting

    Section 2 Quick Start Brooks Instrument Exceptions Display Codes and Reporting Whenever there is an active Error or Warning reported via the EtherCAT interface, that condition is also indicated on the display with the severity and the Display Code as defined in Table 2-3.
  • Page 13 Section 2 Quick Start Brooks Instrument Process Pressure Out of 0x00000008 Error Device Error Range Low Temperature Out of Range 0x00000001 Error Device Error High Temperature Out of Range 0x00000002 Error Device Error PM Zero Process Error 0x00100000 Error Manufacturer Error...

  • Page 14: Section 3 Slave Configuration

    XML format) and/or the EEPROM, master applications are able to configure the EtherCAT network. For the EtherCAT network configuration of the GP200 Series devices, ESI files are provided on the Brooks website or contact Brooks Technical Support for more info.

  • Page 15: Process Data Object (Pdo) Mapping

    0x01 Ramp Time Note: The Actuator Position SP functionality is not supported in GP200 Series devices. However, the space must be included in this RxPDO to maintain compatibility with the ETG.5003.202x profile definition. Any value placed in this position is ignored. If the user wishes to eliminate this space, the Flexible RxPDO can be used.

  • Page 16: Txpdo Mapping

    Position Set point [REAL] Note: Position Read back [REAL] functionality is not supported in GP200 Series devices. However, the space must be included in this TxPDO to maintain compatibility with the ETG.5003.202x profile definition. The value of this object is always returns as 0.0. If the user wishes to eliminate this space, the Flexible TxPDO can be used.

  • Page 17: Communication Specific Data

    Section 3 Slave Configuration Brooks Instrument Communication Specific Data Table 3-4 – Communication Specific Data Index Data Type Access Name Description Index 0x1000 UDINT Device Type 5003. Sub-profile number is defined in 0xF010 0x1001 USINT Error Register Bit 0: generic error...
  • Page 18 Section 3 Slave Configuration Brooks Instrument 0x10F8 ULINT Timestamp Object Local Timestamp of the device in ns. See ETG.1020 0x1600 Default RxPDO Map See Section 3.2 0x1601 Flexible RxPDO See Section 3.2 0x1A00 Default TxPDO Map See Section 3.2 0x1A01 Flexible TxPDO Map See Section 3.2...

  • Page 19: Manufacturer Specific Data

    Section 3 Slave Configuration Brooks Instrument Manufacturer Specific Data Manufacturer Specific Inputs Table 3-5 – Manufacturer Specific Inputs Index Data Type Access Name Description Index 0x2000 USINT Sensor: Flow Totalizer 0x01 ULINT Flow Total TxPDO Manufacturer Specific Configuration Data Table 3-6 – Manufacturer Specific Configuration Data...
  • Page 20 Brooks Instrument 0x05 Real Warning Threshold 0x06 Real Warning Settling Time 0x4002 Sensor: Temperature Alarm 0x01 Real Alarm Threshold High 0x02 Real Alarm Threshold 0x03 Real Alarm Settling Time 0x04 Real Warning Threshold High 0x05 Real Warning Threshold 0x06 Real...

  • Page 21: Customer Requested Information Data

    Section 3 Slave Configuration Brooks Instrument Customer Requested Information Data Table 3-7 Customer Requested Information Data Index Data Type Access Name Description Index 0x500A Extended Gas Parameter Instance 0x01 Nominal Inlet Pressure 0x02 Nominal Outlet Pressure 0x500B Extended Gas Parameter Instance...

  • Page 22: Sdp Device Type Specific Data

    Section 3 Slave Configuration Brooks Instrument SDP Device Type Specific Data Input Data Table 3-8 – Input Data Index Data Access Name Description Index Type 0x6000 Sensor: Flow (floating) 0x01 REAL Flow Reading Current Flow Reading TxPDO Units: Per Flow Data Unit...

  • Page 23: Output Data

    Section 3 Slave Configuration Brooks Instrument 0x02 BOOL Invalid Data True if invalid input in RxPDO TxPDO Input 0x03 BOOL Ramp Active True if ramp has started and currently active TxPDO 0x04 BOOL Valve Control True if device mode is set to fully-open...

