Varian 969-9507 Turbomolecular Pump Manuals

Manuals and User Guides for Varian 969-9507 Turbomolecular Pump. We have 1 Varian 969-9507 Turbomolecular Pump manual available for free PDF download: Instruction Manual

Varian 969-9507 Instruction Manual

Varian 969-9507 Instruction Manual (38 pages)

Brand: Varian | Category: Controller | Size: 4 MB

Table of Contents

Navodila Za Uporabo
5
Splošne Informacije
5
Priprava Za Montažo
5
Obvestilo O Napaki
8
General Information
9
Preparation for Installation
9
Installation
10
Controller Controls, Indicators and Connectors
10
Use Procedure
11
Controller Startup
11
Pump Shutdown
11
Maintenance
11
Error Messages
12
Turbo-V 70 Controller Description
13
Controller Specifications
14
Controller Outline
14
Power Interconnections
15
Logic Interconnections
16
Controller-To-Pump Connection
18
RS 232 Communication Descriptions
19
Monitor Relay Programming
24
Reset Command
26
Power Failure
28
Pump Over-Temperature Test
32
Functional Test
32
Accessories and Spare Parts
33

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