Table of Contents
Advertisement
Overview
Table 1-4:
ARMS200 Series Specifications
ARMS Series
Width
(1)
Height
(2)
Aperture
Total Travel
Motor
Bus Voltage
Maximum Torque (Continuous)
Fundamental Encoder Resolution
(3)
Accuracy (calibrated)
Repeatability
(4)
Max Load
Tilt Error Motion
(5)
Maximum Rate
(6)
Minimum Rate
(6)
Rate Resolution
(6)
Rate Stability
(7)
Peak Acceleration
(7)
Inertia (unloaded)
(7)
Total Mass
(8)
Servo Bandwidth
Material
Stage Finish
Tabletop Finish
1. Height may vary with certain slip ring and rotary union options (refer to for more details).
2. Aperture not available with all slip ring and rotary union options (refer to
3. Certified with each stage. Requires the use of an Aerotech controller.
4. Maximum loads are mutually exclusive.
5. Maximum rate is based on stage capability. Actual rate may depend on encoder resolution, load, amplifier bus voltage, and motor
(refer to the S-series rotary motor (P/N: EDU166) for more information.
6. Minimum rate, rate resolution, and rate accuracy are based on stage capability. Actual rate, resolution, and accuracy may depend
on encoder resolution.
7. Peak acceleration, inertia, and total mass based on unloaded stage with standard diameter tabletop.
8. Servo bandwidth is based on unloaded stage with standard diameter tabletop. Actual bandwidth may depend on mass and inertia
of stage payload.
12
ARMS200-M1
224 mm
S-180-69-A
11.12 N·m
Axial
Moment
Over 360°
Over 10°
Over 1°
33,600 kg·mm
Chapter 1
ARMS Hardware Manual
196 mm
8 mm
±360° Continuous
Up to 340 VDC
23,600 lines/rev
±2.5 arc·sec
±0.5 arc·sec
140 kg
425 N·m
±1 arc·sec
1500°/s
0.002°/s
0.002°/s
0.0001%
0.005%
0.05%
2
>20,000°/s
2
22 kg
> 70 Hz (-3 dB)
Aluminum
Black Anodize
Hard Coating (62 Rockwell Hardness)
Table 1-1
for more details).
ARMS200-M2
249 mm
S-180-94-A
15.93 N·m
2
39,800 kg·mm
26 kg
www.aerotech.com
Advertisement
Table of Contents