  • Page 24: Configuration Data

    Section 3 Slave Configuration Brooks Instrument Configuration Data Table 3-10 – Configuration Data Index Data Access Name Description Index Type 0x8000 Sensor: Flow (floating) 0x01 UDINT Flow Data Unit Data Unit for Flow Reading (Ref. ETG.1004) SCCM= 0x00A00000 SLM= 0x03A00000...

  • Page 25: Information Data

    Section 3 Slave Configuration Brooks Instrument Information Data Table 3-11 – Information Data Index Data Access Name Description Type 0x9000 Sensor: Flow (floating) 0x01 REAL Flow Reading Zero Stores Result of last Zero Offset service com- Offset mand executed. Units %FS...

  • Page 26: Semi Device Profile Area

    Section 3 Slave Configuration Brooks Instrument 0x02 UINT Gas Number SEMI Number 0x03 STRING Gas Symbol Text Symbol (128) 0x04 STRING Gas Name Gas Name Text (128) 0x05 REAL Minimum Full Scale Minimum nominal value for this BIN and gas...

  • Page 27: Value Range Setting

    Section 3 Slave Configuration Brooks Instrument Value Range Setting Exception Handling Data See Section 4 for more information on Exceptions Implementation. Table 3-13 – Value Range Setting Index Data Access Name Description Index Type 0xF380 USINT Active A condensed summary byte describing the collection...
  • Page 28 Section 3 Slave Configuration Brooks Instrument 0xF390 USINT Latched A condensed summary byte describing the collection of TxPDO Exception device exceptions after corresponding masks Status (0xF3Ax) were applied. Bit 0: Device Warning Bit 1: Manufacturer Warning Bit 2: Device Error Bit 3: Manufacturer Error Bit 4...7: Reserved...

  • Page 29: Manufacturer Specific Device Data

    Section 3 Slave Configuration Brooks Instrument Manufacturer Specific Device Data Table 3-14 – Manufacturer Specific Device Data Index Data Type Access Name Description Index 0xF500 STRING(n) RO Manufacturer Model Number 0xF501 STRING(n) RO Product Device Configuration 0xF514 Create Extended Gas Page Service...

  • Page 30: Sdp And Cdp Device Specific Information Data

    Section 3 Slave Configuration Brooks Instrument SDP and CDP Device Specific Information Data Table 3-16 – SDP and CDP Device Specific Information Data Index Data Type Access Name Description Index 0xF9F0 STRING(n) RO Manufacturer A string representing the manufacturer’s serial Serial Number number for the device.

  • Page 31: Sdp And Cdp Command Objects

    Section 3 Slave Configuration Brooks Instrument SDP and CDP Command Objects Table 3-17 – SDP and CDP Command Objects Index Data Access Name Description Index Type 0xFB10 Zero Adjust for Service causes the device to modify flow read- Flow Sensor ing offset [0x9nn0.01] such that flow reading...
  • Page 32 Section 3 Slave Configuration Brooks Instrument Index Data Access Name Description Index Type 0x03 ARRAY Response Byte 0: see Sub Index 2 [0..1] OF Byte 1: unused (shall be 0) BYTE 0xFB12 COMMA Service causes the device to modify temperature...
  • Page 33 Section 3 Slave Configuration Brooks Instrument Index Data Access Name Description Index Type 0x01 STRING Command A device reset is initiated when the following byte sequence is sent. Byte 0: 0x74 Byte 1: 0x65 Byte 2: 0x73 Byte 3: 0x65...
  • Page 34 Section 3 Slave Configuration Brooks Instrument Index Data Access Name Description Index Type 0xFBF2 COMMA Store Execution of this command will store all parameters ND_PAR Parameters to non-volatile memory. If a device automatically Command saves all non-volatile parameters at the time they are written, this command will not take any action.
  • Page 35 Section 3 Slave Configuration Brooks Instrument Index Data Access Name Description Index Type 0x03 ARRAY Response Byte 0: See sub index 2 Byte 1: Shall be zero [0..n] OF BYTE Byte 2-n: Checksum return value. Max length is 64 bytes...

