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Table of Contents
Related Manuals for Aerotech ARMS Series
Summary of Contents for Aerotech ARMS Series
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Page 1: Arms Series Stage Hardware Manual
ARMS Series Stage Hardware Manual Revision: 1.03.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
ARMS Hardware Manual Table of Contents Table of Contents ARMS Series Stage Hardware Manual Table of Contents List of Figures List of Tables Safety Procedures and Warnings EU Declaration of Incorporation Chapter 1: Overview 1.1. Environmental Specifications 1.2. Accuracy and Temperature Effects 1.3. -
Page 4: List Of Figures
Standard Mounting Holes Figure 2-11: Side Mount Mounting Holes Figure 2-12: Load Orientation Figure 2-13: ARMS Cantilevered Load Capability Figure 3-1: Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram www.aerotech.com... -
Page 5: List Of Tables
Motor Wiring Connector Table 3-2: Feedback Connector Table 3-3: Feedback Specifications Table 3-4: S-130 Motor Specifications (for ARMS150) Table 3-5: S-180 Motor Specifications (for ARMS200) Table 3-6: S-240 Motor Specifications (for ARMS260) Table 3-7: Encoder Specifications Table 4-1: Troubleshooting www.aerotech.com... -
Page 6: Safety Procedures And Warnings
9. All service and maintenance must be performed by qualified personnel. N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 7: Eu Declaration Of Incorporation
101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: Aerotech, Inc. ARMS Rotary Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;and that the following harmonized European standards have been applied:... - Page 8 Table of Contents ARMS Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 9: Chapter 1: Overview
Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. -
Page 10: Environmental Specifications
Extreme temperature changes could cause a decrease in performance or permanent damage to the stage. Aerotech stages are designed for and built in a 20°C (68°F) environment. Any deviation from standard operating temperature will affect stage accuracy. The severity of temperature effects on all stage specifications depends on many different environmental conditions, including how the stage is mounted. -
Page 11: Basic Specifications
Overview 1.3. Basic Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. -
Page 12: Table 1-4: Arms200 Series Specifications
Table 1-1 for more details). 3. Certified with each stage. Requires the use of an Aerotech controller. 4. Maximum loads are mutually exclusive. 5. Maximum rate is based on stage capability. Actual rate may depend on encoder resolution, load, amplifier bus voltage, and motor (refer to the S-series rotary motor (P/N: EDU166) for more information. -
Page 13: Table 1-5: Arms260 Series Specifications
Table 1-1 for more details). 3. Certified with each stage. Requires the use of an Aerotech controller. 4. Maximum loads are mutually exclusive. 5. Maximum rate is based on stage capability. Actual rate may depend on encoder resolution, load, amplifier bus voltage, and motor (refer to the S-series rotary motor (P/N: EDU166) for more information. -
Page 14: Vacuum Operation
Overview ARMS Hardware Manual 1.4. Vacuum Operation Contact the factory for information regarding operation in a vacuum environment. Chapter 1 www.aerotech.com... -
Page 15: Chapter 2: Mechanical Specifications And Installation
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping. -
Page 16: Dimensions
Installation ARMS Hardware Manual 2.2. Dimensions Figure 2-1: ARMS150 Dimensions (-TT1, -TT2, -TT3, -TT4) Chapter 2 www.aerotech.com... -
Page 17: Figure 2-2: Arms150 Dimensions (-Tt5, -Tt6, -Tt7, -Tt8)
ARMS Hardware Manual Installation Figure 2-2: ARMS150 Dimensions (-TT5, -TT6, -TT7, -TT8) www.aerotech.com Chapter 2... -
Page 18: Figure 2-3: Mounting Pedestal Dimensions For The Arms150 (-Hdp)
Installation ARMS Hardware Manual Figure 2-3: Mounting Pedestal Dimensions for the ARMS150 (-HDP) Chapter 2 www.aerotech.com... -
Page 19: Figure 2-4: Arms200 Dimensions (-Tt1, -Tt2, -Tt3, -Tt4)
ARMS Hardware Manual Installation Figure 2-4: ARMS200 Dimensions (-TT1, -TT2, -TT3, -TT4) www.aerotech.com Chapter 2... -
Page 20: Figure 2-5: Arms200 Dimensions (-Tt5, -Tt6, -Tt7, -Tt8)
Installation ARMS Hardware Manual Figure 2-5: ARMS200 Dimensions (-TT5, -TT6, -TT7, -TT8) Chapter 2 www.aerotech.com... -
Page 21: Figure 2-6: Mounting Pedestal Dimensions For The Arms200 (-Hdp)
ARMS Hardware Manual Installation Figure 2-6: Mounting Pedestal Dimensions for the ARMS200 (-HDP) www.aerotech.com Chapter 2... -
Page 22: Figure 2-7: Arms260 Dimensions (-Tt1, -Tt2, -Tt3, -Tt4)
Installation ARMS Hardware Manual Figure 2-7: ARMS260 Dimensions (-TT1, -TT2, -TT3, -TT4) Chapter 2 www.aerotech.com... -
Page 23: Figure 2-8: Arms260 Dimensions (-Tt5, -Tt6, -Tt7, -Tt8)
ARMS Hardware Manual Installation Figure 2-8: ARMS260 Dimensions (-TT5, -TT6, -TT7, -TT8) www.aerotech.com Chapter 2... -
Page 24: Figure 2-9: Mounting Pedestal Dimensions For The Arms260 (-Hdp)
Installation ARMS Hardware Manual Figure 2-9: Mounting Pedestal Dimensions for the ARMS260 (-HDP) Chapter 2 www.aerotech.com... -
Page 25: Securing The Stage To The Mounting Surface
N O T E : To maintain accuracy, the mounting surface must be flat to within 1 µm per 50 mm. ARMS series stages have a fixed mounting pattern (as shown in Figure 2-10). -
Page 26: Figure 2-10: Standard Mounting Holes
Installation ARMS Hardware Manual Counterbored Mounting Holes [QTY. 4] Side Mount Holes [QTY. 4] per side on 3 sides Figure 2-10: Standard Mounting Holes Figure 2-11: Side Mount Mounting Holes Chapter 2 www.aerotech.com... -
