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CKD Rapiflow FSM2 Series Instruction Manual

Small size flow sensor
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INSTRUCTION MANUAL
SMALL SIZE
FLOW SENSOR
RAPIFLOW
FSM2 Series
・Integrated indicator type (FSM2-N/P series)
・Separated indicator type (FSM2-A series)
･Integrated indicator type （Integrated needle valve type）
Please read this instruction manual carefully
●
before using this product, particularly the
section describing safety.
Retain this instruction manual with the
●
product for further consultation whenever
necessary.
SM-385853-A
nd
2
EDITION

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Summary of Contents for CKD Rapiflow FSM2 Series

  • Page 1 Discontinue SM-385853-A INSTRUCTION MANUAL SMALL SIZE FLOW SENSOR RAPIFLOW FSM2 Series ・Integrated indicator type (FSM2-N/P series) ・Separated indicator type (FSM2-A series) ･Integrated indicator type （Integrated needle valve type） Please read this instruction manual carefully ● before using this product, particularly the section describing safety.
  • Page 2 ！ Always read before starting use. When designing and manufacturing a device using CKD products, the manufacturer is obligated to check that device safety mechanical mechanism, pneumatic control circuit, or water control circuit and the system operated by electrical control that controls the devices is secured.
  • Page 3 Discontinue DESIGN AND SELECTION DANGER: ！ Working fluid ●Do not use this product for flammable fluids. Working environment ●Explosion-proof environment Never use this product in an explosive gas atmosphere. The structure is not explosion-proof, and explosions or fires could occur. WARNING: ！...
  • Page 4 Discontinue install this product where water, salt, dust, or swarf is present or in a WARNING: ！ pressurized or depressurized environment. This product cannot be used where the temperature changes greatly or where high humidity environment could cause damage through dew condensation. CAUTION: ！...
  • Page 5 Discontinue If source pressure or vacuum source is not supplied when device CAUTION: ！ power is turned on, “flow rate 0” = “sensor output (switch output) ON” status is set at the flow rate sensor (switch). Check that this is not a problem with the PLC sequence program, etc.
  • Page 6 Discontinue ●Although the mounting is "unrestricted in vertical/horizontal CAUTION: ！ direction", the flow rate may vary depending on difference in the mounting orientations or piping conditions. About Mounting CAUTION: ！ ●The display integrated type's flow rate meter uses a liquid crystal display, which may be difficult to read depending on the angle.
  • Page 7 Discontinue DANGER: ！ About Wiring ● Use power supply voltage and output within the specified voltage. If voltage exceeding the specified voltage is applied, the sensor could malfunction or be damaged, or electrical shock or fire could occur. Do not use any load that exceeds the rated output. Failure to observe this could result in output damage or fire.
  • Page 8 Discontinue ●Connecting load WARNING: ！ The output impedance of the analog output section is approx. 1 k . If the impedance of the connecting load is small, output error increases. Check error with the impedance of the connecting load before using. (The analog output current output type is excluded.) During adjustment CAUTION: ！...
  • Page 9 Discontinue CAUTION: ！ Diode for reverse Control panel prevention Flow sensor Test SW or Current from short circuit another component Disconnection ●Take countermeasures as followings to prevent damages caused by reverse current. (1) Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick a cable as possible.
  • Page 10 Discontinue ●Analog output continues even if the flow rate range is exceeded. CAUTION: ！ With the display integrated type, "Hi" or "Lo" will be displayed. With the display separate type, the bar display will flicker. Note that this is outside guaranteed precision. ●When using the display integrated type, do not press down on the display section.
  • Page 11 Discontinue INDEX SMALL SIZE FLOW SENSOR RAPIFLOW FSM2 Series Please see the instruction Manual No. SM-385853-A manual(D2-180166) about the separated indicator type. 1. INSTALLATION Piping Installation Wiring 1.3.1 Integrated indicator type (FSM2-N series(NPN output)) 1.3.2 Integrated indicator type (FSM2-P series(PNP output)) 1.3.3...
