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ANT95L Hardware Manual

Revision: 1.04.00

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Summary of Contents for Aerotech ANT95L Series

  • Page 1: Ant95L Hardware Manual

    ANT95L Hardware Manual Revision: 1.04.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
  • Page 3: Table Of Contents

    3.3. Motor and Feedback Specifications 3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Mounting Hole Pattern Figure 2-11: Load Orientations Figure 2-12: Cantilevered Load Capabilities Figure 3-1: Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) www.aerotech.com...
  • Page 5: List Of Tables

    List of Tables Table 1-1: ANT95L Model Numbering System Table 1-2: Environmental Specifications Table 1-3: ANT95L Series Specifications (-025 and -050) Table 1-4: ANT95L Series Specifications (-075 and -100) Table 2-1: Stage to Mounting Surface Hardware Table 3-1: Motor and Feedback Pinouts...
  • Page 6: Safety Procedures And Warnings

    Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to the statements given in this section and other handling, use, and operational information given throughout the manual to avoid injury to you and damage to the equipment.
  • Page 7: Eu Declaration Of Incorporation

    ANT95L Hardware Manual Table of Contents EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT95L Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 8 Table of Contents ANT95L Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 9: Chapter 1: Overview

    Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information.
  • Page 10: Environmental Specifications

    20°C (68°F). The accuracy specification of ANT95L series stages is measured 25 mm above the table with the stage in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2.3.
  • Page 11: Basic Specifications

    Overview 1.3. Basic Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information.
  • Page 12: Table 1-4: Ant95L Series Specifications (-075 And -100)

    4. Requires the use of an Aerotech controller. Specifications are for single-axis systems measured 25 mm above the tabletop; performance of multi-axis system is payload and workpoint dependent. Consult the Aerotech factory for multi-axis or non-standard applications. Chapter 1 www.aerotech.com...
  • Page 13: Chapter 2: Mechanical Specifications And Installation

    Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping.
  • Page 14: Dimensions

    Mechanical Specifications and Installation ANT95L Hardware Manual 2.2. Dimensions Figure 2-2: ANT95L-025 Dimensions Chapter 2 www.aerotech.com...
  • Page 15: Figure 2-3: Ant95L-050 Dimensions

    ANT95L Hardware Manual Mechanical Specifications and Installation Figure 2-3: ANT95L-050 Dimensions www.aerotech.com Chapter 2...
  • Page 16: Figure 2-4: Ant95L-075 Dimensions

    Mechanical Specifications and Installation ANT95L Hardware Manual Figure 2-4: ANT95L-075 Dimensions Chapter 2 www.aerotech.com...
  • Page 17: Figure 2-5: Ant95L-100 Dimensions

    ANT95L Hardware Manual Mechanical Specifications and Installation Figure 2-5: ANT95L-100 Dimensions www.aerotech.com Chapter 2...
  • Page 18: Figure 2-6: Ant95L-025 Mounting Plate (-Mp) Dimensions

    Mechanical Specifications and Installation ANT95L Hardware Manual Figure 2-6: ANT95L-025 Mounting Plate (-MP) Dimensions Figure 2-7: ANT95L-050 Mounting Plate (-MP) Dimensions Chapter 2 www.aerotech.com...
  • Page 19: Figure 2-8: Ant95L-075 Mounting Plate (-Mp) Dimensions

    ANT95L Hardware Manual Mechanical Specifications and Installation Figure 2-8: ANT95L-075 Mounting Plate (-MP) Dimensions Figure 2-9: ANT95L-100 Mounting Plate (-MP) Dimensions www.aerotech.com Chapter 2...
  • Page 20: Securing The Stage To The Mounting Surface

    Mounting an upper axis to a lower axis tabletop (a mounting plate is required if the upper axis is an ANT95L-050): 2.3 N·m M4 x 6 mm SHCS N O T E : The ANT95L 75 mm and 100 mm travel stages are only available for lower axis (X-axis) configurations. Chapter 2 www.aerotech.com...
  • Page 21: Figure 2-10: Mounting Hole Pattern

    ANT95L Hardware Manual Mechanical Specifications and Installation Figure 2-10: Mounting Hole Pattern www.aerotech.com Chapter 2...
  • Page 22: Attaching The Payload To The Stage

    N O T E : If your ANT95L was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the ANT95L is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur.
  • Page 23: Figure 2-11: Load Orientations

