MKS 647B Manuals

MKS 647B Manuals

Manuals and User Guides for MKS 647B. We have 1 MKS 647B manual available for free PDF download: Instruction Manual

MKS 647B Instruction Manual

MKS 647B Instruction Manual (56 pages)

Multi Channel Flow Ratio/Pressure Controller

Brand: MKS | Category: Controller | Size: 3 MB

Table of Contents

Table of Contents
4
1 General

6
- The Multi Gas Controller (MGC) Type 647B
  6
- CE Conformity
  6
- Options
  6
- Software
  6
- Technical Specifications
  7
- Drawings
  8
  - Front Panel
    8
  - Rear Panel
    9
- Safety Information
  10
  - Symbols Used in this Instruction Manual
    10
  - Safety Instructions
    11
- Installation
  11
- Symbols at the Case
  12
- Accessories
  12
- Cables
  12
- Service
  12
2 Operating Instructions

13
- The User Interface
  13
- The Menu Tree
  14
- Reset of System
  15
- Display Adjustment
  15
3 Functionality

16
- The MAIN MENU
  16
- The USER DISPLAY Menu
  16
- The EXTENDED DISPLAY Menu
  17
- The PRESSURE CONTROL Menu
  18
- Tuning the PID Controller
  18
- Diagnosis of System
  20
  - The ERROR LISTING Menu
    20
  - The SIGNALS Menu
    21
- Instrument Setup
  21
  - Range Selection
    22
  - Gas Selection
    23
  - Mode Selection
    24
  - Zero Adjustment
    26
  - Trip Limit Supervision
    27
  - Gas Composition
    28
- System Setup
  29
  - IEEE 488 Setup
    29
  - RS232 Setup
    31
- System Parameters
  34
- Pressure Setup
  35
- Information about the System
  36
4 Remote Control

36
- Compatibility
  36
- Command Syntax
  37
- Table of Commands
  38
5 Application of the 647B

43
- Mass Flow Controllers
  43
- Trouble Shooting
  44
6 Pin Assignment of Rear Connectors

45
- RS232 Connector
  45
- IEEE 488 Connector
  45
- RELAYS Connector
  46
- VIDEO Connector
  47
- MFC Connector: CH1 to CH8
  47
- ACCESS Connector
  48
- PRESSURE Connector
  48
7 Gas Correction Table

49
- Index
  53

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