  • Page 12 Discontinue 2.5.12 Model number display 3. MAINTENANCE Error displays and corrective action TROUBLE SHOOTING 4. PRODUCTS Specifications 4.1.1 Integrated indicator type (FSM2-N/P series) 4.1.2 Separated indicator type (FSM2-A series) 4.1.3 Integrated indicator type （Integrated needle valve type） How to order Dimensions 4.3.1 Integrated indicator type (FSM2-N/P series)
  • Page 13 Discontinue １ INSTALLATION １． INSTALLATION １．１ Piping ＜Caution＞ Arrange piping so that the flow direction agrees with the direction of the arrow indicated on the sensor body. Flow direction Flow direction Flash the pipe to remove foreign substances and swarf, etc., in inside of pipe before piping. When piping a sensor, do not apply excessive screw-in and load torques to the port.
  • Page 14 Discontinue １ INSTALLATION １．２ Installation ・The display part uses the LCD. The display becomes difficult to see for the view angle. ・This product can be installed with any attitude; vertical, horizontal, right or left. The tightening torque for screws should be 0.5N･m. Horizontal mount Vertical mount(with bottom thread) (with through hole)
  • Page 15 Discontinue １ INSTALLATION Panel mount Model no：FSM2-KHS Push in joint type Port size：Rc1/8、Rc1/4、M5type Note：It is not possible to use it for 「A15」  of port size Model no：FSM2-KHS-N Ｉｎｔｅｇｒａｔｅｄ  needle valve type [SM-385853-A] −14−...
  • Page 16 Discontinue １ INSTALLATION １．３ Wiring １．３．１  FSM2-N series（Integrated indicator type, NPN output type）  （Brown）Power supply＋ Load （Black）CH1 Load SW output１ ＋ CH2 function selected （White）CH2 switch output − SW output 2 （Gray）Analog output Load (Blue) Power supply - （Brown）Power supply＋ Load （Black）CH1 SW output１...
  • Page 17 Discontinue １ INSTALLATION １．３．２  FSM2-P series（Integrated indicator type, PNP output type）  （Brown）Power supply＋ （Black）CH1 SW output１ （White）CH2 ＋ Load CH2 function selected SW output 2 − switch output Load （Gray） Analog output Load (Blue) Power supply - （Brown）Power supply＋ （Black）CH1 SW output１...
  • Page 18 Discontinue １ INSTALLATION １．３．３  FSM2-A series（Separated indicator type）  （Brown）Power supply＋ （Black）analog output ＋ − Load （white）NC （Blue） Power supply - connector (FSM2 side) [1] [2] [3] [4] ※ Analog voltage output R : approx.1k Analog current output R : approx.100 Line color Content Brown...
  • Page 19 Discontinue ２ OPERATION ２． OPERATION ２．１ Names and functions of display and operation section     ２．１．１  Integrated indicator type (FSM2-N/P series) Main display (Green/Red) Switch output indicator (CH1) Displays flow rate, various switch Lights when switch output (CH1) turns on. settings.
  • Page 20 Discontinue ２ OPERATION ２．２  Function （FSM2-N/P series） ●Normal mode    （Refer to Page 20 for the operation.）  Item Description Setting at shipping out of factory Instantaneous flow Instantaneous flow is displayed. Instantaneous flow display display Integrated flow An integrated flow is able to be displayed. display The switch output function includes one to turn the switch ON and OFF when the specified count value is exceeded, and an inte-...
  • Page 21 Discontinue ２ OPERATION ２．３  Normal mode (Integrated indicator type)   ２．３．１  Displaying the integrated flow ＜Instantaneous flow rate display.＞  ｍＬ/ ｍｉｎ Press once Display unit selection Instantaneous flow rate display. Integrated display  （unit : mL、L） （unit : mL/min、L/min）  ｍＬ/ ｍｉｎ ｍＬ...
  • Page 22 Discontinue ２ OPERATION ２．３．３  Set-point verification method ＜Instantaneous flow rate display.＞ ｍＬ/ ｍｉｎ Being held down Being held down CH2 data display CH1 data display When CH2 selected external input of integrated When CH1 selected window operation[1] reset. ＜Lower limit＞ ｍＬ/ ｍｉｎ...
  • Page 23 Discontinue ２ OPERATION   ２．４  Standard setting mode ２．４．１  How to enter to standard setting mode ＜Instantaneous flow rate display.＞ At instantaneous flow rate display, press ｍＬ  /  ｍｉｎ      key for 3 sec. to enter to standard setting mode. Press for 3 sec.
