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Spectra MKS Cirrus LM99 User Manual

Bench top, on-line gas analysis system
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Cirrus
(LM99)
User Manual
SP101013.111
October 2012

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Summary of Contents for Spectra MKS Cirrus LM99

  • Page 1 Cirrus (LM99) User Manual SP101013.111 October 2012...
  • Page 2 MKS Products provided subject to the US Export Regulations. Diversion or transfer contrary to U.S. law is prohibited. Cirrus is a registered trademark of MKS Instruments, Spectra Products. Conflat® is a registered trademark of Varian Associates. Viton® is a registered trademark of E.I. DuPont de Nemours & Co., Inc.
  • Page 3 I hereby declare that the equipment named above has been designed to comply with the relevant sections of the above referenced specifications. The unit complies with all essential requirements of the Directives. Signed: J.M.Higgins General Manager October 2009 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 4 2. All instructions given in the operating manual must be followed. 3. Adjustments are strictly limited to those accessible from the control panel and computer keyboard and only when running software supplied by MKS Instruments Ltd. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 5 WARNING-DANGEROUS VOLTAGES EXIST INSIDE THE EQUIPMENT 1. Maintenance functions must only be carried out by competent persons. 2. During the warranty period, faulty equipment must be returned to MKS Instruments, Spectra Products Ltd., unless special arrangements are made. 3. There are no user serviceable parts in the electronic equipment. Certain components are EMC and safety critical and must not be substituted.

  • Page 6: Table Of Contents

    6.7 Shutting Down ................26 6.7 Shutting Down ................27 7. Maintenance ..................28 Note: These are not operator functions, only competent persons may carry out these operations ..................28 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 7 12. Returning Your Unit for Service ............68 Support Contact Numbers ..............68 13. Optional Hardware ................71 13.1 Multi-stream Inlet ..............71 Connecting the sample lines ............ 71 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 8 Location of key components ............. 73 Before you begin ..............74 Connections ................74 Check Baratron Zero ............... 75 Setting the UDV - Basics ............76 Baking the UDV ..............78 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 9: Specification

    1.4 Environmental Ambient temperature range 0 to 40 C, 80%RH non-condensing, operating and storage. Pollution degree 2 to EN61010 Enclosure IP20 to EN60529 1.5 Safety IP20 to EN60529 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 10: Connectors

    This equipment must only be used in the manner specified in these instructions. 1.6 Connectors The connectors for external circuits are for use only with MKS Spectra equipment, or equipment which has no accessible hazardous live parts. The external circuits must comply with the requirements of EN61010-1 section 6.6.1.

  • Page 11: Warning Labels

    On the connections panel refers to: a. Read all instructions carefully before use. b. The control unit and signal ports are designed for connection to MKS Spectra accessories via MKS Spectra supplied cables. There are no accessible hazardous voltages or currents on these ports.

  • Page 12: Ventilation

    Openings in the front, top and bottom panels must not be obstructed. Allow a minimum clearance of 50mm all round. Do not exceed the maximum operating ambient temperature. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 13: Introduction

    LM99-xxxxx. You should refer to the ‘Process Eye Professional’ manual for a detailed description of the software. Please ensure you read the Maintenance sections of this manual, they contain important information on the service schedules required for this type of instrument. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 14: Unpacking

    We suggest you keep the packaging material in the unlikely event you need to return the equipment for servicing. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 15: Connections And Indicators

    Cirrus. The colour and function of each of these indicators is described below, as is the inlet. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 16: Power

    The capillary terminates with a 1/4 inch (6.35mm) stainless steel pipe, ready to couple to a 1/4 inch Swagelok fitting. You may wish to use a shut off valve to prevent the loss of gas if the capillary needs to be removed for maintenance. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 17: The Rear Panel

    A description of each of the connectors can be found below. The signal and data ports must not be connected to ports that could become hazardous live. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 18: Rga Comms

    Note: The total power consumption on each rail (+5V and ±15V) for both the Analog and Digital I/O ports must not exceed 100mA. * Analog input 1 and Analog input 1 return are reserved for use with the internal cold cathode gauge. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 19: Digital I/O

    Not Connected Not Connected Not Connected Note: The total power consumption on each rail (+5V and ±15V) for both the Analog and Digital I/O ports must not exceed 100mA. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 20: Exhaust Purge In/Out

    It is important that the pumps exhaust gases are ALWAYS vented safely. Even if they are not toxic or corrosive, they may cause asphyxiation. Never block, or obstruct any pump exhaust, as this may cause dangerous internal pressure buildup. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 21: Installation

    Connect the PC to the Cirrus using a “cross-over” cable, run “ConfigureTCPIP.exe” from the Program Files\Spectra\RGA Applications\Hardware directory, connect to the remote server at 192.168.0.250 and then click on the IP Address button and enter the IP address and subnet mask that you wish to use.

