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CKD RAPIFLOW FSM3 Series Instruction Manual

Small size flow sensor
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INSTRUCTION MANUAL
SMALL SIZE
FLOW SENSOR
RAPIFLOW
FSM3 Series
LCD display (FSM3-L Series)
Bar display (FSM3-B Series)
IO-Link (FSM3-C Series)
Please read this instruction manual carefully
●
before using this product, particularly the
section describing safety.
Retain this instruction manual with the
●
product for further consultation whenever
necessary.
SM-662466-A
nd
2
EDITION

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Summary of Contents for CKD RAPIFLOW FSM3 Series

  • Page 1 SM-662466-A INSTRUCTION MANUAL SMALL SIZE FLOW SENSOR RAPIFLOW FSM3 Series LCD display (FSM3-L Series) Bar display (FSM3-B Series) IO-Link (FSM3-C Series) Please read this instruction manual carefully ● before using this product, particularly the section describing safety. Retain this instruction manual with the ●...
  • Page 2 (except for products with outdoor specifications) or for use under the following conditions or environments. (Note that this product can be used when CKD is consulted prior to its usage and the customer consents to CKD product specifications. The customer should provide safety measures to avoid danger in the event of problems.)

  • Page 3: Design And Selection

    DESIGN AND SELECTION Working fluid DANGER: Do not use this product for flammable fluids. Working environment Explosion-proof environment Never use this product in an explosive gas atmosphere. The structure is not explosion-proof, and explosions or fires could occur. Working fluid WARNING: This product cannot be used as a business meter.
  • Page 4 Ambient/fluid temperature WARNING: Use ambient temperature/fluid temperature from 0 to 50°C within specified range. Even if the temperature is within the specified range, do not use this product if the ambient temperature and fluid temperature could suddenly change and cause dew to condense. Drip-proof environment The degree of protection of this product is equivalent to IP40.

  • Page 5: Installation And Adjustment

    Response speed may be delayed by the piping volume between the CAUTION: suction nozzle and this product. In this case, take countermeasures to reduce piping capacity. Other The flow path is not completely free of dust generation. A final clean filter should be used in circuits where dust generation could be a problem.
  • Page 6 Do not turn the fitting while the product fluid pressure is on, since it may CAUTION: cause external leakage. Also avoid use that may cause the fitting to rotate during operation. Mounting The LCD display type flow rate display meter uses a liquid crystal display.
  • Page 7 Use a stabilized DC power supply within the specified rating that has WARNING: been insulated from the AC power supply. A non-insulated power supply could result in electrical shock. If power is not stabilized, the peak value could be exceeded. This could damage the product or impair accuracy.
  • Page 8 DURING USE & MAINTENANCE  Working conditions for CE compliance WARNING: This product is CE-marked, indicating conformity with the EMC Directives. EN61000-6-2; regulation matched to immunity applies to this product. Conditions below are necessary to comply with these standards. [Conditions] The assessment of this product is performed by using a cable pairing a power supply line and a signal line, treating this cable as a signal line.
  • Page 9 Take countermeasures as followings to prevent damages caused by CAUTION: reverse current. (1) Avoid centralizing current at the power cable, especially the minus side power cable, and use as thick a cable as possible. (2) Limit the number of devices connected to the same power supply as the flow rate sensor.

  • Page 10: Table Of Contents

    INDEX SMALL SIZE FLOW SENSOR RAPIFLOW FSM3 Series Manual No. SM-662466-A Please see the instruction manual (D2-180166) about the separated indicator type. 1. INSTALLATION Piping Installation Wiring 1.3.1 LCD display (NPN output) 1.3.2 LCD display (PNP output) 1.3.3 When copying setting values 1.3.4...
  • Page 11 4.3.2.2 Parameter and commands 4.3.2.3 Process data IN 4.3.2.4 Observation 4.3.2.5 Diagnosis 4.3.2.6 IODD File list 5. MAINTENANCE Error code and countermeasures (LCD display) Error code and countermeasures (Bar display) Error code and countermeasures (IO-Link) Troubleshooting 6. PRODUCTS Specifications 6.1.1 LCD display (FSM3-L series) 6.1.2 Bar display (FSM3-B series)

