Related Manuals for CKD RAPIFLOW FSM3 Series
Summary of Contents for CKD RAPIFLOW FSM3 Series
- Page 1 Compact Flow Rate Sensor ® RAPIFLOW FSM3 Series Resin Body Type Diversified Diversified High Performance High performance User-friendly User-friendly Compatible CC-1235A 1...
- Page 2 Gas types can be changed with gases button operations. In the IO-Link specifications, changing gases can be done remotely using the host controller. * Contact a CKD representative if you have any requests for the mixed gases. With the device's operation button...
- Page 3 Introducing IO-Link model IO-Link complies with digital communication standards for factory sensors and actuators. (IEC61131-9) Transmits parameters and event data that cannot be transmitted by analog communication. IO-Link features Digital signal Cloud Constant monitoring with digital data is possible. Parameter Parameters can be set and changed via the remote control network, enabling remote operation of the...
- Page 4 Solution examples Leakage inspection Fill a water container with gas and Digital pressure sensor inspect whether it leaks. Filter unit Digital pressure sensor Filter unit Compact flow rate 2-port solenoid valve Compact flow rate sensor sensor FSM3 2-port solenoid valve Maintenance of air consumption Monitor the air consumption of facilities Digital pressure sensor...
- Page 5 COMPACT FLOW SENSOR RAPIFLOW FSM3 SERIES ® Confirm suction of electronic parts Detect whether electronic parts have Inline filter been suctioned or not using flow rate. Compact flow rate sensor FSM3 Digital pressure sensor Filter unit Vacuum ejector unit Digital pressure sensor Compact flow rate sensor Inline filter Vacuum ejector unit...
- Page 6 Series For compact flow rate sensor RAPIFLOW variation FSM3 Series Clean-room specifications Applicable Flow rate Appearance Connection fluids adjusting bar fitting LCD display Bar display Nitrogen IO-Link Intro1...
- Page 7 Max. flow rate (L/min) Description Port size page 1000 φ4 φ6 φ8 φ10 φ1/4" φ3/8" Rc1/8 Rc1/4 Rc1/2 NPT1/8 NPT1/4 NPT1/2 G1/8 G1/4 G1/2 φ4 φ6 φ8 φ10 φ1/4" φ3/8" Rc1/8 Rc1/4 Rc1/2 NPT1/8 NPT1/4 NPT1/2 G1/8 G1/4 G1/2 φ4 φ6 φ8 φ10...
- Page 8 Compact flow rate sensor RAPIFLOW FSM3 Series LCD display Resin body (flow rate range: 500 mL/min to 1000 L/min) LCD display specifications FSM3-[A][B][C][D][E][F][G][H][I]-[ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 0.06 to 0.15 to 0.30 to 0.6 to 1.5 to 3.0 to 6 to...
- Page 9 Usage time Times maintained = < 1 million 5 min When instantaneous flow rate is below 1% it is not counted as integrating flow. *4: Use dry gas which does not contain corrosive elements such as chlorine, sulfur or acids, and which is clean and does not contain dust or oil mist. When using compressed air, use clean air that complies with JIS B 8392-1:2012 Class 1.1.1 to 1.6.2. Compressed air from the compressor contains drain (water, oil oxide, foreign substances, etc.). To maintain the function of this product, install a filter, air dryer (min. pressure dew point 10°C or less), and oil mist filter (max. oil content 0.1 mg/m ) on the primary side (upstream side) of this product. (Refer to the recommended values on page 42.) *5: Compressed air is used for adjusting and inspecting this product. Accuracy for gas types other than air is a guideline. *6: The accuracy is based on CKD's basic flow rate meter. It does not show absolute accuracy. *7: Repeatability over a short period of time. Change over time is not included. (Refer to the product specifications sheet for details.) *8: Actual response time may differ depending on piping conditions. Setting response time can be selected from between 50 msec to 1.5 sec. *9: T he output impedance of the analog output section is approx. 1 kΩ. If the impedance of the connecting load is small, output and error increase. Check error with the impedance of the connecting load before using. *10: The power supply voltage specifications differ for the voltage output and current output. *11: Current for when 24 VDC is connected and no load is applied. The current consumption will vary depending on how the load is connected. *12: Gas can be changed to argon, carbon dioxide, and argon 80% + carbon dioxide 20% with the gas change function. Full scale flow rate and analog output after changing gas is as follows. (Note that the 500 L/min and 1,000 L/min models do not have a gas change function.) Analog output Flow direction Full scale flow rate Voltage Current...