  • Page 22: Re-Setting The Ip Address

    Note: If the unit has been configured to make use of DHCP, this procedure can take up to 90 seconds before the beep is heard. Replace the cover before allowing operator access. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 23: Operation

    Use the RGA Device Manager to locate and install your unit ready for use. This is explained in the Process Eye Professional User Manual. Once the unit has been installed, start the Process Eye software, once loaded you will see the unit information is displayed. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 24 Clicking on the Cirrus tab allows control of the unit To start the unit pumping, click the “Pump” button Once the turbo pump is up to speed, the indicator will change to green Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 25: Starting The Quad

    The quadrupole should be running with the filament on but only using the faraday detector. The multiplier detector will be unavailable during baking Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 26: Temperature Settings

    Whether you need to heat the capillary or not depends on the application and the nature of the gases being sampled. The Cirrus is designed to allow the capillary heater to be run continuously. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 27: Shutting Down

    4. Stop the turbo by clicking the “Pump” button, you should be able to hear the pumps stop and the vent valve open. 5. Wait 5 minutes for the system to cool further and come to a full stop. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 28: Maintenance

    To remove the outer cover, remove the three Allen head bolts indicated from front panel. Remove the two Allen head bolts from either side of the outer cover. Gently remove the outer cover vertically from the chassis. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 29: Internal Components

    Before removing the oven top plate, ensure the oven has had adequate time to cool after baking. To remove the oven plate, remove the eight Philips screws and lift the plate clear of the oven. Inlet Flange Heater Flexil Capillary Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 30: Turbo Molecular Pump

    Allow all parts of the inlet and oven to cool before commencing. The Cirrus system uses a capillary inlet to admit sample gas into the chamber for analysis. MKS Spectra produce a variety of capillary inlets but the Flexil capillary is dealt with in this manual.
  • Page 31 1/4 inch stainless steel tube. Ensure the cut is clean and the tubing has not been crushed. 10. You will now need to leak check the inlet, see Leak Checking before refitting the oven lid. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 32: Replacing The Orifice Disk

    4. In the oven compartment, use a 5/16 inch spanner to undo the nut on the inlet flange and slide it, and the ferrule, along the fused silica tube towards the front of the oven. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 33 You can now see the ceramic coupling, which sits over the PVD inlet of the quadrupole. In order to use the orifice disk insertion and removal tools, this coupling must be removed from the inlet flange. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 34 The grub screws are then screwed into the flange. Once all three springs have been removed we can proceed to remove the orifice disk using the removal tool. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 35: Orifice Disk Tools

    Orifice disk insertion and removal tools are supplied as part of the Cirrus toolkit. Do not attempt to remove or insert an orifice disk without using these tools. If they are missing from your toolkit, please contact you local MKS Spectra facility for replacements. Clean each tool before use using IPA.

  • Page 36: Fitting The Tool Guide

    Insert the Removal Tool into the guide and push the tool into the orifice disk. Press firmly until the tool bottoms against the guide. Remove the tool and Tool Guide and remove the Orifice Disk from the flange. DO NOT RE-USE THE ORIFICE DISK Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 37: Fitting A New Orifice Disk

    Without disturbing the new Orifice Disk, carefully re-fit the tool guide to the inlet flange. Once the guide is secured, check again that the new Orifice Disk is lying squarely in the tapered hole. If not, it must be re-positioned. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 38 Once the disk has been pushed fully home, remove the Insertion Tool and Tool Guide. Inspect the orifice disk for correct seating, with no gaps visible around the disks edge. Note: The disk will be slightly cupped after correct fitting. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 39: Re-Assembling The Inlet Flange

    Inlet Flange. 2. Secure the Retaining Ring by using two of the three springs. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 40 6. Re-fit and tighten the eight M8 bolts to secure the Inlet Flange to the chamber. 7. Re-connect the bypass line and tighten up the connectors. 8. Re-start the Cirrus and perform a leak check before re-fitting the oven lid and outer cover. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 41: Analyser Maintenance (Pvd And Open Source)