  • Page 12: Installation

    １ INSTALLATION 1 INSTALLATION 1.1 Piping [Caution] Pipe so that the flow direction conforms to the direction of the arrow indicated on the sensor body. Flow direction Flow direction Before piping, flash the pipe to remove foreign matter, swarf, etc., from the inside. When piping the sensor, do not apply excessive screw-in and load torques to the port.
  • Page 13 １ INSTALLATION 1.2 Installation It may be difficult to view the LCD, depending on the angle. This product can be installed with any direction; vertical, horizontal, left, right ort. The tightening torque for screws should be 0.5 N m. Lateral mounting (use of through hole) Vertical mounting (use of female thread on bottom surface) Installed screw Installed screw...
  • Page 14 １ INSTALLATION Panel mounting (use of dedicated Kit) FSM3-*005 to 201 (non needle valve) Single item model No. ： FSM3-K Panel mounting (use of dedicated Kit) FSM3-*005 to 201 (with needle valve) Single item model No. ： FSM3-L The panel vessel is inserted from the The panel vessel is inserted from the The separated indicator is inserted front side of the panel.

  • Page 15: Wiring

    １ INSTALLATION 1.3 Wiring 1.3.1 LCD display (NPN output) FSM3 -L*****B/F （ One analog, 2 switches ） (Brown) Power supply + Load (Black) CH1 Load SW output 1 Selected function of CH2 is switch output (White) CH2 SW output 2 ※...

  • Page 16: Lcd Display (Pnp Output)

    １ INSTALLATION 1.3.2 LCD display (PNP output) FSM3 -L*****D/H （ One analog, 2 switches ） (Brown) Power supply + (Black) CH1 SW output 1 Selected function of (White) CH2 Load SW output 2 CH2 is switch output Load (Gray) ※ R Analog output Load (Blue) Power supply -...

  • Page 17: When Copying Setting Values

    １ INSTALLATION 1.3.3 When copying setting values FSM3-L*****A/C/E/G/** （ LCD indicator, with copy function ） Power supply + Power supply + SW output 1 External input Configuration copy External input SW output 1 Analog output Analog output Power supply - Power supply - FSM3(slave) FSM3(master)

  • Page 18: Connection Between Led Bar Display And Separate Display

    １ INSTALLATION 1.3.5 Connection between Bar display and separate display e-con Sumitomo 3M Wire mount plug 37104-3122-000 FL (Brown) Power supply + Separated FSM3 (Black) Sensor LED Bar indicator indicator type Voltage output (White) N.C. (FSM2-D- □ ) (Blue) Power supply - e-con Sumitomo 3M Mini Clamp Board Mount Socket Straight type ,1 row type 37204-62B3-004 PL 1.3.6...
  • Page 19 １ INSTALLATION Notes [SM-662466-A]  −18−...

  • Page 20: How To Use The Lcd Display (Fsm3-L)

    ２ OPERATION How to use the LCD display (FSM3-L) 2.1 Names and functions of display/operation section (LCD display) Output(OUT1) display Turns on when CH1 output is ON. Blinks together with the background during overcurrent Main display section(green/red) Flow rate unit display detection.
  • Page 21 Key lock method and PIN number method can be set. F.16 Lock setting Change use according to the working environment. If you have forgotten your PIN code, please contact your nearest CKD branch. You can choose to acquire peak bottom values consecutively or at set times. Consecutive acquisition: F.17 Peak hold setting...

  • Page 22: How To Operate

    ２ OPERATION 2.3 How to operate (LCD display) 2.3.1 RUN mode ※ The figure of the key without comments means “Press one time”. [RUN mode display] When FSM3 is displaying flow rate, if you press key, you can select the function of “RUN mode”. Press the key to select the function, and press the key to confirm.

  • Page 23: Set Mode

    ２ OPERATION 2.3.2 SET mode ※ The figure of the key without comments means “Press one time”. [Run mode display] When FSM3 is displaying flow rate, if you press key for 2 seconds, the mode changes to “SET mode”. Press the key to select the function, and press key to confirm.

  • Page 24: Selection Of Ch1 Operation

    ２ OPERATION F.01_Selection of CH1 operation [Operation selection] Not used Press for Press for Window comparator 1 ON value 1 sec 1 sec OFF value Hysteresis setting setting setting (available for flow rate) Press for Press for Press for Switch output Window comparator 2 OFF value 1 sec...

