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Instruction Manual
5 Using the gauge with different gases
Indicated pressure (gauge calibrated for air)
p [Torr]
4
2
10
3
8
6
4
2
10
2
8
6
4
2
10
1
8
6
4
2
10
0
8
6
4
2
–1
10
8
6
4
2
–2
10
8
6
4
2
–3
10
8
6
4
2
–4
10
–4
10
Calibration factors
Valid for Pirani pressure range below 7.6 X 10
p
= C × indicated pressure
eff
Gas type
Calibration
factor C
He
0.8
Ne
1.4
Ar
1.7
Kr
2.4
Xe
3.0
InstruTech
–3
–2
10
10
2
4 6
2
4 6
2
4 6
-1
Gas type
air, O
water vapor
Freon 12
Pirani
Crossover
range
sensor
–1
10
10
0
10
2
4 6
2
4 6
Torr
Calibration
factor C
H
2
, CO, N
2
2
CO
2
PCM301 Busy Bee
Capacitive
diaphragm
sensor
Air, O
, CO, N
2
2
He
Ar
1
10
2
10
3
2
4 6
2
4 6
2
p
[Torr]
eff
0.5
1.0
0.9
0.5
0.7
Page 23
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