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WaferMaxT Series
User Manuals: Aerotech WaferMaxT Series Rotary Stage
Manuals and User Guides for Aerotech WaferMaxT Series Rotary Stage. We have
1
Aerotech WaferMaxT Series Rotary Stage manual available for free PDF download: Hardware Manual
Aerotech WaferMaxT Series Hardware Manual (38 pages)
Brand:
Aerotech
| Category:
Industrial Equipment
| Size: 5 MB
Table of Contents
Wafermaxt Hardware Manual
1
Table of Contents
3
List of Figures
4
List of Tables
5
EC Declaration of Incorporation
6
Safety Procedures and Warnings
7
Chapter 1: Overview
9
Table 1-1: Model Numbering System
9
Environmental Specifications
10
Accuracy and Temperature Effects
10
Table 1-2: Environmental Specifications
10
Basic Specifications
11
Table 1-3: Wafermaxt Series Specifications
11
Chapter 2: Installation
13
Unpacking and Handling the Stage
13
Dimensions
14
Figure 2-1: Wafermaxt Dimensions
14
Securing the Stage to the Mounting Surface
15
Figure 2-2: Mounting Hole Locations
16
Table 2-1: Stage to Mounting Surface Hardware
16
Attaching the Payload to the Stage
17
Figure 2-3: Stage Orientations
17
Figure 2-4: Cantilevered Load Capability
18
Chapter 3: Electrical Installation
19
Motor and Feedback Connectors
20
Table 3-1: Motor Pin Assignments
21
Table 3-2: Feedback Pin Assignments
22
Motor and Feedback Wiring
23
Figure 3-1: Motor and Feedback Wiring
23
Motor and Feedback Specifications
24
Table 3-3: Feedback Specifications
24
Table 3-4: Wafermaxt Motor Specifications (S-180-44-A Slotless Motor)
25
Table 3-5: Encoder Specifications
25
Machine Direction
26
Figure 3-2: Machine Direction
26
Motor and Feedback Phasing
27
Figure 3-3: Hall Phasing
27
Figure 3-4: Analog Encoder Phasing Reference Diagram
28
Chapter 4: Maintenance
29
Service and Inspection Schedule
29
Cleaning and Lubrication
30
Troubleshooting
31
Appendix A: Warranty and Field Service
33
Appendix B: Revision History
35
Index
37
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