- Page 10 [Example of model No.] Output specifications Analog output Switch output Copy function FSM3-L005U1BH1A1N-BMR-P80 1-point 1-point (NPN) With (Voltage 2-point (NPN) Model: RAPIFLOW FSM3 Series output) 1-point (PNP) With Display L : Liquid crystal display 2-point (PNP) 1-5 V Flow rate range...
- Page 11 FSM3 Series How to order Compatibility table of flow rate range and port size, needle valve option, and EXA connection fitting Port size Piping direction : Port compatibility : Needle valve option compatibility : EXA connection fitting compatibility Compatibility table of port size and clean-room specifications Port size Piping direction Blank...
- Page 12 FSM3 Series Dimensions (LCD display) Port size: straight φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8 FSM3-L B C 1/BH1/CH1/HH1/AA1/AB1/AC1 (Full scale flow rate: 500 mL/min,1, 2, 5, 10, 20, 50 L/min) Rc1/8, NPT1/8, G1/8 G screw shape (10) G1/8 +0.4 End surface 15°...
- Page 13 FSM3 Series Dimensions Dimensions (LCD display) Port size: elbow φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8 FSM3-L B C 1/BH2/CH2/HH2/AA2/AB2/AC2 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min) Model No. Fitting Dimension (A) FSM3-L 1BH2 Push-in φ4 mm (9.5)
- Page 14 Compact flow rate sensor RAPIFLOW FSM3 Series Bar display Resin body (flow rate range: 500 mL/min to 1000 L/min) Bar display specifications FSM3-[A][B][C][D][E][F][G][H][I]-[ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 0.06 to 0.15 to 0.30 to 0.6 to 1.5 to 3.0 to 6 to...
- Page 15 42.) *3: The accuracy is based on CKD's basic flow rate meter. It does not show absolute accuracy. *4: Repeatability over a short period of time. Change over time is not included. (Refer to the product specifications sheet for details.) *5: Actual response time may differ depending on piping conditions.
- Page 16 AA Rc1/8 BA Rc1/4 CA Rc1/2 [Example of model No.] Piping direction Piping direction FSM3-B005U1BH1J1N-DHS-P70 Straight Model: RAPIFLOW FSM3 Series Elbow Display B : Bar display Output specifications Flow rate range 005 : 500 mL/min Output specifications Analog voltage output × 1-point...
- Page 17 FSM3 Series How to order Compatibility table of flow rate range and port size, and EXA connection fitting Port size Piping direction : Port compatibility : EXA connection fitting compatibility Compatibility table of port size and clean-room specifications Port size Piping direction Blank Blank...
- Page 18 FSM3 Series Dimensions (bar display) Port size: straight φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8 FSM3-B B C 1/BH1/CH1/HH1/AA1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min) G screw shape Rc1/8, NPT1/8, G1/8 (10) G1/8 +0.4 End surface...
- Page 19 FSM3 Series Dimensions Dimensions (bar display) Port size: elbow φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8 FSM3-B B C 1/BH2/CH2/HH2/AA2/AB2/AC2 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min) 87.3 2-φ3.4 penetration Model No. Fitting Dimension (A) FSM3-B 1BH2...
- Page 20 Compact flow rate sensor RAPIFLOW FSM3 Series IO-Link Resin body (flow rate range: 500 mL/min to 1000 L/min) IO-Link specifications FSM3-[A][B][C][D][E][F][G][H][I]-[ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 0.06 to 0.15 to 0.30 to 0.6 to 1.5 to 3.0 to 6 to 15 to...
- Page 21 *3: Compressed air is used for adjusting and inspecting this product. Accuracy for gas types other than air is a guideline. *4: The accuracy is based on CKD's basic flow rate meter. It does not show absolute accuracy. *5: Repeatability over a short period of time. Change over time is not included. (Refer to the product specifications sheet for details.) *6: Actual response time may differ depending on piping conditions.