Page 27: Attaching The Payload To The Stage
N O T E : If your ARMS was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the ARMS is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. -
Page 28: Figure 2-13: Arms Cantilevered Load Capability
Installation ARMS Hardware Manual Figure 2-13: ARMS Cantilevered Load Capability Chapter 2 www.aerotech.com... -
Page 29: Chapter 3: Electrical Specifications And Installation
Electrical installation requirements will vary depending on product options. Installation instructions in this section are for ARMS stages equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information regarding products that are otherwise configured. -
Page 30: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. The protective ground connection of the ARMS provides motor frame ground protection only. Additional grounding and safety precautions are required for applications requiring access to the stage while it is energized. -
Page 31: Table 3-2: Feedback Connector
Hall Effect sensor, phase C Reserved Reserved Cosine Cosine-N +5 V power supply Sine Sine-N Reserved Common ground Common ground Reserved Reserved Reserved Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF www.aerotech.com Chapter 3... -
Page 32: Motor And Feedback Wiring
Operating Specifications ARMS Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: Motor and Feedback Wiring Chapter 3 www.aerotech.com... -
Page 33: Motor And Feedback Specifications
Note: 1K pull-up to +5V recommended. Encoder Specifications Supply Voltage 5 V ±5% Supply Current 250 mA Sinusoidal Type (Incremental Encoder): 1 V into 120 Ω Load (differential pk-pk Output Signals signals SIN+, SIN-, COS+, COS- are .5 V relative to ground.) pk-pk www.aerotech.com Chapter 3... -
Page 34: Table 3-4: S-130 Motor Specifications (For Arms150)
6. Specifications given are for the motor only. When integrated into a housing with bearings additional losses should be considered. 7. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 8. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 9. All Aerotech amplifiers are rated A ;... -
Page 35: Table 3-5: S-180 Motor Specifications (For Arms200)
6. Specifications given are for the motor only. When integrated into a housing with bearings additional losses should be considered. 7. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 8. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 9. All Aerotech amplifiers are rated A ;... -
Page 36: Table 3-6: S-240 Motor Specifications (For Arms260)
6. Specifications given are for the motor only. When integrated into a housing with bearings additional losses should be considered. 7. Maximum winding temperature is 100 °C (thermistor trips at 100 °C) 8. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures 9. All Aerotech amplifiers are rated A ;... -
Page 37: Marker And Machine Direction
Operating Specifications 3.4. Marker and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The positive machine direction is also the CW limit direction. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5. -
Page 38: Motor And Feedback Phasing
Operating Specifications ARMS Hardware Manual 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-3: Hall Phasing Chapter 3 www.aerotech.com... -
Page 39: Figure 3-4: Analog Encoder Phasing Reference Diagram
ARMS Hardware Manual Operating Specifications Figure 3-4: Analog Encoder Phasing Reference Diagram www.aerotech.com Chapter 3... - Page 40 Operating Specifications ARMS Hardware Manual This page intentionally left blank. Chapter 3 www.aerotech.com...
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Page 41: Chapter 4: Maintenance
Inspect and perform an operational check on all safeguards and protective devices. In general, repair and/or replacement of damaged or malfunctioning components by Aerotech field service personnel is not possible. Repair typically requires that the unit be returned to the factory. Please contact Aerotech Global Technical Support for more information. -
Page 42: Troubleshooting
Controller trap or fault. See controller documentation. Stage moves uncontrollably Encoder (sine and cosine) signals connections. See Chapter 3 Controller documentation. Motor Connections. See Chapter 3 and Controller documentation. Stage oscillates or squeals Gains misadjusted. See Controller documentation. Encoder signals. See Controller documentation. Chapter 4 www.aerotech.com... -
Page 43: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 44 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 45: Appendix B: Revision History
1.03.00 Complete manual revision 1.02.00 Changed motor feedback pin 8 to reserved 1.01.00 Declaration of Incorporation added Environmental Specifications added Safety information and warnings added/updated Motor Specifications added Note about wire current and voltage requirements added 1.00.00 New manual www.aerotech.com Appendix B... - Page 46 Revision History ARMS Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 47: Index
Performance Specifications EN 60204-1 S-180 EN ISO 12100 Electrical Specifications Encoder Specifications Performance Specifications S-240 field service Electrical Specifications Performance Specifications Global Technical Support serial number shimming Hall-Effect Sensors Specifications stabilizing stage Humidity stage distortion Inspection Schedule stabilizing www.aerotech.com Index... - Page 48 Index ARMS Hardware Manual Support Technical Support Thermistor Specifications Vacuum Operation Vibration Warranty and Field Service Index www.aerotech.com...