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Pump parts
Position
1
Diffusion pump AX 65
2
Backing pump RZ 2.5
3
Backing pump RZ 6
4
ON/OFF switch diffusion pump
5
ON/OFF switch backing pump
6
Rating plate of pumping unit
7
Connection diagram
8
We reserve the right for technical modification without prior notice!
HP 40B2 / RZ 2.5
14
11
12
10
2
Documents are only to be used and distributed completely and unchanged. It is strictly the users´ responsibility to check carefully
the validity of this document with respect to his product. Manual-no.: 999069 / 28/04/2016
page 11 of 20
Component
Handle
5
15
Position
Component
9
10
11
Fore-vacuum valve V1
12
By-pass valve V2
13
High vacuum valve V3
14
Venting valve V4
Connection for vacuum gauge
15
9
8
Inlet
Outlet
KF DN 10
13
6
1
7
4
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