- Page 22 CA Rc1/2 Piping direction Piping direction Straight [Example of model No.] Elbow FSM3-C005U1BH1L1N-GHR-P70 Output specifications Output specifications Model: RAPIFLOW FSM3 Series IO-Link communication Display C : IO-Link Unit specifications Flow rate range 005 : 500 mL/min Unit specifications Flow direction...
- Page 23 FSM3 Series How to order Flow rate range and port size Port size Piping direction : Port size compatibility Compatibility table of port size and clean-room specifications Port size Piping direction Blank Blank...
- Page 24 FSM3 Series Dimensions (IO-Link) Port size: straight φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8 FSM3-C B C 1/BH1/CH1/HH1/AA1/AB1/AC1 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min) G screw shape Rc1/8, NPT1/8, G1/8 (10) G1/8 +0.4 M12 connector, 4-pin End surface...
- Page 25 FSM3 Series Dimensions Dimensions (IO-Link) Port size: elbow φ4 mm, φ6 mm, φ1/4", Rc1/8, G1/8, NPT1/8 FSM3-C B C 1/BH2/CH2/HH2/AA2/AB2/AC2 (Full scale flow rate: 500 mL/min, 1, 2, 5, 10, 20, 50 L/min) 2-φ3.4 penetration R18.15 71.3 87.3 Model No. Fitting Dimension (A) FSM3-C...
- Page 26 FSM3 Series Internal structure FSM3-B005 to 500 Cannot be disassembled * This figure shows the bar display with straight fitting. * The part materials are subject to change without notice. Part name Material Part name Material Front sheet PET film Fitting fixing pin Stainless steel Electronic circuit board...
- Page 27 FSM3 Series Internal structure and parts list Internal structure FSM3-L501/102 Cannot be disassembled * This figure shows the LCD display. * The part materials are subject to change without notice. Part name Material Part name Material Liquid crystal cover Acrylic resin Sensor chip Semiconductor silicon Liquid crystal...
- Page 28 *5: When connecting to the FSM-V Series or WFK3000 Series, the cable size is different so the separate compatible sensor connection connector (e-con) will be required. Contact your nearest CKD sales office or dealer. The enclosed sensor connection connector (e-con) can be used with the FSM2 Series, FSM3 Series and FSM-H Series.
- Page 29 FSM3 Series How to order/dimensions How to order FSM2 Code Content Output Output Switch output (NPN) 2-points, analog output 1-point Switch output (PNP) 2-points, analog output 1-point Analog output Analog output Voltage output (1-5 V) Current output (4 to 20 mA) Cable Cable Blank...
- Page 30 FSM3 Series Example of internal circuit and load connection FSM3-L B/F/ (LCD display NPN output) [CH2 is used as SW output] [CH2 is used as external input] (Brown) power supply (+) (Brown) power supply (+) (Black) CH1 Load (Black) CH1 Load SW Output 1 SW Output 1...
- Page 31 FSM3 Series Example of internal circuit and load connection Example of internal circuit and load connection FSM3-L A/E/ FSM3-L C/G/ (LCD display, NPN output, copy function) (LCD display, PNP output, copy function) (Brown) power supply (+) (Brown) power supply (+) (Black) CH1 Load SW Output 1...
- Page 32 FSM3 Series Example of internal circuit and load connection FSM3-B J/K/ (bar display) (Brown) power supply (+) Terminal Option cable Name color Power supply (+) (voltage output: 12 to 24 V, (Black) Analog output Brown current output: 24 V) − Analog output Voltage output: 1-5 V Load impedance 50 kΩ...
- Page 33 FSM3 Series Pressure loss characteristics Pressure loss characteristics FSM3- 005 FSM3- 010 0.18 0.16 -0.07 MPa 0.35 -0.07 MPa 0.14 0.12 0.25 0.08 -0.035 MPa 0.15 -0.035 MPa 0.06 (Secondary 0.04 (Secondary side side 0.05 atmosphere) 0.02 atmosphere) 1000 Flow rate (mℓ/min) Flow rate (mℓ/min) FSM3- 020 FSM3- 050...
