Keithley 7011-S Instruction Manual page 60

Bkd@.Jle
Jumpers
L------- ---------- --'7()0,&p&
7011
General Purpose
M"lti~pr
B~Ckphll?
Figure 4-9
Connecting multiplexer and matrix cards together
Resistivity tests
forces a current through the DUT, and the Model 196
DMh4 measures the voltage across the device. In order
The general test con6gwation shown in Figure 410
can be used to perform resistivity tests on semiccmduc-
tars. Such tests can yield important information such
as doping concentratiOn.
to minimize errors caused by sample loading, the Mod-
d 196
should be used on the 3OOmV or 3V ranges. Also,
resistance values should be 1MQ or less.
As shown in
Figure 410, the Model 7011 switches ten
samples for the test. The Model 7012 Matrix card al-
lows any device test node to be connected to any in-
stmment terminal. The Model 220 Current Source
In order to perform the tests, a current Wmn the Model
220) is applied to two terminals, and the voltage is
measured (by the Model 196) across the two opposite
terminals. A
total
of eight such measumnents are re-
quired, as shown in Figure 411.
4-12