  • Page 25: Selection Of Ch2 Operation

    ２ OPERATION F.02_Selection of CH2 operation [Setting selection screen] Not used Press for Press for 1 sec Hysteresis 1 sec OFF value ON value setting Window output(1) setting setting Switch output Press for Press for Press for 1 sec Hysteresis 1 sec OFF value ON value...
  • Page 26 ２ OPERATION Supplement [1] : Switch output function Depending on the application, you can choose from 8 types of switch operation. Can be applied to CH1, CH2 respectively. LCD display Operation pattern Description Operation waveform （ Sub display ） Switch output OFF Switch output OFF ＯＮ ...
  • Page 27 ２ OPERATION Supplement [2] : Auto reference function Points of Operation pat- Description Operation waveform LCD display tern name input 1-point input[1] ON when higher than input (Flow rate point. ＯＮ  large side ON) Set-point=input point ＯＦＦ  Flow rate  Set-point 1 point 1-point input[2] OFF when higher than input (1-P)

  • Page 28: Integrating Functions Setting

    ２ OPERATION F.03_Integrating functions setting Set the Integrated flow rate continuously or fixed time. Also, set whether or not to retention Integrated value in internal memory. Selection of number of inputs Data retention Continuous Not execute Return to SET mode ＜...

  • Page 29: Unit 1 Setting

    ２ OPERATION F.08_Unit 1 setting Switching of flow rate unit. ( ANR ／ NOR) Standard condition Reference condition Standard condition (ANR): Converted to volumetric flow at 20°C and 1 atmospheric pressure (101kPa) Reference condition (NOR): Converted to volumetric flow at 0°C and 1 atmospheric pressure (101kPa). (calculation value) Standard condition Reference condition Return to...

  • Page 30: Change Gas Type

    ２ OPERATION F.13_Change gas type The displayed value can be changed according to the type of gas to be measured. This function can be used only in the flow rate range 0.5 L/min to 200 L/min type. Oxygen type has no change gas type. Carbon Mixed gas Argon...

  • Page 31: Lock Setting

    ２ OPERATION F.16_Lock setting Set key locking method. Set whether to enable key lock (to prevent operation) or reset by pin code. In the case of secret code setting, the lock function works and it becomes the pin code input screen. Key lock Return to ＜...

  • Page 32: Maintenance Mode

    ２ OPERATION 2.3.3 Maintenance mode ※ The figure of the key without comments means “Press one time”. [RUN mode display] (Press for Press for 2 sec) 5 sec [Function selection] While pushing Forced output function While pushing While pushing +  Execute zero adjustment ? Zero adjustment...

  • Page 33: Setting Confirmation Mode

    ２ OPERATION 2.3.4 Setting confirmation mode ※ The place without instruction is pressed once. [Normal mode display] In the instantaneous flow rate display state, if you press and hold key for 3 seconds (press and hold), it enters setting monitor mode. Press the key to enter the selection screen, switch to the function you want to check with the...

  • Page 34: How To Use The Bar Display (Fsm3-B)

    ３  OPERATION How to use the Bar display (FSM3-B) 3.1 Display section name Flow bar display Lights according to the flow rate. Blinks at overflow. [example] FSM3-B101******* Flow rate Uni-direction type Bi-direction type (Forward direction) (Forward direction) Blinks at overflow. Blinks at +110% F.S.
  • Page 35 ２ OPERATION Notes [SM-662466-A] ―34―...

  • Page 36: How To Use The Io-Link (Fsm3-C)

    ３  OPERATION How to use the IO-Link (FSM3-C) 4.1 Display section name Power lamp (green) Lights when power supply is ON. Blinks during IO-Link communication. Status lamp (Green, Orange, Red) Green ････ Lights when within specified flow rate range. Orange ･･･ Lights when flow rate exceeds specified range by less than 10%.

  • Page 37: Communication Specification

    4.3.2.1 Identification Vendor ID ： 855 (Decimal number) / 357 (Hexadecimal number) Data Index Item Value Access Format index length 0x0010 Vendor Name CKD Corporation 64byte String 0x0011 Vendor Text http://www.ckd.co.jp/ 64byte String 0x0012 Product Name FSM3-C020U1BH1L1( ※ 1) 40byte...