- Page 34 FSM3 Series Pressure loss characteristics FSM3- 500 (small body) FSM3- 500 (medium body) -0.07 MPa -0.07 MPa -0.035 MPa -0.035 MPa (Secondary (Secondary side side atmosphere) atmosphere) 0.35 MPa 0.5 MPa Flow rate (ℓ/min) Flow rate (ℓ/min) FSM3- 101 FSM3- 201 (Secondary side -0.05 MPa...
- Page 35 FSM3 Series Pressure loss characteristics Pressure loss characteristics The graphs show data when using air. For gases other than air, multiply by the specific gravities below. Specific gravity Argon 1.38 Carbon dioxide 1.53 Argon 80% 1.41 Carbon dioxide 20%...
- Page 36 FSM3 Series Needle valve flow characteristics (for air, nitrogen gas) FSM3-L005/010/020 FSM3-L050/100 0.5 MPa 0.5 MPa 0.1 MPa 0.1 MPa 0 Dial value (needle position) Dial value (needle position) FSM3-L200/500-H04/H06 FSM3-L500/101/201-H08/H10 0.5 MPa 0.5 MPa 0.1 MPa 0.1 MPa Dial value (needle position) Dial value (needle position)
- Page 37 FSM3 Series Measurement principle of FSM3 Series Measurement principle of FSM3 Series The FSM3 Series incorporates a platinum sensor chip machined with silicon micro-machining. The sensor is thermally insulated from the silicon substrate. The heating capacity is extremely low, enabling high sensitivity with a high-speed response.
- Page 38 FSM3 Series Flow rate sensor selection method Use as a guide for selection of the flow rate range when using the flow rate sensor for suction/unload confirmation or leakage inspection, etc., with the suction nozzle. The flow rate can be calculated using the effective cross-sectional area of nozzle (pinhole) and the pressure difference inside and outside of nozzle.
- Page 39 FSM3 Series Product weight Product weight [Unit: g] Fitting LCD display Bar display IO-Link Model No. Content Push-in (for φ4 mm straight) Push-in (for φ6 mm straight) Push-in (for φ8 mm straight) Push-in (for φ10 mm straight) Push-in (for φ1/4" straight) Push-in (for φ3/8"...
- Page 40 Replace the product. In addition, whenever you sense an abnormality in processing. the product, stop use and contact your nearest CKD branch. The range at which zero Make sure to set the flow rate to zero, and then perform the adjustment is possible is zero adjustment.
- Page 41 FSM3 Series Names and functions of display/operation section Names and functions of display/operation section (LCD display) The functions and various settings are made during the normal flow rate display and during the various modes. The modes are also divided into Maintenance mode, SET mode and Setting Monitor mode depending on the frequency of use. Normal operation (RUN mode) Descriptions Explanation...
- Page 42 If it still fails to return to normal operation, the product may be damaged. Replace the product. In addition, whenever you sense an abnormality in the product, stop use and contact your nearest CKD branch. [Uni-direction] All blink The flow rate exceeds the flow Reduce the instantaneous flow rate value to within the flow rate rate display range.
- Page 44 11.00 L 22.0 L 55.0 L 110.0 L 220 L 550 L 1100 L * The data range changes during gas setting for CO . Refer to page 14. * Download the IO-Link setting file (IODD) from the CKD website (http://www.ckd.co.jp/).
- Page 45 FSM3 Series Names and functions of display/operation section Explanation of functions (IO-LINK type) Descriptions Explanation Default setting Instantaneous flow rate Displays the instantaneous flow rate. display Accumulated flow display Displays the integrating flow counted after indicating to start logging. Stop Instantaneous flow rate Displays the maximum and minimum instantaneous flow rate values during peak value display (Peak...
- Page 46 For RAPIFLOW FSM3 Series Optional products Discrete option model No. method Cable optional dimensions FSM3 FSM3-A, B 5 conductor cable (for LCD display and separate display) Clean-room specifications Option Code Content 30 or less Connector cover Option 5-AWG26 material: EPDM...
