Basic Specifications; Table 1-3: Abl1000 Series Specifications - Aerotech ABL1000 Hardware Manual

ABL1000 Hardware Manual

1.3. Basic Specifications

Table 1-3: ABL1000 Series Specifications
Model
Travel
Drive System
-E1
Resolution
-E2
Maximum Travel Speed
Maximum Linear Acceleration
Maximum Horizontal Load
-E1
(1)
Accuracy
-E2
-E1
Repeatability
-E2
Straightness and Flatness
Pitch and Yaw
Nominal Stage Weight
Moving Mass
(5)
Operating Pressure
(6)(7)
Air Consumption
Construction
(1) Maximum speed based on stage capability; maximum application velocity may be limited by system data rate and system
resolution.
(2) Max load for XY configuration is 10.0 kg.
(3) Values with Aerotech controls and -PL2 metrology option.
(4) Dependent on flatness of stage mounting surface.
(5) To protect air bearing against under-pressure, an in-line pressure switch tied to the motion controller/amplifier E-Stop is
recommended.
(6) Air supply must be clean, dry to 0° F dew point and filtered to 0.25 μm or better. Recommend nitrogen at 99.9% purity.
(7) Maximum expected air consumption for single axis.
NOTE: Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload
and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications.
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ABL1000-025
25 mm
(1)
(2)
±0.3 µm
±2 µm
±0.2 µm
±1 µm
(3)
(4)
±0.25 µm
±0.25 arc sec
4.5 kg
Chapter 1
ABL1000-050
50 mm
Linear Brushless Servomotor
2.5 nm
0.5 nm
300 mm/s
2
1 g - 10m/s (no load)
15.0 kg
(3) (3)
±0.3 µm
±2 µm
(3) (3)
±0.2 µm
±1 µm
±50 nm
(1)
±50 nm ; ±100 nm
±0.25 µm
±0.50 arc sec
5.5 kg
1.9 kg
80 psi ±5 psi
17.5 SLPM
Aluminum Body/Hardcoat
Overview
ABL1000-100
100 mm
(3)
±0.3 µm
±5 µm
(3)
±0.2 µm
±2 µm
±0.4 µm
±1.0 arc sec
6.4 kg
13