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653B
MKS 653B Manuals
Manuals and User Guides for MKS 653B. We have
1
MKS 653B manual available for free PDF download: Manual
MKS 653B Manual (41 pages)
Exhaust Throttle Valve
Brand:
MKS
| Category:
Controller
| Size: 0 MB
Table of Contents
Table of Contents
5
Valve Safety Information
9
Symbols Used in this Instruction Manual
9
Symbols Found on the Unit
10
Table 1: Definition of Symbols Found on the Unit
10
Safety Procedures and Precautions
11
Chapter One: General Information
13
Introduction
13
How this Manual Is Organized
14
Customer Support
14
Chapter Two: Installation
15
How to Unpack the Type 653 Unit
15
Unpacking Checklist
15
Environmental Requirements
16
Setup
16
Choosing a Pressure Controller
17
Flange Types
17
Figure 1: Outline Dimensions of the Motor Driver Assembly
17
ASA Series Flanges
18
Figure 2: Outline Dimensions of an ASA Series Flange
18
Table 2: Size Options for ASA Series Flanges
18
CF Series Flanges
19
Figure 3: Outline Dimensions of a CF Series Flange
19
Table 3: Size Options for CF Series Flanges
19
ISO-NW Series Flanges
20
Figure 4: Outline Dimensions of an ISO-NW Series Flange
20
Table 4: Size Options for ISO-NW Series Flanges
20
JIS Series Flanges
21
Figure 5: Outline Dimensions of a JIS Series Flange
21
Table 5: Size Options for JIS Series Flanges
21
KF Series Flanges
22
Figure 6: Outline Dimensions of a KF Series Flange
22
Table 6: Size Options for KF Series Flanges
22
Interface Cables
23
Table 7: Interface Cables
23
Generic Shielded Cable Description
24
Interface Connector
25
Table 8: Interface Connector Pinout
25
Chapter Three: Operation
27
Theory of Operation
27
General Operation Information
28
Chapter Four: Maintenance
29
General Information
29
Safety Precautions
29
Cleaning the Valve
30
Appendix A: Product Specifications
31
General Specifications
31
Appendix B: ASA Series Flange Specifications
33
Appendix C: ISO-NW Series Flange Specifications
35
Appendix D: CF Series Flange Specifications
37
Appendix E: JIS Series Flange Specifications
39
Index
41
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