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Summary of Contents for Aerotech WaferMaxT Series
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Page 1: Wafermaxt Hardware Manual
WaferMaxT Hardware Manual Revision: 1.01.00... - Page 2 This manual contains proprietary information and may not be reproduced, disclosed, or used in whole or in part without the express written permission of Aerotech, Inc. Product names mentioned herein are used for identification purposes only and may be trademarks of their respective companies.
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Page 3: Table Of Contents
3.2. Motor and Feedback Wiring 3.3. Motor and Feedback Specifications 3.4. Machine Direction 3.5. Motor and Feedback Phasing Chapter 4: Maintenance 4.1. Service and Inspection Schedule 4.2. Cleaning and Lubrication 4.3. Troubleshooting Appendix A: Warranty and Field Service Appendix B: Revision History Index www.aerotech.com... -
Page 4: List Of Figures
Figure 2-1: WaferMaxT Dimensions Figure 2-2: Mounting Hole Locations Figure 2-3: Stage Orientations Figure 2-4: Cantilevered Load Capability Figure 3-1: Motor and Feedback Wiring Figure 3-2: Machine Direction Figure 3-3: Hall Phasing Figure 3-4: Analog Encoder Phasing Reference Diagram www.aerotech.com... -
Page 5: List Of Tables
WaferMaxT Hardware Manual Table of Contents List of Tables Table 1-1: Model Numbering System Table 1-2: Environmental Specifications Table 1-3: WaferMaxT Series Specifications Table 2-1: Stage to Mounting Surface Hardware Table 3-1: Motor Pin Assignments Table 3-2: Feedback Pin Assignments Table 3-3:... -
Page 6: Ec Declaration Of Incorporation
Table of Contents WaferMaxT Hardware Manual EC Declaration of Incorporation Manufacturer: Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: WaferMaxT Rotary Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... -
Page 7: Safety Procedures And Warnings
Read this manual in its entirety before installing, operating, or servicing this product. If you do not understand the information contained herein, contact an Aerotech representative before proceeding. Strictly adhere to the statements given in this section and other handling, use, and operational information given throughout the manual to avoid injury to you and damage to the equipment. - Page 8 Table of Contents WaferMaxT Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 9: Chapter 1: Overview
Overview Chapter 1: Overview N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. -
Page 10: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the WaferMaxT. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the WaferMaxT specifications are repeatable over an extended period of time. -
Page 11: Basic Specifications
Overview 1.3. Basic Specifications N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. Refer to www.aerotech.com for the most up-to-date information. - Page 12 Overview WaferMaxT Hardware Manual This page intentionally left blank. Chapter 1 www.aerotech.com...
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Page 13: Chapter 2: Installation
Allowing it to stabilize to room temperature will ensure that all of the alignments, preloads, and tolerances are the same as they were when tested at Aerotech. Use compressed nitrogen or clean, dry, oil-less air to remove any dust or debris that has collected during shipping. -
Page 14: Dimensions
WaferMaxT Hardware Manual 2.2. Dimensions N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 15: Securing The Stage To The Mounting Surface
If machining is required to achieve the desired flatness, it should be performed on the mounting surface rather than the WaferMaxT. Shimming should be avoided if possible. If shimming is required, it should be minimized to retain maximum rigidity of the system. www.aerotech.com Chapter 2... -
Page 16: Figure 2-2: Mounting Hole Locations
Refer to Section 2.2. for specific model mounting locations and dimensions. Table 2-1: Stage to Mounting Surface Hardware Mounting Hardware Typical Screw Torque M5 SHCS 4 N·m Figure 2-2: Mounting Hole Locations Chapter 2 www.aerotech.com... -
Page 17: Attaching The Payload To The Stage
N O T E : If your WaferMaxT was purchased with Aerotech controls, it might have been tuned with a representative payload based on the information provided at the time of order. If the WaferMaxT is started up without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. -
Page 18: Figure 2-4: Cantilevered Load Capability
Mechanical Specifications and Installation WaferMaxT Hardware Manual Axial Radial Distance (mm) from Axis of Rotation (Axial) Distance (mm) from Tabletop/Shaft (Radial) Figure 2-4: Cantilevered Load Capability Chapter 2 www.aerotech.com... -
Page 19: Chapter 3: Electrical Installation
Electrical installation requirements will vary depending on product options. Installation instructions in this section are for WaferMaxTs equipped with standard Aerotech motors intended for use with an Aerotech motion control system. Contact Aerotech for further information regarding products that are otherwise configured. -
Page 20: Motor And Feedback Connectors
N O T E : Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. N O T E : If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 21: Table 3-1: Motor Pin Assignments