  • Page 24 Discontinue ２ OPERATION ２．４．２  Setting of switch output function Switch output setting display CH1 operation mode change Press key to select operation mode. Press key to set. ＜Window operation②＞  ＜Switch output OFF＞  ＜Window operation①＞  ＜Integrated flow pulse output＞  ＜Hysteresis operation①＞  ＜Hysteresis operation②＞  ＜Integrated flow output①＞...
  • Page 25 Discontinue ２ OPERATION ●Switch output Having 2 pieces of switch output, 7 operation patterns and stop of operation can be set. Operation pattern Description Operation waveform LCD display No.  Switch output OFF Switch output OFF 1  ＯＮ  ＯＦＦ  Flow rate Window operation[1] The switch turns ON when 2 ...
  • Page 26 Discontinue ２ OPERATION ２．４．３  Switch output forcible ON mode Forcible output setting display To Instantaneous flow rate display Press once (CH1 output ON)  １ Being held down (CH2 output ON)  ２  Being held down (CH1 and CH2 output ON)  １ ２  Being held down ２．４．４  Zero point adjustment 0 point adjustment setting display.
  • Page 27 Discontinue ２ OPERATION   ２．５  Detailed setting mode ２．５．１  How to enter to detailed setting mode ＜Instantaneous flow rate display＞ ｍＬ  /  ｍｉｎ    At instantaneous flow rate display, press key for 8 sec. to enter to detailed setting mode. Press for 8 sec ｍＬ...
  • Page 28 Discontinue ２ OPERATION ２．５．２  Setting of flow direction（Integrated indicator type, Bi-directional type only）  Flow direction can be switched. Press key to select flow direction. Press key to set. Flow direction setting display Setting of flow direction ＜One-direction (Forward)＞ ＜One-direction (Reverse)＞ ＜Bi-directional＞...
  • Page 29 Discontinue ２ OPERATION ２．５．３  Setting of auto reference When CH2 function selected external input of auto reference, setting value of switch output can be taken by external input or key operation. The set point takes the flow rate when external input is turned on (or key operation). When auto reference is executed, the switch setting of CH2 becomes invalid.
  • Page 30 Discontinue ２ OPERATION     ● How to take set point by key operation   ・1-point input : The set point takes the flow rate when press key for 2 sec.   ・2-point input : The upper limit takes the flow rate when press key for 2 sec.
  • Page 31 Discontinue ２ OPERATION ●Auto reference Points of Operation pat- Description Operation waveform LCD display tern name input 1-point input[1] ON when higher than input point. ＯＮ  (Flow rate Set-point=input point large side ON) ＯＦＦ  Flow rate  Set-point 1 point (1-P) 1-point input[2] OFF when higher than input ＯＮ ...
  • Page 32 Discontinue ２ OPERATION ２．５．４  Setting of response time Response time setting display Setting of response time Press key to select response time. Press key to set. …  Symbol Response determination Press once（ ） time SP 1 50msec To Instantaneous flow rate display SP 2 80msec SP 3...
  • Page 33 Discontinue ２ OPERATION ２．５．６  Setting of sub-display Sub-display setting display Setting of sub-display Press key to select sub-display. Press key to set. ＜Flow direction＞ <Flow rate unit> <Working fluid> determination Press once（ ） To Instantaneous flow rate display ２．５．７  Setting of display color Display color setting display Setting of display color Press...
  • Page 34 Discontinue ２ OPERATION ２．５．８  Hysteresis fixed value selection Hysteresis fixed value setting Hysteresis fixed value selection When window operation or auto reference is selected. Press key to select eco mode. Press key to set. ＜Approx.8%FS＞ ＜ 1%FS＞ ＜Approx.2%FS＞ Approx. …  determination Press once（...
  • Page 35 Discontinue ２ OPERATION ２．５．１０  Setting of Eco mode Eco mode setting display Setting of Eco mode Press key to select eco mode. Press key to set. ＜Eco mode OFF＞  <Eco mode ON> determination Press once（ ） About Ｌ    ｍＬ  /  ｍｉｎ      1 min.