    The second effect is similar to the first except that the vacuum, under which the source is operating, has either a high oxygen or water content. Then instead of metal being deposited upon the Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 42: Removing The Analyser

    3. Make a note of the orientation of the analyser with respect to the vacuum chamber. Use the locking pip on the analyser flange as a reference (it will usually be in the 12 o'clock position). Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 43 Analyser maintenance is fully described in the next section. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 44: Refitting The Analyser

    5. Bolt the flanges together remembering to tighten opposite bolts equally. 6. Carefully re-fit the Electronics Package, not forgetting to re-tighten the locking ring. 7. Perform a leak check of the system Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 45: Ohmmeter Analyser Checks

    In either case, remove the analyser from the vacuum chamber and repeat the test. If the result is the same, then you have an internal short and should contact your local MKS Spectra facility for advice. Otherwise, you have a short to the vacuum chamber, check the dimensions of the vacuum chamber around the quadrupole analyser, or try refitting the analyser in a slightly different orientation.

  • Page 46: Checking Filaments

    If any of the pins read short-circuit to another pin, contact your local MKS Spectra service center with the results of your tests and they will advise you how to proceed.

  • Page 47: Changing Filaments

    The analyser is fitted with dual filaments mounted on a single plate. Changing filaments is the most common maintenance event with quadrupole analysers. For this reason, the MKS Spectra analyser has been designed to make this task as quick and easy as possible.

  • Page 48: Fitting New Filaments

    5. Before re-fitting the analyser to your vacuum chamber, carry out Section 7.2 to check for any short circuits. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 49: Ion Source Cleaning

    Remove the analyser and allow any excess alcohol to drain off. Keep the analyser inverted (feedthrough upper most) until it is dry. Do not let any alcohol run down the analyser into the flange assembly, as this will seriously damage the multiplier. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 50: Cleaning Or Replacing The Ion Source

    Some method of holding the analyser securely in an upright position, a small bench vice is ideal. Pen and paper on which to make notes and sketches Refer to the exploded views of the Analyser shown on Page 35. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 51: Removing The Ion Source

    The Extract plate does not usually require service, as it is furthest away from potential contamination. However, if you wish to remove the Extract Plate, see the exploded view on Page 38. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 52: Source Re-Assembly

    11. The filament plate can now be re-fitted and the remaining connection made. Once again, check all connections with an Ohmmeter before returning the analyser back to the vacuum chamber. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 53: Exploded Views

    9.1 Analyser Flange pin-outs Pin Descriptions Connection Earth Source plate Electron Multiplier Filament 1 Extraction plate Suppressor plate RF.1 Repeller plate / filament common No connection Filament 2 RF.2 Collector Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 54: Exploded View Of The Analyser (Open Ion-Source Shown)

    (Dimensions in mm) Source Assembly Tungsten Fils 842-021 Source Assembly Thoria Fils 842-022 PVD Source Assembly Tungsten Fils 842-045 PVD Source Assembly Thoria Fils 842-047 Screw M2 x 4 200902004 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 55: Filament Plate (Open Ion-Source)

    Barrel Connector 305040214 Screw M2 x 4 200902004 Filament Plate Tungsten Fils LM508-015PL Filament Plate Thoria Fils LM508-020PL Filament Screen 305080594 Screw M1.6 x 4 (3 off) 200901604 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 56: Source Assembly (Open Ion-Source)

    Plain Washer SS M1.6 27031600 Screw M1.6 x 8 200901608 Ceramic Tube 2.8D x 3.5L 400020035 Ceramic Washer 4.7D x 1L 400010203 Repeller Plate Assembly LM508-018PL Source Plate Assembly LM508-017PL Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 57: Extract Plate (Open Ion-Source)

    Plain Washer SS M1.6 27031600 Screw M1.6 x 6 200901606 Ceramic Tube 2.8D x 2L 400020020 Ceramic Washer 4.7D x 1L 400010203 Extract Plate Assembly LM508-016PL Source Mounting Ring 305080603 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 58: Filament Plate (Pvd Ion-Source)

    9.6 Filament Plate (PVD ion-source) Item Description Part Number (Dimensions in mm) Screw M1.6x3 200901603 Barrel Connector 305040434 Screw M2x4 200902004 Filament Plate Tungsten Fils 842-060 Filament Plate Thoria Fils 842-002 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 59: Source Assembly (Pvd Ion-Source)