Motor Phase A Motor Phase B Motor Phase C Motor Shield (EMI shield) Reserved Reserved Reserved Reserved Frame ground (motor protective ground) Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBMM9W4SA197 www.aerotech.com... -
Page 22: Table 3-2: Feedback Pin Assignments
Common ground (internally connected to Pin 21) Common ground (internally connected to Pin 20) Reserved Fault output from encoder Reserved Reserved Case Signal shield connection (to case) Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Connector ECK00300 FCI DB25S064TLF Chapter 3... -
Page 23: Motor And Feedback Wiring
STAGE MOTOR CONNECTIONS HALL A (typ) HALL B (typ) HALL C (typ) Pull-Up THERMISTOR COSINE 120 Ω COSINE-N +t° SINE 120 Ω SINE-N MARKER 120 Ω MARKER-N ENCODER FAULT CASE CASE Figure 3-1: Motor and Feedback Wiring www.aerotech.com Chapter 3... -
Page 24: Motor And Feedback Specifications
Note: 1K pull-up to +5V recommended. Encoder Specifications Supply Voltage 5 V ±10% Supply Current 250 mA Sinusoidal Type (Incremental Encoder): 1 V into 120 Ω Load (differential pk-pk Output Signals signals SIN+, SIN-, COS+, COS- are .5 V relative to ground.) pk-pk Chapter 3 www.aerotech.com... -
Page 25: Table 3-4: Wafermaxt Motor Specifications (S-180-44-A Slotless Motor)
WaferMaxT Hardware Manual Electrical Specifications and Installation N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any time. All drawings and illustrations are for reference only and were complete and accurate as of this manual’s release. -
Page 26: Machine Direction
Electrical Specifications and Installation WaferMaxT Hardware Manual 3.4. Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.5. -
Page 27: Motor And Feedback Phasing
Motor phase voltage is measured relative to the virtual wye common point. Motor Phase A (ØA) Hall A Motor + MACHINE DIRECTION Phase B (ØB) Hall B Motor Phase C (ØC) Hall C Positive MOVE (Clockwise) Figure 3-3: Hall Phasing www.aerotech.com Chapter 3... -
Page 28: Figure 3-4: Analog Encoder Phasing Reference Diagram
+ MACHINE DIRECTION 0° 90° 180° 270° 360° 450° 540° 630° 720° 810° COS-N 0° 90° 180° 270° 360° 450° 540° 630° 720° 810° 315° 675° MRK-N Positive MOVE (Clockwise) Figure 3-4: Analog Encoder Phasing Reference Diagram Chapter 3 www.aerotech.com... -
Page 29: Chapter 4: Maintenance
Re-tighten loose connectors Replace or repair damaged cables Clean the WaferMaxT and any components and cables as needed Repair any damage before operating the WaferMaxT Inspect and perform an operational check on all safeguards and protective devices www.aerotech.com Chapter 4... -
Page 30: Cleaning And Lubrication
In addition, a laser interferometer is required for post assembly verification to maintain warranties. Contact Aerotech for more information. The bearings, motors, and encoders for the WaferMaxT series require no added lubrication or maintenance. Periodic cleaning is recommended. Recommended Cleaning Solvents Before using a cleaning solvent on any part of the WaferMaxT, blow away small particles and dust with nitrogen or, less preferably, clean, dry, compressed air. -
Page 31: Troubleshooting
Encoder (sine and cosine) signal connections (refer to Chapter 3 uncontrollably Controller documentation). Motor Connections (refer to Chapter 3 and Controller documentation). Stage oscillates or Gains misadjusted (refer to the controller documentation). squeals Encoder signals (refer to the controller documentation). www.aerotech.com Chapter 4... - Page 32 Maintenance WaferMaxT Hardware Manual This page intentionally left blank. Chapter 4 www.aerotech.com...
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Page 33: Appendix A: Warranty And Field Service
Aerotech makes no warranty that its products are fit for the use or purpose to which they may be put by the buyer, whether or not such use or purpose has been disclosed to Aerotech in specifications or drawings previously or subsequently provided, or whether or not Aerotech’s... - Page 34 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for repair, and if Aerotech determines the problem could be warranty-related, then the following policy applies:...
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Page 35: Appendix B: Revision History
WaferMaxT Hardware Manual Revision History Appendix B: Revision History Revision Description 1.01.00 Product Update 1.00.00 New Manual www.aerotech.com Appendix B... - Page 36 Revision History WaferMaxT Hardware Manual This page intentionally left blank. Appendix B www.aerotech.com...
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Page 37: Index
S-180 EN 60204-1 part number EN ISO 12100 Payload Encoder Performance Specifications Encoder Specifications S-180 Protection Rating Finish protective ground connection Global Technical Support Radial Error Motion red, anodized aluminum Hall-Effect Sensors Specifications Repeatability Handling the Stage Humidity www.aerotech.com Index... - Page 38 Securing the Stage to the Mounting Surface serial number Service and Inspection Schedule Shimming shipping clamps solvents stabilize stage distortion Support Tabletop Diameter Technical Support Temperature Thermistor Specifications Tilt Error Motion Travel Unpacking and Handling the Stage Vibration Warranty and Field Service Index www.aerotech.com...
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