Output Signals - Honeywell SPM Technical Handbook

4.4 Output Signals

Ammonia (NH
Ammonia XP (NH
Arsine (AsH
Arsine XP (AsH
Arsine XP (AsH
Boron Trifluoride (BF
Boron Trifluoride XP (BF
Boron Trifluoride XP (BF
Bromine (Br
CHDI
Chlorine II (Cl
Chlorine III (Cl
Chlorine (Cl
Chlorine XP (Cl
Chlorine XP (Cl
Chlorine Dioxide (ClO
Chlorine Dioxide (ClO
Diborane (B
Diborane XP (B
Dimethyl Amine (DMA)
Dimethyl Amine (DMA) Low Level
Dimethyl Amine XP (DMA)
Disilane (Si
Fluorine (F
Fluorine (F
Germane (GeH
Germane XP (GeH
HDI
HMDI
Hydrazine (N
Hydrazine Low Level (N
Hydrogen Bromide (HBr)
SPM Technical Handbook
Gas Calibration
)
3
)
3
)
3
)
3
) Low Level
3
) Low Level
3
)
3
) Low Level
3
)
2
)
2
)
2
) Low Level
2
)
2
) Low Level
2
)
2
) [on F /Oxidizer CC]
2 2
H )
2 6
H )
2 6
H )
2 6
)
2
) Low Level
2
)
4
)
4
H )
2 4
H )
2 4
SPM Single Point Monitor
Zero LDL**
9.33 mA
4.0 mA 4.56 mA*
0 ppm 2.6 ppm 25.0 ppm
0 ppm 1.5 ppm* 25.0 ppm
0 ppb 15 ppb* 50 ppb
0 ppb 10 ppb* 50 ppb
0 ppb 0.5 ppb 5.0 ppb
0 ppb 67 ppb* 333 ppb
0 ppm 0.1 ppm 1.0 ppm
0 ppb 50 ppb 333 ppb
0 ppb 11 ppb 100 ppb
0 ppb 2 ppb 20 ppb
0 ppm 0.05 ppm 0.5 ppm
0 ppm 0.05 ppm 0.5 ppm
0 ppb 1 ppb 10 ppb
0 ppm 0.05 ppm .050 ppm
0 ppb 4 ppb* 20 ppb
0 ppb 11 ppb 100 ppb
0 ppb 31 ppb* 100 ppb
0 ppb 31 ppb* 100 ppb
0 ppb 11 ppb 100 ppb
0 ppm 1.0 ppm* 5.0 ppm
0 ppm 0.1 ppm* 2.0 ppm
0 ppm 0.5 ppm 5.0 ppm
0 ppm 1.5 ppm* 5.0 ppm
0 ppm 0.11 ppm 1.00 ppm
0 ppm 0.06 ppm 0.33 ppm
0 ppb 141 ppb* 200 ppb
0 ppb 141 ppb* 200 ppb
0 ppb 1 ppb* 20 ppb
0 ppb 2 ppb 20 ppb
0 ppb 20 ppb* 100 ppb
0 ppb 1 ppb 10 ppb
0 ppm 0.3 ppm 3.0 ppm
4-3
14.67 Full Scale
mA 20.0 mA
50.0 ppm 75.0 ppm
50.0 ppm 75.0 ppm
100 ppb 150 ppb
100 ppb 150 ppb
10.0 ppb 15.0 ppb
667 ppb 1000 ppb
2.0 ppm 3.0 ppm
667 ppb 1000 ppb
200 ppb 300 ppb
40 ppb 60 ppb
1.00 ppm 1.50 ppm
1.00 ppm 1.50 ppm
20 ppb 30 ppb
1.00 ppm 1.50 ppm
40 ppb 60 ppb
200 ppb 300 ppb
200 ppb 300 ppb
200 ppb 300 ppb
200 ppb 300 ppb
10.0 ppm 15.0 ppm
4.0 ppm 6.0 ppm
10.0 ppm 50.0 ppm
10.0 ppm 15.0 ppm
2.00 ppm 3.00 ppm
0.67 ppm 1.00 ppm
400 ppb 600 ppb
400 ppb 600 ppb
40 ppb 60 ppb
40 ppb 60 ppb
200 ppb 300 ppb
20 ppb 30 ppb
6.0 ppm 9.0 ppm