  • Page 38: Parameter And Commands

    ４  OPERATION 4.3.2.2 Parameter and commands Common specification Data Index Item Value Access Format index length 0x0002 System Command Refer to the next section 2byte Integer16 0x0000 ： No lock Device Access 0x000C 0x0001 ： Parameter lock 2byte Record Locks 0x0002 ：...

  • Page 39: Process Data In

    ４ OPERATION Individual specification Data Index Item Value Access Format index length 1:AIR / 2:AR / 3:CO2 / Gas type 0x0100 2byte Integer16 7:MAG(8:2) 0:Uni-direction / Flow direction 0x0101 2byte Integer16 2:Bi-direction 8:50ms / 16:80ms / 32:120ms / 64:200ms / 0x0102 moving average 2byte...

  • Page 40: Observation

    ４  OPERATION 4.3.2.4 Observation Data Index Item Value Access Format index length Refer to the instantaneous flow 0x0400 Peak Hold Q Max 2byte Integer16 rate display value in 4.3.2.1 0x0401 Peak Hold Q Min "Flow range for each model" Refer to the instantaneous flow 0x0404 Integration Flow 4byte...

  • Page 41: Iodd File List

    FSM3-C500B3 2170916 0x212024 100L/min Uni-direction FSM3-C101U3 2170917 0x212025 for O type Bi-direction FSM3-C101B3 2170918 0x212026 Uni-direction FSM3-C201U3 2170919 0x212027 200L/min for O type Bi-direction FSM3-C201B3 2170920 0x212028 ※ Please download the IODD file from the CKD homepage.( http://www.ckd.co.jp/ [SM-662466-A] ―40―...

  • Page 42: Maintenance

    Sensor chip is damaged faulty. Please replace the product. Also, if you feel any abnormality in the product, please stop using it and contact the nearest CKD sales office. The flow rate is below the Increase the instantaneous flow rate value to within lower limit of the flow rate the flow rate range.
  • Page 43 Enter the set PIN number. * Be careful not to forget your PIN number. A PIN number is set. If you have forgotten your PIN code, please contact your nearest CKD sales office. Blinking of output The switch output’s over display Check whether load current exceeds the rating.

  • Page 44: Error Code And Countermeasures (Bar Display)

    Please replace the product. Also, if you feel any abnormality in the product, please stop using it and contact the nearest CKD sales office. The flow rate exceeds Reduce the instantaneous flow rate value to [ Uni-direction]...
  • Page 45 ５  MAINTENANCE Notes [SM-662466-A] ―44―...

  • Page 46: Troubleshooting

    ５  MAINTENANCE 5.4 Trouble shooting[1] Trouble Cause Corrective action Wrong connection of power source. Connect the rated power supply correctly. Please press either the MODE key or the + key - or - key to confirm that it will light again. (Do not push the button It is in eco mode.
  • Page 47 ５  MAINTENANCE 5.4 Trouble shooting[2] Trouble Cause Corrective action Foreign matter is mixed inside the main body and it is not The flow rate indica- possible to measure the correct flow rate. Please replace tion does not change Foreign matter is mixed inside the the main unit.

  • Page 48: Products

    ６ PRODUCTS PRODUCTS 6.1 Specifications 6.1.1 LCD display Resin body type FSM3-L[B][C][D][E][F][G][H][I] － [ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 3.0 to 6 to 15 to 30 to Measured 500mL...
  • Page 49 ６ PRODUCTS 6.1.1 LCD display Stainless steel body type FSM3-L[B][C][D][E][F][G][H][I] － [ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 15 to 30 to 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 3.0 to Measured 6 to 200L 500L 1000L 500mL...
  • Page 50 * 5 : Compressed air is used for adjusting and inspecting of this product. Accuracy for gas types other than air is a guideline. * 6 : The accuracy is based on CKD's basic flow rate meter. It does not show absolute accuracy. Repeatability, temperature characteristics, and pressure characteristics are not included for an accuracy of ± 3%F.S.
  • Page 51 ６ PRODUCTS Notes     −50−  [SM-662466-A]...

