Ulvac CRYO-U 20HL Manuals

Manuals and User Guides for Ulvac CRYO-U 20HL. We have 1 Ulvac CRYO-U 20HL manual available for free PDF download: Instruction Manual

Ulvac CRYO-U 20HL Instruction Manual

Ulvac CRYO-U 20HL Instruction Manual (102 pages)

CRYOPUMP

Brand: Ulvac | Category: Water Pump | Size: 3 MB

Table of Contents

Table of Contents

9
- Safety Instructions
  13
- Disposal Consideration
  25
- SECTION 1 Cryopump Description
  27
- The General
  27
- Cryopump System
  27
- Specifications
  28
- Environmental Requirements
  29
- External Drawing of CRYO-U
  30
- Shipping List for Cryopump System
  33
- Shipping List for Cryopump Assembly
  33
- 2.1 Shipping List
  33
- SECTION 2 Inspection
  33
- 2.2 First Inspection of Cryopump
  34
- SECTION 3 Quick Installation
  35
- Quick Installation
  35
- Quick Installation Process Flow
  36
4. Installation

37
- Auxiliary Equipments Required
  37
- Cryopump Vacuum System
  38
- Example of CRYO-U
  38
- Figure 1-1 Typical CRYO-U
  38
- Installation
  38
- Examples of Cryopump Installation
  39
- Mounting the Cryopump to the Vacuum System
  39
- Connecting Purge Gas Line
  41
- Connecting Roughing Pump
  41
- Connecting Exhaust Pipe
  42
- Pressure Loss of Regeneration Gas Purge PR Unit
  42
- Connecting Cooling Water Pipe
  43
- Connecting Flexible Hoses
  43
- Connecting Electrical Cables
  44
- Connecting Remote Wiring
  44
- Connecting Flexible Hoses
  45
5. Operation

47
- Operation
  48
- Pressure Buildup Test
  48
- Rough Pumping
  48
- Startup and Cooldown
  48
- Normal Operation
  49
- Crossover
  50
- Handling of Hazardous Materials
  52
- Shutdown Procedures
  52
- 7.1 Disconnecting Flexible Hose
  61
- Cryo-U
  61
- Disconnecting Flexible Hose
  62
- Charging Helium Gas
  71
- Cryopump
  80
- Vapor Pressure of Various Kinds of Gas
  92
- Principle of Refrigeration
  93
- Two-Stage Refrigerator
  96
- Major Components
  101

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