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MKS 640A/641A Pressure Controller Manuals
Manuals and User Guides for MKS 640A/641A Pressure Controller. We have
1
MKS 640A/641A Pressure Controller manual available for free PDF download: Manual
MKS
640A/641A
Manual
MKS 640A/641A Manual (88 pages)
Pressure Controller
Brand:
MKS
| Category:
Controller
| Size: 0 MB
Table of Contents
Table of Contents
6
Pressure Transducer Safety Information
14
Symbols Used in this Instruction Manual
14
Symbols Found on the Unit
15
Table 1: Definition of Symbols Found on the Unit
15
Safety Procedures and Precautions
16
Chapter One: General Information
18
Introduction
18
How this Manual Is Organized
19
Manual Conventions
19
Customer Support
20
Chapter Two: Installation
22
How to Unpack the 640 Series Controller
22
Unpacking Checklist
22
Product Location and Requirements
23
Interface Cables
24
Table 2: Interface Cables
24
Generic Shielded Cable Description
25
The I/O Connector
26
Table 7: I/O Connector Pinout
26
Gas Pressure and Control
28
Pressure Limits
28
Installing the Unit
28
Figure 1: Downstream Pressure Control
29
Figure 2: Upstream Pressure Control
29
Dimensions
30
Side Port Version
30
Figure 7: Front and Back Views of the Side Port 640 Series Controller
30
Table 3: Fitting Dimension
30
Figure 8: Side View of the 640 Series Controller
31
Down Port Version
32
Figure 3: Top View of the down Port Type 640 Controller
32
Figure 4: Front and Side View of the down Port Type 640
32
Figure 5: Bottom View of the down Port 640
33
Figure 6: Bottom View of the down Port Seals
33
Side Port Controller Mounting Instructions
34
Fittings
34
Mounting Hardware
34
Figure 9: Bottom View of the Side Port 640 Series Controller
34
Down Port Controller Mounting Instructions
35
Table 4: SEMI Specifications for down Port Fitting Options
35
How to Connect the C-Seal Fittings
36
Table 5: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers)
36
Table 6: 0.445 Inch Diameter C-Seal Retainer
36
Figure 10: Exploded View of the C-Seal Components
37
Figure 11: Exploded View of the W-Seal Components
39
How to Connect the W-Seal (SEMI 2878.3) Fittings
39
Figure 12: Exploded View of the Z-Seal Components
41
How to Connect the Z-Seal (SEMI 2878.2) Fittings
41
Initial Configuration
44
Table 8: Initial Configuration
44
Chapter Three: Overview
46
General Information
46
Pressure Control Range
46
Figure 13: Top View of the 640 Series Controller
46
A Typical Control System
47
How the 640 Series Pressure Controller Works
48
Figure 14: Sample Pressure Control System
48
Tuning the 640 Series Pressure Controller
49
Proportional Term
49
Figure 15: Effects of the Proportional Control
49
Integral Term
50
Figure 16: Effects of the Integral Control
50
Tuning the 640 Controller
51
Figure 17: Controller Response with Initial P Term and I Term Values
51
Figure 18: Controller Response with Increased P Term
52
Figure 19: Controller Response with Increased I Term
52
Priority of Commands
53
Trip Points
54
Action of the Trip Points
54
Applications with a Large Differential Pressure
55
Labels
55
Figure 20: Serial Number Label
55
Chapter Four: Operation
56
How to Check the Zero
56
How to Zero a Type 640 (Absolute) Unit
56
How to Zero a Type 641 (Gage) Unit
57
Table 9: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer
57
How to Adjust the Span
58
How to Tune the 640 Series Controller
58
How to Adjust the Trip Point Values
59
How to Select the Trip Point Action
60
Figure 21: Jumper Positions on the Transducer Board
60
How to Use Trip Points as Error Indicators
62
How to Change the Pressure Output Signal Range
63
How to Select Upstream Control
64
Figure 22: Jumper Positions on the Control Board
64
Appendix A: Product Specifications
66
Performance Specifications
66
Environmental Specifications
67
Trip Point Specifications
67
Physical Specifications
68
Appendix B: Valve Orifice Selection
70
General Information
70
Checking the Orifice Size
70
Figure 23: Model Code Explanation
70
Table 10: Orifice Size
70
How to Verify the Orifice Selection
71
Table 11: Valve Orifice Index Number
71
Figure 24: Flow Range Selection
72
Using Different Gases
73
Appendix C: Gas Density Table
76
Appendix D: Model Code Explanation
80
Model Code Description
80
Table 12: Pressure Range Selection
81
Table 13: Fitting Type Selection
81
Table 14: Valve Type
82
Table 15: Seal Material Selection
82
Table 16: Valve Orifice Size Selection
83
Table 17: Trip Point Model Code Entry
83
Table 18: Valve Plug Material
84
Index
86
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