Telemark Cryogenics Microprocessor Based Cryochillers
INTENDED USE OF THE
EQUIPMENT
Water vapor Cryochiller is a device that improves the performance of vacuum
pumping due to the efficient trapping of water vapor in the chamber.
Classically a Cryochiller is used with an evaporative surface (Meissner/cryo-
coil), which is located within the vacuum chamber. When in this configuration
a Telemark Cryochiller is an ultrahigh performance vacuum pump capable of
pumping water vapor and other condensable gases at speeds far in excess of
conventional vacuum pumps.
A Telemark Cryochiller couples speed with a sophisticated computer control
package which includes a simple and adaptable user interface with isolated
inputs/outputs and Ethernet comms package as standard. RS232 and RS485
serial communication options are available.
The ranges of tasks to which your Cryochiller can be applied are not limited to
pumping water vapor in vacuum. Many are used as substrate coolers (chuck
coolers) or other applications where a continuous level of high power cooling
o
in the range –100 to –150
c is required.
STANDARDS
The device is compatible in terms of electromagnetic compatibility and safety
standards. Applicable standards:
EMC: DIRECTIVE 2014/30/UE - STANDARD EN 61326-1:2013
LVD: DIRECTIVE 2014/35/EU - STANDARD EN 61010-1:2011
And applicable causes of the standard: EN 378-2:2008
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Revision 1.0.7 October 2018
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