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ARMS Hardware Manual
1.3. Basic Specifications
N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual's release. Refer to www.aerotech.com for the most up-to-date information.
Table 1-3:
ARMS150 Series Specifications
ARMS Series
Width
(1)
Height
(2)
Aperture
Total Travel
Motor
Bus Voltage
Maximum Torque (Continuous)
Fundamental Encoder Resolution
(3)
Accuracy (calibrated)
Repeatability
(4)
Max Load
Tilt Error Motion
(5)
Maximum Rate
(6)
Minimum Rate
(6)
Rate Resolution
(6)
Rate Stability
(7)
Peak Acceleration
(7)
Inertia (unloaded)
(7)
Total Mass
(8)
Servo Bandwidth
Material
Stage Finish
Tabletop Finish
1. Height may vary with certain slip ring and rotary union options (refer to for more details).
2. Aperture not available with all slip ring and rotary union options (refer to
3. Certified with each stage. Requires the use of an Aerotech controller.
4. Maximum loads are mutually exclusive.
5. Maximum rate is based on stage capability. Actual rate may depend on encoder resolution, load, amplifier bus voltage, and motor
(refer to the S-series rotary motor (P/N: EDU166) for more information.
6. Minimum rate, rate resolution, and rate accuracy are based on stage capability. Actual rate, resolution, and accuracy may depend
on encoder resolution.
7. Peak acceleration, inertia, and total mass based on unloaded stage with standard diameter tabletop.
8. Servo bandwidth is based on unloaded stage with standard diameter tabletop. Actual bandwidth may depend on mass and inertia
of stage payload.
www.aerotech.com
ARMS150-M1
183 mm
S-130-39-A
2.36 N·m
Axial
Moment
Over 360°
Over 10°
Over 1°
6,600 kg·mm
Chapter 1
146 mm
8 mm
±360° Continuous
Up to 340 VDC
16,200 lines/rev
±2.5 arc-sec
±0.5 arc-sec
30 kg
175 N·m
±1 arc-sec
1500°/s
0.002°/s
0.002°/s
0.0001%
0.005%
0.05%
2
>20,000°/s
2
9 kg
> 70 Hz (-3 dB)
Aluminum
Black Anodize
Hard Coating (62 Rockwell Hardness)
Table 1-1
for more details).
Overview
ARMS150-M2
246 mm
S-130-102-A
7.69 N·m
2
9,700 kg·mm
15 kg
11
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