MKS 647C Manuals

MKS 647C Manuals

Manuals and User Guides for MKS 647C. We have 1 MKS 647C manual available for free PDF download: Instruction Manual

MKS 647C Instruction Manual

MKS 647C Instruction Manual (57 pages)

Multi Channel Flow Ratio/Pressure Controller

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents

Table of Contents
3
1 General

5
- The Multi Gas Controller (MGC) Type 647C
  5
- CE Conformity
  5
- Options
  6
- Software
  6
- Technical Specifications
  7
- Drawings
  8
  - Front Panel
    8
  - Rear Panel
    9
- Safety Information
  10
  - Symbols Used in this Instruction Manual
    10
  - Safety Instructions
    10
- Installation
  11
  - Powering on
    11
  - Powering off
    11
- Symbols at the Case
  12
- Accessories
  12
- Cables
  13
- Service
  13
2 Operating Instructions

15
- The User Interface
  15
- The Menu Tree
  17
- Reset of System
  18
- Display Adjustment
  18
3 Functionality

19
- The MAIN MENU
  19
- The USER DISPLAY Menu
  19
- The EXTENDED DISPLAY Menu
  20
- The PRESSURE CONTROL Menu
  21
- Tuning the PID Controller
  22
- Diagnosis of System
  24
  - The ERROR LISTING Menu
    24
  - The SIGNALS Menu
    25
- Instrument Setup
  25
  - Range Selection
    26
  - Gas Selection
    27
  - Mode Selection
    28
  - Zero Adjustment
    30
  - Trip Limit Supervision
    31
  - Gas Composition
    32
- System Setup
  33
  - RS232 Setup
    33
- System Parameters
  36
- Pressure Setup
  37
- Information about the System
  38
4 Remote Control

39
- Compatibility
  39
- Command Syntax
  39
- Table of Commands
  40
- Response Syntax
  43
5 Application of the 647C

45
- Mass Flow Controllers
  45
- Trouble Shooting
  46
6 Pin Assignment of Rear Connectors

47
- RS232 Connector
  47
- Service Connector
  47
- RELAYS Connector
  48
- MFC Connector: CH1 to CH8
  49
- PRESSURE Connector
  49
- ACCESS Connector
  50
7 Gas Correction Table

51
- Index
  55

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