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Summary of Contents for Aerotech ANT95XY Series
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Page 1: Ant95Xy Series Two-Axis Direct-Drive Nanopositioning Stage
ANT95XY Series Two-Axis Direct-Drive Nanopositioning Stage HARDWARE MANUAL Revision 2.00... - Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
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Page 3: Table Of Contents
ANT95XY Hardware Manual Table of Contents Table of Contents ANT95XY Series Two-Axis Direct-Drive Nanopositioning Stage Table of Contents List of Figures List of Tables Safety Procedures and Warnings EU Declaration of Incorporation Chapter 1: Overview 1.1. Environmental Specifications 1.2. Accuracy and Temperature Effects 1.3. -
Page 4: List Of Figures
Figure 2-7: Load Orientations Figure 2-8: Cantilevered Load Capabilities Figure 3-1: ANT95XY Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Diagram Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... -
Page 5: List Of Tables
List of Tables Table 1-1: Model Numbers and Ordering Options Table 1-2: Environmental Specifications Table 1-3: ANT95XY Series Specifications Table 2-1: Stage Mounting Surface Flatness Requirement Table 2-2: Stage to Mounting Surface Hardware Table 2-3: Payload to Stage Surface Hardware... - Page 6 List of Tables ANT95XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 7: Safety Procedures And Warnings
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments. - Page 8 Never install or operate equipment that appears to be damaged. Make sure that the product is securely mounted before you operate it. Use care when you move the ANT95XY or you could negatively affect the per- formance of it. WARNING: Securely mount and position all system cables. www.aerotech.com...
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Page 9: Eu Declaration Of Incorporation
ANT95XY Hardware Manual EU Declaration of Incorporation EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT95XY Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... - Page 10 EU Declaration of Incorporation ANT95XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 11: Chapter 1: Overview
Aerotech logo and the introduction of additive (3D-printed) parts. Refer to Figure 1-1. Contact Aerotech if you need a first generation manual. Figure 1-1: GEN2 vs GEN1 Visual Comparison Table 1-1: Model Numbers and Ordering Options ANT95XY Two-Axis XY Direct-Drive Nanopositioning Stage... -
Page 12: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time. -
Page 13: Basic Specifications
Consult the Aerotech factory for more information. 6. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information. www.aerotech.com... -
Page 14: Vacuum Operation
Teflon cables. Aerotech recommends that customers bake out vacuum sys- tems when first installing them in the vacuum chamber. Contact Aerotech to discuss your applic- ation and the recommended bakeout procedure. -
Page 15: Chapter 2: Installation
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. Each stage has a label listing the system part number and serial number. These numbers contain information necessary for maintenance or system hardware and software updates. -
Page 16: Dimensions
2.2. Dimensions ANT95XY Hardware Manual 2.2. Dimensions Figure 2-2: ANT95XY-025 Dimensions Figure 2-3: ANT95XY-025 Mounting Plate Dimensions www.aerotech.com... -
Page 17: Figure 2-4: Ant95Xy-050 Dimensions
ANT95XY Hardware Manual 2.2. Dimensions Figure 2-4: ANT95XY-050 Dimensions Figure 2-5: ANT95XY-050 Mounting Plate Dimensions www.aerotech.com... -
Page 18: Securing The Stage To The Mounting Surface
Refer to Section 2.2. for mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Typical Screw Torque Mounting Hardware M4 SHCS 2.0 N·m [18 lb·in] M6 or (1/4") SHCS ([-MP] option) 7.0 N·m [61 lb·in] www.aerotech.com... -
Page 19: Figure 2-6: Mounting Hole Pattern
ANT95XY Hardware Manual 2.3. Securing the Stage to the Mounting Surface Figure 2-6: Mounting Hole Pattern www.aerotech.com... -
Page 20: Attaching The Payload To The Stage
If you start the ANT95XY without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. -
Page 21: Figure 2-7: Load Orientations
ANT95XY Hardware Manual 2.4. Attaching the Payload to the Stage Figure 2-7: Load Orientations Figure 2-8: Cantilevered Load Capabilities www.aerotech.com... - Page 22 2.4. Attaching the Payload to the Stage ANT95XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 23: Chapter 3: Electrical Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT95XY is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections. -
Page 24: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 25: Table 3-1: 25-Pin Motor And Feedback Connector Pinout
Hall Effect Sensor (Phase B) Shield Connection Motor Phase A Motor Phase B Motor Phase C Table 3-2: 25-Pin Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2 www.aerotech.com... -
Page 26: Motor And Feedback Wiring
3.2. Motor and Feedback Wiring ANT95XY Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: ANT95XY Motor and Feedback Wiring www.aerotech.com... -
Page 27: Motor And Feedback Specifications
Requires external pull-up to +5 V (10 kΩ recommended) Note: If the ANT95XY is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. www.aerotech.com... -
Page 28: Table 3-7: Ant95Xy Motor Specifications
5. All performance and electrical specifications ±10% 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 29: Limits, Marker, And Machine Direction
3.4. Limits, Marker, and Machine Direction 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring... -
Page 30: Motor And Feedback Phasing
3.5. Motor and Feedback Phasing ANT95XY Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-3: Hall Phasing Diagram www.aerotech.com... -
Page 31: Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave)
ANT95XY Hardware Manual 3.5. Motor and Feedback Phasing Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... - Page 32 3.5. Motor and Feedback Phasing ANT95XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 33: Chapter 4: Maintenance
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ANT95XY and any components and cables as needed. Repair any damage before operating the ANT95XY. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com... -
Page 34: Cleaning And Lubrication
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. Cleaning Use isopropyl alcohol on a lint-free cloth to clean any external metal surface of the ANT95XY. - Page 35 4. Apply a thin, continuous film of lubricant to the exposed v-channels of the cross rollers on both ends of the stage. Aerotech recommends that you use a good quality, natural bristle artist's brush for the applicator. Do not use any applicator that could scratch or otherwise damage the v-channels.
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Page 36: Troubleshooting
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com... -
Page 37: Appendix A: Warranty And Field Service
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense. - Page 38 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
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Page 39: Appendix B: Revision History
Safety information updated 1.03 General revision Added Declaration of Incorporation Added Environmental Specifications section 1.02 Added safety information and warnings Added note about current requirements of motor and ground wires 1.01 Added stage limit travel dimension 1.00 New manual www.aerotech.com... - Page 40 Appendix B: Revision History ANT95XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 41: Index
Solution solvents Electrical Installation Specifications EN 60204-1 2010 Encoder EN ISO 12100 2010 Hall-Effect Sensors Encoder Specifications Limit Switch EU 2015/863 Thermistor Specifications stabilizing stage stage distortion grease stabilizing Symptom Hall-Effect Sensors Specifications Humidity Table of Contents Temperature Effects www.aerotech.com... - Page 42 Index ANT95XY Hardware Manual Thermistor Specifications Troubleshooting Unpacking and Handling the Stage vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...
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