- Page 47 FSM3 Series Dimensions with options Dimensions with options FSM3-H FSM3-J Bracket 1 (for models 200 L or less) Bracket 2 (for models 500 or 1000 L) R1.75 R1.75 65.3 R1.75 R1.75 t = 1 Model No. Dimension (A) t = 1 FSM3- 1/BH1/CH1/HH1/AA1/AB1/AC1 13.5...
- Page 48 100 VAC 24 VDC 12 VDC *1: Check the pressure specifications. *2: Contact CKD for G thread and NPT thread support. * For the connection method of FSM3, check the FSM3 instruction manual. [Example of model No.] EXA-02-12C-3 Port size...
- Page 49 Inline filter Series Port size: φ4 to φ10 JIS symbol Specifications Descriptions FSL100 FSL200 FSL500 Port size φ4 φ6 φ4 φ6 φ6 φ8 φ10 Working fluid Operating ambient temperature range °C 0 to 50 (no freezing) Max. working pressure 0.8 (*1) Vacuum working pressure −100 Proof pressure...
- Page 50 (except for products with outdoor specifications) or for use under the following conditions or environments. (Note that this product can be used when CKD is consulted prior to its usage and the customer consents to CKD product specifications. The customer should provide safety measures to avoid danger in the event of problems.)
- Page 51 Safety precautions Pneumatic components: Warning and Cautions Always read this section before use. Design/selection When using a valve on the primary side of Working fluids the sensor, use only valves with oil-prohibited specifications. This sensor could malfunction or DANGER fail if exposed to splattering grease, oil, etc. As Do not use this product for flammable fluids.
- Page 52 FSM3 Series Select the flow rate range based on the operating Flow rate unit vacuum pressure and suction nozzle. CAUTION Response speed may be delayed by the piping This product's flow rate is measured at a mass volume between the suction nozzle and this flow rate unaffected by temperature or pressure.
- Page 53 FSM3 Series Product-specific cautions Mounting, installation and adjustment Piping When using a push-in fitting, accurately insert tube and confirm that it cannot be pulled out. Cut the tube at a right angle with a dedicated cutter before use. CAUTION Make sure that the leakage detection solution does not Always attach the pipes before starting wiring.
- Page 54 FSM3 Series Note that if you mount the elbow fitting in a Check line color when wiring. As incorrect wiring downward position, it may interfere with the DIN rail could result in sensor damage and malfunctions, mounting. check wire color against the instruction manual before wiring.
- Page 55 FSM3 Series Product-specific cautions During Use & maintenance The sensor chip will degrade when used for a long WARNING time and cause the detected flow rate to vary. Working conditions for CE compliance Periodically inspect the sensor chip. This product is CE-marked, indicating conformity Replace the working gas in the flow paths before with the EMC Directives.
- Page 56 FSM3 Series Take the following countermeasures as followings to prevent damages caused by reverse current. Separate the power supply for output including the inductive load, such as the solenoid valve and relay, and input, such as the flow rate sensor. If a separate power supply cannot be used, directly install a surge absorption element for all inductive loads.
- Page 57 FSM3 Series Product-specific cautions Separated display FSM2-D Series Design/selection CAUTION The corresponding sensor is the voltage output (1 to 5 V) type. If the current output type or other voltage output type is connected, it doesn't operate properly. When using FSM3, use the bar display type voltage output.
- Page 58 FSM3 Series Related products Compact flow rate sensor RAPIFLOW FSM3 Series ® Catalog No. CC-1381A Compact flow rate sensor 3 series for various applications Stainless steel body Five types of gases can be measured with just one unit Reduction of pressure loss High precision/high-speed response Bi-directional fluid measurement Rotatable LCD display...
- Page 59 FSM3 Series Related products Related products Electro pneumatic regulator EVS2 Series Catalog No. CC-993A Compact and lightweight A compact electro pneumatic regulator with a size of W 30 × D 50 × H 39 and a weight of 90 g. Downsize and lighten your equipment with this model.
- Page 60 If the goods and/or their replicas, the technology and/or software found in this catalog are to be exported, law requires that the exporter makes sure that they will never be used for the development and/or manufacture of weapons for mass destruction. ● Specifications are subject to change without notice. CKD Corporation 2018 All copy rights reserved. 2018.3...