  • Page 36 Discontinue ２ OPERATION ２．５．１２  Model number display Model number display Model number display Press key to select reset setting. Press key to set. ＜Full scale flow rate＞  ＜Model number＞  <Flow rate unit & flow direction> ｍＬ  /  ｍｉｎ  <Working fluid> <Switch output>...
  • Page 37 An error occurred during Replace FSM2. EEPROM reading or writing. Contact your nearest CKD Sales Office or dealer. An error occurred during Replace FSM2. memory reading or writing. Contact your nearest CKD Sales Office or dealer. Reading exceeds the upper Reduce the flow.
  • Page 38 Discontinue ３ MAINTENANC ３．２  Troubleshooting Trouble Cause Corrective action Replace FSM2. Breakage of wire. Recheck/repair external wiring. Wrong connection power Connect the rated power source source. correctly. No flow display (No analog output) Keep FSM2 main body and cable Malfunction caused by noise. away from noise source.
  • Page 39 Discontinue ４ PRODUCTS ４． PRODUCTS ４．１  Specifications ４．１．１  Integrated indicator type(FSM2-N/P series) ● Integrated indicator type(Resin / Aluminum body) M o d e l n o . D is p la y i n t e g r a t e d t y p e ( R e s in / A l u m i n u m b o d y ) F S M 2 - [ * 1 ] [ * 2 ] [ * 3 ] [ * 4 ] - [ * 5 ] [ ] - [ * 6 ] D e s c r i p t io n s...
  • Page 40 Discontinue ４ PRODUCTS ●Integrated indicator type (Stainless steel body) Model no. Display integrated type (stainless steel body) FSM2-[*1][*2][*3][*4]-[*5][*6][ ]-[*7] Descriptions Full scale flow rate 500mL/min ● 1L/min ● 2L/min ● 5L/min ● Flow rate 10L/min range ● 20 L/min Note 1 ●...
  • Page 41 Discontinue ４ PRODUCTS ４．１．２  Separated indicator type(FSM2-A series)   ●Separated indicator type (Resin / Aluminum body) M odel no. D isplay separate type (resin/alu m inum body) FS M 2-A [*1][*2][*3]-[*4][ ]-[*5] D e scrip tion s Fu ll scale flow ra te 0 05 0 10 20 1...
  • Page 42 Discontinue ４ PRODUCTS ● Separated indicator type (Stainless steel body) Model no. Display separate type (stainless steel body) FSM2-A[*1][*2][*3]-[*4][*5][ ]-[*6] Descriptions Full scale flow rate 500mL/min ●                   1L/m in   ●    ...
  • Page 43 Discontinue ４ PRODUCTS ４．１．３  Integrated indicator type （Integrated needle valve type） ●Integrated needle valve type (Resin body) M o d e l n o . N e e d le v a lv e in te g r a te d ty p e (R e s in b o d y ) F S M 2 - [* 1 ][* 2 ][* 3 ][* 4 ]-[* 5 ][ ]N -[* 6 ] D e s c rip tio n s...
  • Page 44 Discontinue ４ PRODUCTS ● Integrated needle valve type (Stainless steel body) M o d e l n o . N e e d le v a lv e in te g ra te d ty p e (S ta in le s s s te e l b o d y ) F S M 2 -[* 1 ][*2 ][* 3 ][* 4 ]-[* 5 ][* 6 ][ ]N -[* 7 ] D e s c rip tio n s...
  • Page 45 Discontinue ４ PRODUCTS ４．２  How to order ＦＳＭ２ −Ｎ Ｖ Ｆ  ００５ − Ｓ０６   ＡＲ  １ Ｂ Ｋ Ｎ−Ｐ８０  [1]  [2]  [3]  [4]  [5]  [6]  [7]  [8]  [9]  [10]  [11]  [4]Flow rate range [1]Output type [2]Analog output type [3]Flow direction (full scale flow rate) Voltage output Uni-direction 500 mL/min Display separate type (1-5V) Analog output 1 point only Current output...
