Varian TURBO-V 6000 Instruction Manual
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Varian TURBO-V 6000 Instruction Manual

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Turbo-V 6000
Model 969-9081
Model 969-9082
87-900-838-01(B)
MARCH 2003
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL

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  • Page 1 MANUALE DI ISTRUZIONI Turbo-V 6000 BEDIENUNGSHANDBUCH NOTICE DE MODE D’EMPLOI Model 969-9081 MANUAL DE INSTRUCCIONES Model 969-9082 MANUAL DE INSTRUÇÕES BEDRIJFSHANDLEIDING INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-838-01(B) MARCH 2003...
  • Page 2 Turbo-V 6000...

  • Page 5: Table Of Contents

    ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE....................

  • Page 6: Istruzioni Per L'uso

    Onde evitare problemi di degassamento, non toccare con le mani ed ogni altra informazione addizionale fornita dalla Varian prima nude i componenti destinati ad essere esposti al vuoto. Utilizzare dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata da sempre i guanti o altra protezione adeguata.
  • Page 7 Qualsiasi intervento deve essere eseguito da personale Le pompe turbomolecolari della serie Turbo-V6000 devono essere autorizzato. utilizzate solo con uno degli appositi controllori Varian (serie 969- L’olio di lubrificazione deve essere cambiato ogni sei mesi o 9491, 969-9591) e devono essere collegate ad una pompa prima- quando diventa opaco o di colore scuro.

  • Page 8: Gebrauchsanleitung

    Schäden erleiden. Sie sollte jedoch bis zur Instal- LAGERUNG lation auf der Anlage geschlossen bleiben, um Staubverschmut- zungen zu vermeiden. Um ein Höchstmaß an Effizienz und Zuverlässigkeit der Varian Turbomolekularpumpen zu gewährleisten, sind die folgenden INSTALLATION Anweisungen zu beachten: •...
  • Page 9 Pumpengehäuse unter 50°C abgesunken ist. Gegenflansch anschließen, der ein Drehmoment von 20000 Nm um die eigene Achse aushält. Bei einem Defekt kann der Varian Service oder der " Varian Ad- Turbopumpen mit einem ISO-Eingangsflansch müssen mittels vanced Exchange Service" in Anspruch genommen werden, der doppelten oder einfachen Klemmschellen an die Vakuumkammer Ihnen als Austausch für die beschädigte Pumpe eine general-...

  • Page 10: Mode D'emploi

    Il est conseillé à l'utilisateur de lire attentivement cette notice d'instructions ainsi que toute autre indication supplémentaire four- ATTENTION! nie par Varian, avant d'utiliser l'appareil. Varian décline par consé- quent toute responsabilité en cas d'inobservation totale ou partielle En vue d'éviter tous problèmes de dégazage, ne pas toucher, les des instructions données, d'utilisation incorrecte de la part d'un...
  • Page 11 Avant de renvoyer au constructeur une pompe pour des répara- tage M16 tions ou un "advanced exchange service", remplir et faire parve- nir au bureau local Varian la fiche "Sécurité et Santé" annexée à Collier simple à file- 80 Nm la présente notice d'instructions.

  • Page 12: Instrucciones De Uso

    Varian antes de usar el Utilizar siempre guantes u otra protección adecuada. aparato. Varian se considera libre de posibles responsabilidades...
  • Page 13 Las bombas turbomoleculares de la serie Turbo-V6000 han de cuando se vuelve opaco o de color oscuro. Véase “Technical utilizarse sólo con uno de los controladores Varian específicos Information” para el procedimiento correspondiente. (serie 969-9491, 969-9591) y han de conectarse a una bomba primaria (véase esquema en “Technical Information”).

  • Page 14: Instruções Para O Uso

    Para evitar problemas de perdas de gás, não tocar com as mãos outra informação adicional fornecida pela Varian antes de usar a os componentes destinados à exposição do vácuo. Utilizar aparelhagem.
  • Page 15 Em caso de defeito é possível usufruir do serviço de reparação A turbobomba com flange de entrada ISO, deve ser fixada à Varian ou do "Varian advanced exchange service", que permite câmara de vácuo através de bornes duplos ou simples. A tabela a obter uma bomba regenerada que substitua a bomba com defeito.

  • Page 16: Gebruiksaanwijzingen

    Varian verstrekte informatie door te lezen alvorens componenten die met het vacuüm in aanraking komen niet met de het apparaat in gebruik te nemen. Varian acht zich niet blote handen aangeraakt worden. Gebruik altijd handschoenen of aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht een andere geschikte bescherming.
  • Page 17 De turbomoleculaire pompen van de serie Turbo V6000 mogen alleen hij ondoorzichtig of donker van kleur wordt. Zie “Technical gebruikt worden in combinatie met een van de speciale Varian Information” voor de betreffende procedure. controllers (serie 969-9491, 969-9591) en moeten aangesloten zijn op een primaire pomp (zie schema in "Technical information").

  • Page 18: Brugsanvisning

    For at undgå afgasningsproblemer skal man ikke røre med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hænder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er...
  • Page 19 Se “Technical Information” “Technical Information” for yderligere detaljer. vedrørende fremgangsmåden. Turbomolekulærpumperne i V6000 serien må kun anvendes med en af de særlige Varian kontrolapparater (serie 969-9491, 969- 9591) og skal forbindes med en primær pumpe (se skemaet i ADVARSEL! "Technical Information").