  • Page 52: Bar Display (Fsm3-B Series)

    ６ PRODUCTS 6.1.2 Bar display Resin body type FSM3-B[B][C][D][E][F][G][H][I] － [ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 3.0 to 6 to 15 to 30 to Measured 500mL 1000mL 2.00L...
  • Page 53 ６ PRODUCTS 6.1.2 Bar display Stainless steel body type FSM3-B[B][C][D][E][F][G][H][I] － [ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 15 to 30 to 0.06 to 0.15 to 0.30 0.60 to 1.5 to 3.0 to 6 to Measured 500mL 1000mL 2.00L 5.00L 10.00L...
  • Page 54 * 3 : The accuracy is based on CKD's basic flow rate meter. It does not show absolute accuracy. Repeatability, temperature characteristics, and pressure characteristics are not included for an accuracy of ±3%F.S. Consider separately according to the working environment and working conditions.
  • Page 55 ６ PRODUCTS Notes     −54−  [SM-662466-A]...

  • Page 56: Io-Link (Fsm3-C Series)

    ６ PRODUCTS 6.1.3 IO-Link Resin body type FSM3-C[B][C][D][E][F][G][H][I] － [ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 3.0 to 6 to 15 to 30 to Measured 500mL 1000mL 2.00L 5.00L...
  • Page 57 ６ PRODUCTS 6.1.3 IO-Link Stainless steel body type FSM3-C[B][C][D][E][F][G][H][I] － [ ] Descriptions Uni-direction Flow direction Bi-direction 15 to 30 to 15 to 30 to 0.06 to 0.15 to 0.30 to 0.60 to 1.5 to 3.0 to Measured 6 to 200L 500L 1000L 500mL 1000mL...
  • Page 58 * 3 : Compressed air is used for adjustment and inspection of this product. For other gases than air, it is a reference value. * 4 : The accuracy is based on CKD's basic flow rate meter. It does not show absolute accuracy. Repeatability, temperature characteristics, and pressure characteristics are not included for an accuracy of ± 3%F.S.
  • Page 59 ６ PRODUCTS Notes     −58−  [SM-662466-A]...

  • Page 60: How To Order

    ６ PRODUCTS 6.2 How to order 6.2.1 LCD display Resin body type (page 73) of page 11.     −59−    [SM-662466-A]...
  • Page 61 ６ PRODUCTS 6.2.1 LCD display Resin body type     −60−  [SM-662466-A]...
  • Page 62 ６ PRODUCTS 6.2.1 LCD display Stainless steel body type (page 75)     −61−    [SM-662466-A]...
  • Page 63 ６ PRODUCTS 6.2.1 LCD display Stainless steel body type     −62−  [SM-662466-A]...

  • Page 64: Bar Display (Fsm3-B Series)

    ６ PRODUCTS 6.2.2 Bar display Resin body type (page 79)     −63−    [SM-662466-A]...
  • Page 65 ６ PRODUCTS 6.2.2 Bar display Resin body type     −64−  [SM-662466-A]...
  • Page 66 ６ PRODUCTS 6.2.2 Bar display Stainless steel body type     −65−    [SM-662466-A]...
  • Page 67 ６ PRODUCTS 6.2.2 Bar display Stainless steel body type     −66−  [SM-662466-A]...

  • Page 68: Io-Link (Fsm3-C Series)

    ６ PRODUCTS 6.2.3 IO-Link Resin body type     −67−    [SM-662466-A]...
  • Page 69 ６ PRODUCTS 6.2.3 IO-Link Resin body type     −68−  [SM-662466-A]...
  • Page 70 ６ PRODUCTS 6.2.3 IO-Link Stainless steel body type     −69−    [SM-662466-A]...
  • Page 71 ６ PRODUCTS 6.2.3 IO-Link Stainless steel body type     −70−  [SM-662466-A]...
  • Page 72 ６ PRODUCTS 6.2.4 Option     −71−    [SM-662466-A]...

  • Page 73: Products Weight

    ６ PRODUCTS 6.2.5 Products weight Resin body type 【 Unit ： g 】 Fitting LCD indicator type LCD indicator Bar indicator IO-Link （Needle valve Model Contents type type type integrated type） Push-in（ 4mm Straight） Push-in（ 6mm Straight） Push-in（ 8mm Straight） Push-in（...

