Aerotech ANT95V-3 series Hardware Manual

Revision: 1.02.00
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ANT95V-3 Hardware Manual

Revision: 1.02.00

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Summary of Contents for Aerotech ANT95V-3 series

  • Page 1: Ant95V-3 Hardware Manual

    ANT95V-3 Hardware Manual Revision: 1.02.00...
  • Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
  • Page 3: Table Of Contents

    3.3. Motor and Feedback Specifications 3.4. Limits, Marker, and Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com...
  • Page 4: List Of Figures

    Figure 2-3: ANT95V-3 Mounting Plate (-MP) Dimensions Figure 2-4: Mounting Hole Pattern Figure 3-1: Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) www.aerotech.com...
  • Page 5: List Of Tables

    Table of Contents List of Tables Table 1-1: ANT95V-3 Model Numbering System Table 1-2: Environmental Specifications Table 1-3: ANT95V-3 Series Specifications Table 2-1: Stage to Mounting Surface Hardware Table 3-1: Motor and Feedback Pinouts Table 3-2: Feedback Specifications Table 3-3:...
  • Page 6: Safety Procedures And Warnings

    Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to the statements given in this section and other handling, use, and operational information given throughout the manual to avoid injury to you and damage to the equipment.
  • Page 7: Eu Declaration Of Incorporation

    ANT95V-3 Hardware Manual Table of Contents EU Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT95V-3 Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
  • Page 8 Table of Contents ANT95V-3 Hardware Manual This page intentionally left blank. www.aerotech.com...
  • Page 9: Chapter 1: Overview

    Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information.
  • Page 10: Environmental Specifications

    Contact Aerotech for more details. The accuracy specification of ANT95V-3 series stages is measured 25 mm above the table with the stage in an unloaded condition. The stage is assumed to be fully supported by a mounting surface meeting or exceeding the specification in Section 2.4.
  • Page 11: Basic Specifications

    Overview 1.3. Basic Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information.
  • Page 12: Vacuum Operation

    Overview ANT95V-3 Hardware Manual 1.4. Vacuum Operation Aerotech can specially prepare the ANT95V-3 for operation in vacuum environments. Aerotech offers two vacuum preparation options; one for low vacuum (for use in atmospheric pressures to 10 torr) and one for high vacuum (preparation for environments from 10 to 10 torr).
  • Page 13: Chapter 2: Mechanical Specifications And Installation

    Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping.
  • Page 14: Flexure Handling

    When the cover is off, take care not to bend, nick, ding, or mar the flexures in any way. Never handle the stage by the flexures or flexure mounting supports. If a flexure appears damaged, contact Aerotech support. Chapter 2...
  • Page 15: Dimensions

    ANT95V-3 Hardware Manual Mechanical Specifications and Installation 2.3. Dimensions Figure 2-2: ANT95V-3 Dimensions www.aerotech.com Chapter 2...
  • Page 16: Figure 2-3: Ant95V-3 Mounting Plate (-Mp) Dimensions

    Mechanical Specifications and Installation ANT95V-3 Hardware Manual Figure 2-3: ANT95V-3 Mounting Plate (-MP) Dimensions Chapter 2 www.aerotech.com...
  • Page 17: Securing The Stage To The Mounting Surface

    Refer to Section 2.3. for specific model mounting locations and dimensions. Table 2-1: Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M4 by 12 mm [#8 by 3/8 in] SHCS 2.3 N·m www.aerotech.com Chapter 2...
  • Page 18: Figure 2-4: Mounting Hole Pattern

    Mechanical Specifications and Installation ANT95V-3 Hardware Manual Figure 2-4: Mounting Hole Pattern Chapter 2 www.aerotech.com...
  • Page 19: Attaching The Payload To The Stage

    N O T E : If your ANT95V-3 was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the ANT95V-3 is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur.
  • Page 20 Mechanical Specifications and Installation ANT95V-3 Hardware Manual This page intentionally left blank. Chapter 2 www.aerotech.com...
  • Page 21: Chapter 3: Electrical Specifications And Installation

    Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT95V-3 is part of a complete Aerotech motion control system, setup usually involves connecting the ANT95V-3 to the appropriate drive chassis with the cables provided. Labels on the system components usually indicate the appropriate connections.
  • Page 22: Motor And Feedback Connectors

    Stages equipped with standard motors and encoders come from the factory completely wired and assembled. N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration.
  • Page 23: Table 3-1: Motor And Feedback Pinouts

    Positive (CW) hardware limit Reserved Hall Effect sensor, phase B Frame ground Motor ØA Motor ØB Motor ØC Case Signal shield connection (to case) Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF www.aerotech.com...
  • Page 24: Motor And Feedback Wiring

    All motor and controller manufacturers have their own designations for motor ØA/ØB/ØC and Hall signals A/B/C (refer to for motor phasing). Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring Chapter 3 www.aerotech.com...
  • Page 25: Motor And Feedback Specifications

    Requires external pull-up to +5 V (10 kΩ recommended) Note: If the ANT95V-3 is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. www.aerotech.com Chapter 3...
  • Page 26: Table 3-3: Motor Specifications

    5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
  • Page 27: Limits, Marker, And Machine Direction

    Electrical Specifications and Installation 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5.
  • Page 28: Motor And Feedback Phasing

    Electrical Specifications and Installation ANT95V-3 Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-3: Hall Phasing Chapter 3 www.aerotech.com...
  • Page 29: Figure 3-4: Analog Encoder Phasing Reference Diagram

    ANT95V-3 Hardware Manual Electrical Specifications and Installation Figure 3-4: Analog Encoder Phasing Reference Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard) www.aerotech.com Chapter 3...
  • Page 30 Electrical Specifications and Installation ANT95V-3 Hardware Manual This page intentionally left blank. Chapter 3 www.aerotech.com...
  • Page 31: Chapter 4: Maintenance

    Re-tighten loose connectors Replace or repair damaged cables Clean the ANT95V-3 and any components and cables as needed Repair any damage before operating the ANT95V-3 Inspect and perform an operational check on all safeguards and protective devices www.aerotech.com Chapter 4...
  • Page 32: Cleaning And Lubrication

    W A R N I N G : Further disassembly of the stage is not recommended because proper assembly and calibration can only be done at the factory. In addition, a laser interferometer is required for post assembly verification to maintain warranties. Contact Aerotech for more information.
  • Page 33: Troubleshooting

    Encoder (sine and cosine) signal connections (refer to Chapter 3 uncontrollably Controller documentation). Motor Connections (refer to Chapter 3 and Controller documentation). Stage oscillates or Gains misadjusted (refer to the controller documentation). squeals Encoder signals (refer to the controller documentation). www.aerotech.com Chapter 4...
  • Page 34 Maintenance ANT95V-3 Hardware Manual This page intentionally left blank. Chapter 4 www.aerotech.com...
  • Page 35: Appendix A: Warranty And Field Service

    Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s...
  • Page 36 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
  • Page 37: Appendix B: Revision History

    Revision Description 1.02.00 Product update Safety information updated General revision 1.01.00 Added Declaration of Incorporation Added Environmental Specifications section Added safety information and warnings Added note about current requirements of motor and ground wires 1.00.00 New Manual www.aerotech.com Appendix B...
  • Page 38 Revision History ANT95V-3 Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
  • Page 39: Index

    EN ISO 12100 multiaxis combinations Encoder Specifications orthogonality Flexures part number Global Technical Support Pitch grease Protection Rating protective ground connection Hall-Effect Sensors Specifications Humidity Repeatability Resolution In-Position Stability Roll inspect inspection schedule serial number isopropyl alcohol service schedule www.aerotech.com Index...
  • Page 40 Index ANT95V-3 Hardware Manual Settling Time Shimming Shipping Clamps solvents Speed stabilize stage distortion Stage Mass Straightness Support Technical Support vacuum vacuum guidelines Vibration Warranty and Field Service Index www.aerotech.com...

This manual is also suitable for:

Ant95v-3-pl2Ant95v-3-mpAnt95v-3-pl1Ant130v-5

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