    Plain Washer for above screw 270316000 Ceramic Tube 5.1L 400020051 Repeller Plate Assembly LM504-063PL Source Plate Assembly LM504-066PL Ceramic Washer 0.5L 400010207 Ceramic Restrictor 400010206 Extract Plate Assembly LM504-064PL Mounting Ring 305040233 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 60: Source Alignment Jig (Common)

    Remove the source by pushing it out from the bottom of the jig, do not pull out the source. Item Description Part Number (Dimensions in mm) Source Alignment Jig 842-029 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 61: Communications Troubleshooting

    Device run Process same range Manager? Page 63/64 Carry out reset to default IP address STILL NG Use the Troubleshoot Page feature in Device Manager Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 62 Check the options shown above. Your network connection status is now displayed in the task-bar, near the clock. Mouse-over the icon to check the status of the connection. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 63 The following displays a computer configured for automatic IP addressing (DHCP). If you are not part of a DNCP network or intend to directly connect to the instrument, you will need to assign a static IP address. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 64 As you can see below, this host’s IP address ends in 10, but could have been any number up to 255 excluding 250. Use the Subnet shown. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 65 Note: If the host PC is part of your network, then changing its IP address is not recommended without seeking advice from your IT staff. Likewise, assigning a new IP address to the instrument must be done under advice or network conflicts could occur. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 66 In the above case communication between the host PC and the instrument is possible, though Device Manager will recommend you change the instruments IP address to another, not ending in .250. This is to avoid potential problems when installing more than one instrument. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 67 Press the RESET button and immediately press and hold the PRESET button for 20 seconds. Important: If the instrument has been configured for DHCP, keep the PRESET button pressed for 90 seconds, or a reset will not occur. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 68: Returning Your Unit For Service

    If you wish to return the instrument for service, please follow these simple guidelines. Contact your local MKS Spectra service facility to obtain a Returns Material Authorisation (RMA) number. We will require some details, such as the serial numbers, date of purchase and a detailed fault description.
  • Page 69 RETURNS FORM Please complete the form and fax or send by first class post to the appropriate MKS Spectra facility. Fax numbers and addresses can be found on the inside front page of this manual. Please ensure that we have this information before we receive the equipment. A copy should also be given to the carrier.
  • Page 70 1. The equipment has been securely packaged and labelled. 2. The carrier has been informed of the hazardous nature of the consignment. Signed: Title: Date: Phone No. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 71: Optional Hardware

    The Multi-stream Inlet allows the independent sampling of four or eight streams depending on the option chosen. Connecting the sample lines The valve is supplied with all the fittings required for connecting to 1/16 stainless steel tubing. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 72: Software Operation

    Control of the inlet and therefore which line is chosen for sampling is done via the Cirrus control tab. Clicking on the “Selected Valve” pull-down opens a list of the available lines. Here valve three has been chosen. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 73: Udv

    This procedure details the on-site set-up required and should be used in conjunction with the Pfeiffer Operating Manuals supplied with the UDV and UDV Controller. Location of key components Vicci Multi-stream valve controller MKS Baratron gauge Vicci Multi-stream valve Pfeiffer UDV140 Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 74: Before You Begin

    UDV Signal Cable Baratron Output Cable Move the Set Point switch to the INTERNAL position. Connect a voltmeter to the RED and BLACK cores of the Baratron Output Cable. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 75: Check Baratron Zero

    If a zero cannot be achieved with the fine adjustment, there is a coarse adjustment on the side of the gauge. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 76: Setting The Udv - Basics

    (1-5mV) then continue the set-up. If the voltage is 5mV+, then ensure the manual valve is fully closed and re-zero the Baratron before moving on. Switch back to “Set Point” Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...
  • Page 77 670mV output from the Baratron. If the reading from the voltmeter is higher or lower than 670mV, give the gauge more time to settle, re-check the zero point and repeat the set-up procedure. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

  • Page 78: Baking The Udv

    The Cirrus chamber has a built-in heater which can be used to bake the valve at 180C, or to run the valve warm at 80C. If sampling moisture heavy compounds, you may use either temperature setting. Cirrus SP101013.111 – 10 October 2012 MKS Instruments UK Ltd., Spectra Products...

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