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649A
User Manuals: MKS 649A Compact Pressure Controller
Manuals and User Guides for MKS 649A Compact Pressure Controller. We have
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MKS 649A Compact Pressure Controller manual available for free PDF download: Instruction Manual
MKS 649A Instruction Manual (76 pages)
Pressure Controller with an Integral Mass Flow Meter
Brand:
MKS
| Category:
Controller
| Size: 0 MB
Table of Contents
Table of Contents
5
Safety Information
13
Symbols Used in this Instruction Manual
13
Symbols Found on the Unit
14
Table 1: Definition of Symbols Found on the Unit
14
Chapter One: General Information
17
Introduction
17
Design Features of the Integral Mass Flow Meter
17
Cleanliness Features
18
How this Manual Is Organized
18
Manual Conventions
18
Customer Support
19
Chapter Two: Installation
21
How to Unpack the Type 649 Unit
21
Opening the Package
21
Unpacking Checklist
22
Interface Cables
23
Generic Shielded Cable Description
23
Product Location and Requirements
24
Dimensions
25
Front and Back Views
25
Figure 1: Front View of the Type 649 Controller
25
Side View
26
Figure 2: Back View of the Type 649 Controller
26
Figure 3: Side View (Inlet) of the Type 649 Controller
26
Bottom View
27
Figure 4: Bottom View of the Type 649 Controller
27
Setup
28
Fittings
28
Mounting Hardware
28
Gas Pressure
28
Installing the Unit
29
Figure 5: Downstream Pressure Control
29
Electrical Information
30
I/O Connector
30
Table 2: I/O Connector Pinout
30
Initial Configuration
32
Table 3: Initial Configuration
32
Chapter Three: Overview
33
General Information
33
Pressure Control Range
33
Figure 6: Top View of the Type 649 Controller
33
Flow Range
34
A Typical Control System
34
Figure 7: Location of the Mass Flow Meter Adjustments
34
How the 649 Pressure Controller Works
35
Flow Measurement Overview
36
Flow Path
36
Measurement Technique
36
Tuning the 649 Pressure Controller
37
Proportional Term
37
Figure 8: Effects of the Proportional Control
37
Integral Term
38
Figure 9: Effects of the Integral Control
38
Tuning the 649 Controller
39
Figure 10: Controller Response with Initial P Term and I Term Values
39
Figure 11: Controller Response with Increased P Term
40
Figure 12: Controller Response with Increased I Term
40
Priority of Commands
41
Trip Points
42
Action of the Trip Points
42
Applications with a Large Differential Pressure
43
Labels
43
Figure 13: Serial Number Label
43
The Gas Correction Factor (GCF) for Flow Metering
44
Chapter Four: Operation
45
How to Check the Pressure Transducer Zero
45
How to Adjust the Pressure Transducer Span
46
Table 4: Highest Pressure for Zero Adjustment of the Pressure Transducer
46
How to Zero the Integral Mass Flow Meter
47
How to Tune the 649 Controller
48
How to Adjust the Trip Point Values
49
How to Select the Trip Point Action
50
Figure 14: Jumper Positions on the Transducer Board
51
How to Use Trip Points as Error Indicators
52
How to Change the Pressure Output Signal Range
53
Chapter Five: Maintenance
55
General Information
55
Zero Adjustment
55
Appendix A: Product Specifications
57
Performance Specifications
57
Physical Specifications
58
Environmental Specifications
59
Trip Point Specifications
59
Appendix B: Model Code Explanation
61
Model Code
61
Appendix C: Valve Orifice Selection
65
General Information
65
Checking the Valve Orifice Size
65
Table 5: Valve Orifice Size
65
How to Verify the Orifice Selection
66
Table 6: Valve Orifice Index Number
66
Figure 15: Flow Range Selection
67
Using Different Gases
68
Appendix D: Gas Correction Factors
71
Index
75
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