Particle Decontamination - Miele IR 6002 Operating Instructions Manual

Professional cleaning machine
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Areas of application

Particle decontamination

This machine is particularly suitable for
particle decontamination of chip boxes,
wafer trays, semi-finished products,
assembly trays and computer parts.
Cleaning takes place using a water
based process only, using a very small
amount of special cleaning agent and
without the addition of solvents. The
cleaning process for this application
takes place using the highest grade
water only.
Chip boxes, wafer trays etc. are
cleaned using process 1 only
(see"Description of the machine -
Cleaning process").
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