  • Page 36: Exceptions Implementation

    Section 4 Exceptions Implementation Brooks Instrument Exceptions Implementation The GP200 EtherCAT MFC detects exception conditions and reports these exceptions via EtherCAT objects and on the display. Each exception is assigned to a category for EtherCAT reporting. Each exception is also assigned a severity classification. The severity classification defines how the exception is displayed and the action the device may take when the exception occurs.

  • Page 37: Table 4-1 - Objects For Reporting And Controlling Exceptions

    Section 4 Exceptions Implementation Brooks Instrument Table 4-1 – Objects for reporting and controlling exceptions Data Index Access Name Description Index Type 0xF380 USINT Active Exception A condensed summary byte summarizing all ac- Status tive device and manufacturer defined exceptions:...

  • Page 38: Table 4-2: Device Errors

    Section 4 Exceptions Implementation Brooks Instrument Data Index Access Name Description Index Type 0xF3A2 0x01 UDINT Manufacturer A Bitmask to Enable/Disable the reporting of Warning Mask Manufacturer Warnings per Table 4-4. A bit defined as a 1 enables the corresponding excep- tion.

  • Page 39: Table 4-3: Manufacturer Errors

    Section 4 Exceptions Implementation Brooks Instrument Table 4-3: Manufacturer Errors Display Condition Detected Reported As Severity Exception Type Code Non-Volatile Memory Failure 0x00000001 Failure Manufacturer Error Non-Volatile Corrupt 0x00000002 Failure Manufacturer Error Network Interface Failure 0x00000004 Failure Manufacturer Error Selected Calibration Invalid...

  • Page 40: Error And Warning Condition Descriptions

    Section 4 Exceptions Implementation Brooks Instrument Error and Warning Condition Descriptions Non-Volatile Memory Failures (Display Codes 1, 2, 103, 105) This condition is reported when a non-volatile memory failure is detected. If any non-volatile memory failure occurs, the device must be serviced to guarantee that is performing properly.

  • Page 41: Process Pressure Out Of Range (Display Codes 125, 126, 225, 226)

    Section 4 Exceptions Implementation Brooks Instrument Table 4-5 – User Specified Flow Limits Index Data Access Name Description Default Value Index Type 0x4000 Sensor Flow 0x01 Real Alarm Threshold Specified in Flow Units 110% FS High (0x8000:01) 0x02 Real Alarm Threshold Low...

  • Page 42: Temperature Out Of Range (Display Codes 135, 136, 235, 236)

    Section 4 Exceptions Implementation Brooks Instrument Temperature Out of Range (Display Codes 135, 136, 235, 236) This condition is reported when the measured temperature (0x6002:01) is out of the device allowable limits. The device allowable limits are defined by the manufacturer and cannot be adjusted (5°C to 70°C).

  • Page 43: Voltage Input Out Of Limits (Display Code 260)

    Section 4 Exceptions Implementation Brooks Instrument Voltage Input Out of Limits (Display Code 260) This condition is reported when the voltage on the device power input is outside of the following limits: • ± 25% of the nominal 24 Volts for 0.2 seconds •...

  • Page 44: Ramping Feature

    Appendix Brooks Instrument Ramping Feature Setting the Ramp Time (0x7008) to a valid non-zero value activates the Ramping Feature. A valid Ramp Time is a time that is within the limits specified by 0x9008:01, Min Ramp Time and 0x8008:01, Max Ramp Time.
  • Page 45 Appendix Brooks Instrument If the Ramp Time is changed to a valid non-zero value while a ramp is in progress, the change does not affect the current ramp. A setpoint change is required for the new Ramp Time to take effect.
  • Page 46 Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. Due to Brooks Instrument's commitment to continuous improvement of our products, all specifications are subject to change without notice. TRADEMARKS Brooks is a trademark of Brooks Instrument, LLC All other trademarks are the property of their respective owners.

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