    If cantilevered loads are applied, refer to Figure 2-11 to find the loading condition. Refer to Figure 2-12 to find the maximum allowable load. Figure 2-11: Load Orientations www.aerotech.com Chapter 2...
  • Page 24: Figure 2-12: Cantilevered Load Capabilities

    Mechanical Specifications and Installation ANT95L Hardware Manual Figure 2-12: Cantilevered Load Capabilities Chapter 2 www.aerotech.com...
  • Page 25: Chapter 3: Electrical Specifications And Installation

    W A R N I N G : Electrical installation must be performed by properly qualified personnel. Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT95L is part of a complete Aerotech motion control system, setup usually involves connecting the ANT95L to the appropriate drive chassis with the cables provided.
  • Page 26: Motor And Feedback Connectors

    Stages equipped with standard motors and encoders come from the factory completely wired and assembled. N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration.
  • Page 27: Table 3-1: Motor And Feedback Pinouts

    Motor ØC Case Signal shield connection (to case) 1. Pins [5 and 6], [11 and 23], and [13 and 25] are not externally jumpered on the ANT95XY-025 and ANT95XY-050 Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2...
  • Page 28: Motor And Feedback Wiring

    All motor and controller manufacturers have their own designations for motor ØA/ØB/ØC and Hall signals A/B/C (refer to Section 3.5. for motor phasing). Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring Chapter 3 www.aerotech.com...
  • Page 29: Motor And Feedback Specifications

    Requires external pull-up to +5 V (10 kΩ recommended) Notes: If the ANT95L is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. www.aerotech.com Chapter 3...
  • Page 30: Table 3-3: Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 31: Limits, Marker, And Machine Direction

    Electrical Specifications and Installation 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5.
  • Page 32: Motor And Feedback Phasing

    Electrical Specifications and Installation ANT95L Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-3: Hall Phasing Chapter 3 www.aerotech.com...
  • Page 33: Figure 3-4: Analog Encoder Phasing Reference Diagram

    ANT95L Hardware Manual Electrical Specifications and Installation Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) www.aerotech.com Chapter 3...
  • Page 34 Electrical Specifications and Installation ANT95L Hardware Manual This page intentionally left blank. Chapter 3 www.aerotech.com...
  • Page 35: Chapter 4: Maintenance

    Re-tighten loose connectors. Replace or repair damaged cables. Clean the ANT95L and any components and cables as needed. Repair any damage before operating the ANT95L. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com Chapter 4...
  • Page 36: Cleaning And Lubrication

    W A R N I N G : Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory. In addition, a laser interferometer is required for post assembly verification to maintain warranties. Contact Aerotech for more information.
  • Page 37: Troubleshooting

    Encoder (sine and cosine) signal connections (refer to Chapter 3 uncontrollably Controller documentation). Motor Connections (refer to Chapter 3 and Controller documentation). Stage oscillates or Gains misadjusted (refer to the controller documentation). squeals Encoder signals (refer to the controller documentation). www.aerotech.com Chapter 4...
  • Page 38 Maintenance ANT95L Hardware Manual This page intentionally left blank. Chapter 4 www.aerotech.com...
  • Page 39: Appendix A: Warranty And Field Service

    Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s...
  • Page 40 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
  • Page 41: Appendix B: Revision History

    Added Environmental Specifications section Added safety information and warnings Added note about current requirements of motor and ground wires 1.02.00 ANT95L-050 mounting plate modified for compatibility with ANT95V-3 1.01.00 Added stage limit travel dimension 1.00.00 New manual www.aerotech.com Appendix B...
  • Page 42 Revision History ANT95L Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
  • Page 43: Index

    Global Technical Support grease Repeatability 11-12 Resolution 11-12 Hall-Effect Sensors Specifications Roll 11-12 Humidity serial number In-Position Stability 11-12 service schedule inspect Shimming inspection schedule Shipping Clamps isopropyl alcohol solvents Speed 11-12 Kluberplex BEM 34-132 stabilize www.aerotech.com Index...
  • Page 44 Index ANT95L Hardware Manual stage distortion Stage Mass 11-12 Straightness 11-12 Support Technical Support Travel 11-12 Vibration Warranty and Field Service 11-12 Index www.aerotech.com...

This manual is also suitable for:

Ant95l-025Ant95l-050Ant95l-075Ant95l-100

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