  • Page 20: Bruksanvisning

    Utrustningen är avsedd för yrkesmässig användning. Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som...
  • Page 21 Om pumpen havererar, kontakta Varian reparationsverkstad eller Turbopumpen ISO-intagsfläns fästas Varian utbytesservice, som kan ersätta pumpen med en renoverad vakuumkammaren med hjälp av dubbla eller enkla klamrar. Den pump följande tabellen beskriver olika flänsstorlekar, olika typer av klamrar, nödvändigt antal klamrar och åtdragningsmoment.

  • Page 22: Brukerveiledning

    Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på...
  • Page 23 Smøreoljen må byttes ut hver 6. måned eller når oljen blir matt Turbo-V6000 serien turbo-molekulære pumper må kun brukes eller mørk. Se den spesifikke prosedyren i “Teknisk Informasjon”. med en av de spesielle Varian kontrollere (serie 969-9491, 969- 9591), og må koples til hovedpumpen (se skjema i "Teknisk informasjon").

  • Page 24: Käyttöohjeet

    Jotta kaasun poistumisongelmilta vältyttäisiin, ei tyhjiöön tarkoitet- käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava tuihin osiin tule koskea paljain käsin. Hanskojen tai muun sopivan käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei suojan käyttö on tarpeellinen. ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä...
  • Page 25 Information“-liitteestä. “Technical Information” saatte ohjeet tämän toimenpiteen Sarjan V6000 turbomolekyylipumppuja tulee käyttää ainoastaan suorittamiseen. niihin sopivien varian valvojien kanssa (sarja 969-9491, 969-9591) ja niiden täytyy olla yhdistettyinä pääpumppuun (katso kaaviota osasta "Technical Information"). VAARA! Turbopumppu tulee asentaa pystyasentoon, jolloin Ennen minkään tyyppistä toimenpidettä ottakaa pois päältä...

  • Page 26: Pdhgies Crhsews

    Varian, prin apov th crhsimopoivhsh tmhvmata provkeitai ekteqouvn kenov. thÇ suskeuhvÇ . HVarian den fevrei kammiva euquvnh ovson crhsimopoieivte...
  • Page 27 Se perivptwsh blavbhÇ mporeivte na apeuqunqeivte sto sevrbiÇ mevggenwn. H akovlouqh tampevla perigravfei to aparaivthto episkeuwvn Varian hv sto “Varian advanced exchange service”, pou nouvmero mevggenwn kai me poio zeuvgoÇ bidwvmatoÇ na ta sfivxete.

  • Page 28: Instructions For Use

    Varian before operating the equipment. handle components which will be exposed to vacuum. Always use Varian will not be held responsible for any events occurring due to gloves or other appropriate protection. non-compliance, even partial, with these instructions, improper...
  • Page 29 50 °C. the special Varian controllers (series 969-9491, 969-9591) and must be connected to a primary pump (see "Technical In the case of breakdown, contact your local Varian service center Information"). who can supply a reconditioned pump to replace that broken The turbopump must be installed vertically with a maximum slope down.

  • Page 30: Technical Information

    TECHNICAL INFORMATION During normal operation, the motor is fed with a DESCRIPTION OF THE TURBOPUMP voltage of 100 Vac three-phase at 233 Hz. To re- The Turbo-V6000 pump is available in two models duce losses during start-up to a minimum, the fre- which differ only in the high vacuum flange: quency increases according to a ramp with a higher initial voltage/frequency ratio.

  • Page 31: Technical Specification

    Noise level Foreline flange ISO 100 Input 100 Vac, three phase, 233 Hz Vent port flange KF 10 NW Lubricant type Varian T.A. oil Rotational speed 14000 rpm Lubricant charge 1000 cm Start-up time 30 minutes Storage temperature - 20° C to + 70° C...
  • Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-838-01(B)

  • Page 33: Inlet Screen Installation

    TECHNICAL INFORMATION The following figure shows the overall flange di- INLET SCREEN INSTALLATION mensions with the protection screen fitted on pump with ISO flange. The inlet screens mod. 969-9308 prevents the blades of the pump from being damaged by debris greater than 2 mm diameter.

  • Page 34: Vent Device Installation

    TECHNICAL INFORMATION VENT DEVICE INSTALLATION TYPICAL LAYOUT DIAGRAM The vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary power failure (adjustable time up to 36 min.), and enables an automatic vent operation. Turbo-V controller Assemble the seal ring and lock the vent device in Vent valve position using the KF klamp as shown in the fol-...

  • Page 35: Connection A - High Vacuum Flange

    TECHNICAL INFORMATION Connection A - HIGH VACUUM FLANGE Connection C - ELECTRICAL To connect the Turbo pump to the ISO inlet The turbopump is connected to the controller flange, remove the outer ring and position the cen- through two connectors: a 7-pin connector and a tering ring as shown in the figure.

  • Page 36: Oil Fill

    TECHNICAL INFORMATION OIL FILL WATER COOLING CONNECTION Prior the use of the pump, the oil sump must be The turbopump must be used with the water cool- filled with oil according to the following procedure. ing connected. 1. Remove the screws at the bottom of the pump To connect the water cooling to the turbopump and detach the empty oil sump.

  • Page 37: Pump Used In Presence Of Magnetic Fields

    This effect is strongly dependant from the inten- sity, time function and distribution of the magnetic NOTE field. Do not mix oil; use only Varian T.A. oil. In general, therefore, an increase in pump current ACCESSORIES can be expected. DESCRIPTION...
  • Page 38 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 39 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 40 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...

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