Subscribe to Our Youtube Channel
Related Manuals for LEYBOLD DRYVAC P Series
Summary of Contents for LEYBOLD DRYVAC P Series
- Page 1 DRYVAC 25/50/100 P Manual GA 01.414/2.02 DRYVAC P Operating Instructions GA 01.414/2.02 - 1/97...
-
Page 2: Table Of Contents
Table 1 of 2.8 Connecting the Exhaust Line ......15 this manual. Contact Leybold before using a DR YVAC for applications and processes which are not listed. Operation ............. 16 3.1 Start-up and Operation ........16 3.2 Shutdown ............ - Page 3 Complete the form at the back of this manual before re- with all safety regulations. Take ad- turning equipment to Leybold for service. This form noti- equate safety precautions before fies us of any toxic or other harmful products (as defined opening the intake or exhaust.
-
Page 4: Description
Section 1 — Description DRYVAC 25/50/100 P Manual Description 1.1 Design and Function The DRYVAC 25P, 50P and 100 P are dry-compression vacuum pumps designed especially for semiconductor etching and CVD processes. Refer to Section 1.2 for technical data. Pump operating principle DRYVACs are four-stage hook-and-claw vacuum pumps. - Page 5 Section 1 — Description DRYVAC 25/50/100 P Manual Key to Figure 2 1 Motor 6 Check valve 2 Pump stages 7 Pressure regulator 3.0 bar 3 Thermostat valve 8 Interstage purge block 4 Exhaust silencer 9 Purge-control plate (reversible) 5 Pressure regulator 1.5 bar Figure 2 Sectional drawing of a DRYVAC 100P GA 01.414/2.02 - 1/97...
- Page 6 Section 1 — Description DRYVAC 25/50/100 P Manual only 100P Dimensions in mm 100P Dimensions in inches 100P h: upper edge of intake port Figure 3 Simplified schematic of the DRYVAC P Figure 4 Dimensional drawing Inert Gas Barrier and Purge Gas Device The exhaust pressure is monitored by two pressure switches.
-
Page 7: Technical Data
Section 1 — Description DRYVAC 25/50/100 P Manual Figure 5 Pumping speed curves 1.2 Technical Data DRYVAC 25P 100P Pumping Speed 50 Hz operation ...... 25 m · h (14.7 cfm) 45 m · h (26.5 cfm) 100 m · h (59 cfm) 60 Hz operation ...... -
Page 8: Standard Equipment
4000 – 5000 † side faces out * Consult you Leybold sales representative to confirm the correct process setting for you application. † Additional DR YVAC modifications may be necessary for these applications. Consult your Leybold sales representative for additional information. -
Page 9: Installation
Section 2 — Installation DRYVAC 25/50/100 P Manual Installation 2.1.2 Converting from ETCH to CVD 2.1 Adapting the Pump Processes to the Process When converting from ETCH to CVD processes (the processes of groups B, C and D in Table 1), follow the procedure in Section 2.1.1;... - Page 10 Section 2 — Installation DRYVAC 25/50/100 P Manual Key to Figure 7 DRYVAC 25/50 P 1 Tube connector 2 Purge-control plate (reversible) 3 Interstage purge block 4 Nozzle 5 3rd pump stage DRYVAC 100 P 6 Interstage purge block 7 Nozzle 8 Purge-control plate (reversible) Figure 6 Conversion of the purge-control plate and exchange of the nozzle for LTO...
-
Page 11: Setting Up The Pump
Section 2 — Installation DRYVAC 25/50/100 P Manual 2.2 Setting up the Pump Eyebolts are provided for lifting and moving the pump. Do not tip or turn the pump during movement. Do not stand beneath the suspended pump during movement. Set the pump on a flat even surface in a dry location. - Page 12 Section 2 — Installation DRYVAC 25/50/100 P Manual Caution Connect the oil-pressure switch so that the pump Do not connect equipment to termi- switches of f when its contact opens (connector X18, nals other the ones listed in the fol- pin 8).
-
Page 13: Ac Power Source
Section 2 — Installation DRYVAC 25/50/100 P Manual Note: All standard DR YVACs are wired for low voltage unless the customer specifies high voltage on the sales order . Figure 8 Fastening screws for the cover Figure 9 AC power source connections 2.3.2 AC Power Source Connect the pump's AC line cord to its rated AC voltage... -
Page 14: Connecting The Cooling Water
3. Briefly switch ON the pump and check whether the motor fan turns counterclockwise; then immediately Note: Special modifications may be required when using turn OFF the pump. deionized (DI) water . Consult your Leybold sales or ser- vice representative for information. GA 01.414/2.02 - 1/97... -
Page 15: Connecting The Inert Gas Supply
4 to 10 bar absolute (43 to 130 psig). Dry lines to a single plenum. Consult your Leybold sales or nitrogen is normally used as the inert gas. service representative. -
Page 16: Operation
Section 3 — Operation DRYVAC 25/50/100 P Manual 3.3 Storing and Shipping 3 Operation Shutdown the pump as described in Section 3.2. 3.1 Start-up and Operation Warnings During operation, the pump's tem- Open the inert gas supply by energizing the solenoid of perature can exceed 100ºC (212ºF). - Page 17 Service by Leybold If you ship a pump to Leybold, be sure to indicate whether the pump is free of substances that could be hazardous to health or if it is contaminated. If it is con- taminated, indicate the nature of the hazard.
-
Page 18: Maintenance
1. Open the four 1/4-turn retaining clips and take of the rear panel. If the pump will be returned to Leybold, it must be accom- 2. Use the Allen key supplied with the silencer and a panied by a listing of all hazardous substances which might 17-mm wrench to unscrew the exhaust silencer (2/4). -
Page 19: Troubleshooting
Section 5 — Troubleshooting DRYVAC 25/50/100 P Manual 5 Troubleshooting Refer- Symptom Possible cause Recommended corrective action ences* 1.1 Pump does not Motor circuit breaker is off. Check setting of motor breaker. Turn ON the 2.3.2 start. breaker. Error in power connection. Check wiring and repair. - Page 20 Section 5 — Troubleshooting DRYVAC 25/50/100 P Manual Refer- Symptom Possible cause Recommended corrective action ences* 3. Exhaust pressure Exhaust line is clogged. Clean the exhaust line. is too high. Exhaust silencer is clogged. Replace the exhaust silencer. The “Warning” pressure switch Exhaust line is too long or too Install a shorter or wider diameter exhaust line.
- Page 21 Section 5 — Troubleshooting DRYVAC 25/50/100 P Manual Refer- Symptom Possible cause Recommended corrective action ences* 7. Pump does not Unsuitable measurement procedure Use correct measurement procedure with proper reach ultimate or measuring instrument. measuring instrument. Check pressure directly at pressure.
-
Page 22: Appendix A - Shutdown For Particulate-Generating Processes
Appendix A DRYVAC 25/50/100 P Manual Appendix A Shutdown for Particulate-Generating Processes The Problem Accelerated Shutdown Procedure In many processes, a DR YVAC may accumulate par- The following procedure accelerates the DR YVAC cool- ticles as it cools during shutdown. Often the DR YVAC is down so that process gases condense and are cleared then dif ficult or impossible to restart. - Page 23 Appendix A DRYVAC 25/50/100 P Manual c. Repeat Steps 5a and 5b a second time. d. Manually rotate the motor fan to check if it turns freely . If you feel any binding as you rotate the fan, repeat Steps 5a and 5b until the motor fans rotates easily .
Need help?
Do you have a question about the DRYVAC P Series and is the answer not in the manual?
Questions and answers