  • Page 74: Dimensions

    ６ PRODUCTS 6.3 Dimensions 6.3.1 LCD display ( Resin body type)     −73−    [SM-662466-A]...
  • Page 75 ６ PRODUCTS 6.3.1 LCD display (Resin body type) Note: Because it causes external leakage, please do not turn the joint while adding fluid pressure to this product. Also, please do not use in a way to rotate the fitting during use. Note: Because it causes external leakage, please do not turn the joint while adding fluid pressure to this product.
  • Page 76 ６ PRODUCTS 6.3.1 LCD display (Stainless steel body, 500mL/min to 50L/min)     −75−    [SM-662466-A]...
  • Page 77 ６ PRODUCTS 6.3.1 LCD display (Stainless steel body, 50 to 200L/min)     −76−  [SM-662466-A]...
  • Page 78 ６ PRODUCTS 6.3.1 LCD display (Stainless steel body, 500 to 1000L/min)     −77−    [SM-662466-A]...
  • Page 79 ６ PRODUCTS Notes     −78−  [SM-662466-A]...

  • Page 80: Bar Display (Fsm3-B Series)

    ６ PRODUCTS 6.3.2 Bar display (Resin body type)     −79−    [SM-662466-A]...
  • Page 81 ６ PRODUCTS 6.3.2 Bar display (Resin body type) Note: Because it causes external leakage, please do not turn the joint while adding fluid pressure to this product. Also, please do not use in a way to rotate the fitting during use. Note: Because it causes external leakage, please do not turn the joint while adding fluid pressure to this product.
  • Page 82 ６ PRODUCTS 6.3.2 Bar display (Stainless steel body, 500mL/min to 50L/min)     −81−    [SM-662466-A]...
  • Page 83 ６ PRODUCTS 6.3.2 Bar display (Stainless steel body, 50 to 200L/min)     −82−  [SM-662466-A]...

  • Page 84: Io-Link (Fsm3-C Series)

    ６ PRODUCTS 6.3.3 IO-Link (Resin body type)     −83−    [SM-662466-A]...
  • Page 85 ６ PRODUCTS 6.3.3 IO-Link (Resin body type) Note: Because it causes external leakage, please do not turn the joint while adding fluid pressure to this product. Also, please do not use in a way to rotate the fitting during use. Note: Because it causes external leakage, please do not turn the joint while adding fluid pressure to this product.
  • Page 86 ６ PRODUCTS 6.3.3 IO-Link (Stainless steel body type)     −85−    [SM-662466-A]...
  • Page 87 ６ PRODUCTS 6.3.3 IO-Link (Stainless steel body, 50 〜 200L/min)     −86−  [SM-662466-A]...

  • Page 88: Option (Fsm3-A/B/C/D/G)

    ６ PRODUCTS 6.3.4 Option FSM3 A, B FSM3 C, D 5-conductor cable 4-conductor cable （ For LCD indicator type, Separated indicator type) （ For Bar indicator type) FSM3 G M12 Both side connector cable FSM3 -M DIN rail mounting kit  ...

  • Page 89: Bracket (Fsm3-H/J)

    ６ PRODUCTS 6.3.4 Option (Continuation) FSM3 -H FSM3 -J Bracket 1 (For 200 L or less model) Bracket 2 (For 500 L, 1000L model) FSM3-K FSM3 -L Panel mounting kit 1 Panel mounting kit 2 (For LCD indicator type, Separated indicator type) (For Needle valve integrated type) ・...

  • Page 90: Internal Structure

    ６ PRODUCTS 6.4 Internal structure 6.4.1 FSM3-B005 to 500 (Bar display) Resin body Stainless steel body     −89−    [SM-662466-A]...

  • Page 91: Fsm3-L500 To 201 (Lcd Display, With Needle Valve)

    ６ PRODUCTS 6.4.2 FSM3-L500 to 201 (LCD display, with needle valve) Resin body Stainless steel body     −90−  [SM-662466-A]...

  • Page 92: Fsm3-L501/102 (Lcd Display, Large Body)

    ６ PRODUCTS 6.4.3 FSM3-L501/102 (LCD display, Large body) Resin body Stainless steel body     −91−    [SM-662466-A]...

  • Page 93: Technical Data

    ７ TECHNICAL DATA 7. Technical data Use as a guide for selection of the flow rate range when using the flow rate sensor for suction/unload confirmation or 7.1 How to select flow sensor leakage inspection, etc., with the suction nozzle. The flow rate can be calculated using the effective For P ≧...

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