Table 1-4: Ant95L Series Specifications (-075 And -100) - Aerotech ANT95L Series Hardware Manual

Overview
Table 1-4: ANT95L Series Specifications (-075 and -100)
Travel
(1)
Accuracy Base (-PL1)
PLUS
(-PL2)
Resolution (Minimum Incremental
Motion)
Bidirectional Base (-PL1)
(1)
Repeatability
PLUS
(-PL2)
Unidirectional Repeatability
(1)
Straightness
(1)
Flatness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration (No Load)
(2)
In-Position Stability
Maximum Force (continuous)
Load Horizontal
(3, 4)
Capacity
Side
Moving Mass
Stage Mass
Material
Mean Time Between Failure
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed (refer to
4. Requires the use of an Aerotech controller.
Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and
workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
12
75 mm
±4.0 µm (±160 µin)
(4)
±275 nm (±11 µin)
1 nm (±0.04 µin)
±100 nm (±4 µin)
(4)
±75 nm (±3 µin)
±25 nm (±1 µin)
±2.0 µm (±80 µin)
±2.0 µm (±80 µin)
10 arc sec
10 arc sec
5 arc sec
500 mm/s (20 in/s)
3 g - 30 m/s
<1 nm (<0.04 µin)
9.5 N
7.0 kg (15.4 lb)
5.0 kg (11 lb)
0.72 kg (1.6 lb)
1.64 kg (3.6 lb)
Section 2.4.
Chapter 1
ANT95L Hardware Manual
-075
2
Aluminum Body/Black Hardcoat Finish
30,000 Hours
for offset loading behavior).
-100
100 mm
±5.0 µm (±200 µin)
±275 nm (±11 µin)
1 nm (±0.04 µin)
±100 nm (±4 µin)
±75 nm (±3 µin)
±25 nm (±1 µin)
±2.5 µm (±100 µin)
±2.5 µm (±100 µin)
10 arc sec
10 arc sec
5 arc sec
500 mm/s (20 in/s)
2
3 g - 30 m/s
<1 nm (<0.04 µin)
12.9 N
7.0 kg (15.4 lb)
5.0 kg (11 lb)
0.91 kg (2.0 lb)
2.1 kg (4.6 lb)
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