  • Page 46 Discontinue ４ PRODUCTS Discrete option model ＦＳＭ２  −  ＬＢ１  −  Ｐ７０  [12] [13] [12]Option [13] Clean specification Bracket (for 4,6,8,10, Rc1/8, Rc1/4, M5) Blank None Bracket (for Rc1/2) Dust generation preventing 5-conductor cable 1 m (for display integrated type) 5-conductor cable 3 m (for display integrated type ) 4-conductor cable 1 m (for display separate type) 4-conductor cable 3 m (for display separate type) Panel mounting kit (for display integrated type )
  • Page 47 Discontinue ４ PRODUCTS ４．３ Dimensions   ４．３．１  Integrated indicator type (FSM2-N/P series)       ●FSM2-N/P[ ]-H04/H06[ ](Flow range：005／010／020／050／100／200／500) 2- 3.4 penetrating 4 or 6 push-in joint Model No. Port size Dimension (A) 2-M3 depth5 FSM2-[ ]-H04[ ] 4 push-in 64.9 FSM2-[ ]-H06[ ] 6 push-in...
  • Page 48 Discontinue ４ PRODUCTS ●FSM2-N/P[ ]-S06/SM5[ ](Flow range：005／010／020／050／100／200／500) 2- 3.4 penetrating Rc1/8 or M5 2-M3 depth5 ●FSM2-N/P[ ]-S08[ ](Flow range：500／101／201) 2- 3.4 penetrating 2-M3 depth5 −47− [SM-385853-A]...
  • Page 49 Discontinue ４ PRODUCTS ●FSM2-N/P[ ]-A15(Flow range：501／102) 2-M3 depth5 [SM-385853-A] −48−...
  • Page 50 Discontinue ４ PRODUCTS   ４．３．２  Separated indicator type (FSM2-A series)   ●FSM2-A[ ]-H04/H06[ ](Flow range：005／010／020／050／100／200／500) 2- 3.4 penetrating 4 or 6 push-in joint Model No. Port size Dimension (A) 2-M3 depth5 FSM2-[ ]-H04[ ] 4 push-in 64.9 FSM2-[ ]-H06[ ] 6 push-in 67.2  ...
  • Page 51 Discontinue ４ PRODUCTS ●FSM2-A[ ]-S06/SM5[ ](Flow range：005／010／020／050／100／200／500) 2- 3.4 penetrating Rc1/8 or M5 2-M3 depth5 ●FSM2-A[ ]-S08[ ](Flow range：500／101／201) 2- 3.4 penetrating 2-M3 depth5 [SM-385853-A] −50−...
  • Page 52 Discontinue ４ PRODUCTS ●FSM2-A[ ]-A15(Flow range：501／102) 2-M3 depth5 −51− [SM-385853-A]...
  • Page 53 Discontinue ４ PRODUCTS   ４．３．３  Integrated indicator type (with bracket) ●FSM2-N/P[ ]-H04/H06/S06/SM5[ ]B (Flow range：005／010／020／050／100／200／500) ●FSM2-N/P[ ]-H08/H10/S08[ ]B(Flow range：500／101／201) [SM-385853-A] −52−...
  • Page 54 Discontinue ４ PRODUCTS ●FSM2-N/P[ ]-A15[ ]B(Flow range：501／102)   ４．３．４  Separated indicator type (with bracket) ●FSM2-A[ ]-H04/H06/S06/SM5[ ]B (Flow range：005／010／020／050／100／200／500) −53− [SM-385853-A]...
  • Page 55 Discontinue ４ PRODUCTS ●FSM2-A[ ]-H08/H10/S08[ ]B(Flow range：500／101／201) ●FSM2-A[ ]-A15[ ]B(Flow range：501／102) [SM-385853-A] −54−...
  • Page 56 Discontinue ４ PRODUCTS ４．３．５  Integrated indicator type (Integrated needle valve type) ●FSM2-N/P[ ]-H04/H06[ ]N(Flow range：005／010／020／050／100／200／500) Model No Port size Dimension(A) FSM2-[ ]-H04[ ]N 4 push-in 89.9 FSM2-[ ]-H06[ ]N 6 push-in 92.2 2-M3 depth5 ●FSM2-N/P[ ]-H08/H10[ ]N(Flow range：500／101／201) 2-M3 depth5 Model No Port size Dimension(A)
  • Page 57 Discontinue ４ PRODUCTS ●FSM2-N/P[ ]-S06[ ]N(Flow range：005／010／020／050／100／200／500) 2-M3 depth5 ●FSM2-N/P[ ]-S08[ ]N(Flow range：500／101／201) 2-M3 depth5 [SM-385853-A] −56−...
