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Shutdown
Proceed strictly according to the given order and comply with the given time
NOTICE
data.
Stopping the evacuation process and venting the vacuum vessel:
➨ Close high vacuum valve (V3). In case open venting valve (V4) to vent the vacu-
➨ Switch off diffusion pump.
➨ Keep the backing pump running for another 30 to 45 minutes.
➨ Close fore-vacuum valve (V1).
➨ Switch off backing pump.
+ Attention: Never switch off the backing pump together with the diffusion pump.
Proceeding in accordance with the instructions given above ensures that the diffu-
sion pump is kept under vacuum (no condensate build-up in the pump fluid).
To avoid possible formation of condensate in the pump housing it is advisable to
keep the pump or the pumping system under vacuum even after shutdown.
Accessories
Vacuum gauge DCP 3000 with gauge head VSP 3000 (Pirani) .................................................683190
1*10
- 1*10
mbar, 100-230 V 50-60 Hz
3
-3
Gauge head MPT 200 Penning/Pirani, 1*10
Troubleshooting
+ See manuals of the rotary vane pump and of the diffusion pump.
Maintenance
+ See manuals of the rotary vane pump and of the diffusion pump.
Notes on filling the pump fluid into the diffusion pump:
It is also possible to fill the pump fluid through the valve into the inlet flange of the diffusion pump.
➨ Open valve plate and fill in the pump fluid between cold cap and pump housing (approx. 30 ml).
Documents are only to be used and distributed completely and unchanged. It is strictly the users´ responsibility to check carefully
the validity of this document with respect to his product. Manual-no.: 999069 / 28/04/2016
page 16 of 20
A power failure may cause accidental ventilation of the pumping unit, especially if
the gas ballast valve of the rotary vane pump is open. If this constitutes a poten-
tial source of danger, take appropriate safety measures.
um vessel.
- 5*10
3
mbar ........................................................683177
-9
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