  • Page 58 Discontinue ４ PRODUCTS ４．３．６  Integrated indicator type (Integrated needle valve type) (with bracket) ●FSM2-N/P[ ]-H04/H06/S06[ ]BN (Flow range：005／010／020／050／100／200／500) ●FSM2-N/P[ ]-H08/H10/S08[ ]BN(Flow range：500／101／201) −57− [SM-385853-A]...
  • Page 59 Discontinue ４ PRODUCTS   ４．３．７  Bracket ●FSM2-LB1(FSM2-[ ]005／010／020／050／100／200／500／101／201) ●FSM2-LB2(FSM2-[ ]501／102) [SM-385853-A] −58−...
  • Page 60 Discontinue ４ PRODUCTS   ４．３．８  Cable option ●FSM2-C51/C53 (Integrated indicator type) Model No. Dimension (L) FSM2-C51 1040±20 FSM2-C53 3040±20 ●FSM2-C41/C43 (Separated indicator type) Model No. Dimension (L) FSM2-C41 1040±20 FSM2-C43 3040±20 −59− [SM-385853-A]...
  • Page 61 Discontinue ４ PRODUCTS ４．３．９  Ｈｏｗ  ｔｏ  Ｐａｎｅｌ  ｍｏｕｎｔ ●Integrated indicator type Model No. Dimension (A) Dimension(B) FSM2-[ ]-H04/H06/S06/SM5 40.5 28.5 FSM2-[ ]-H08/H10/S08 46.5 30.0 ●Integrated needle valve type Model No. Dimension (A) Dimension(B) FSM2-[ ]-H04/H06/S06[ ]N 40.5 28.5 FSM2-[ ]-H08/H10/S08[ ]N 46.5 30.0 [SM-385853-A] −60−...
  • Page 62 Discontinue ４ PRODUCTS Panel hold matching Fig  （Plate thickness t 0.8 to 6）  ●Integrated indicator type  ＜Single mount＞                ＜Sticking mount＞  n：Number of sticking installations 57.5±0.5 57.5±0.5 22.5±0.5 22.5+28(n-1)±0.5 ●Integrated needle valve type ＜Single mount＞                ＜Sticking mount＞  n：Number of sticking installations 74.5±0.5 74.5±0.5 22.5±0.5 22.5+28(n-1)±0.5 −61−...
  • Page 63 Discontinue ４ PRODUCTS ４．４  Internal structure   ４．４．１  Resin body (Integrated indicator type) Port size: f6 push-in ①  ③  ②  ⑭  ④  ⑬  ⑤  ⑫  ⑥  ⑪  ⑩  ⑨  ⑧  ⑦  Parts name Material Parts name Material Liquid crystal cover Acryl resin Resin body Polyamide resin...
  • Page 64 Discontinue ４ PRODUCTS ４．４．３  Aluminum body(Separated indicator type) Port size:Rc1/2 ①  ②  ⑭  ③  ④  ⑤  ⑬  ⑥  ⑫  ⑦  ⑪  ⑩  ⑨  ⑧  Parts name Material Parts name Material Spacer Aluminum alloy ① Front sheet Polyester film ⑧ Case ABS resin Port filter Stainless steel...
  • Page 65 Discontinue ４ PRODUCTS ４．４．４  With needle valve(Resin body) ①  ②  ③  ④  ⑤  ⑥  ⑦  ⑧  ⑮  ⑭  ⑬  ⑫  ⑪  ⑩  ⑨  Parts Name Parts name Material Material Knob Fitting fixing pin SUS304 ①  ⑨  Lock nut Brass/nickeling Needle valve body Polyamide resin ② ...
  • Page 66 Discontinue ４ PRODUCTS ５． Technical data This is a guide of flow range when using a flow sensor as the ５．１ How to select low sensor adsorption/separation verification with adsorption cossle and leakage inspection, etc. The flow rate can be calculated For P (acoustic velocity) ≧1.89P...

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