MKS 641B Manuals

Manuals and User Guides for MKS 641B. We have 1 MKS 641B manual available for free PDF download: Instruction Manual

MKS 641B Instruction Manual (84 pages)

Brand: MKS | Category: Controller | Size: 0 MB

Table of Contents
5
Pressure Transducer Safety Information
13
Symbols Used in this Instruction Manual
13
Symbols Found on the Unit
14
Table 1: Definition of Symbols Found on the Unit
14
Safety Procedures and Precautions
15
Chapter One: General Information
17
Introduction
17
How this Manual Is Organized
18
Manual Conventions
18
Customer Support
19
Chapter Two: Installation
21
How to Unpack the 640B Series Controller
21
Unpacking Checklist
21
Product Location and Requirements
22
Interface Cables
23
Table 2: Interface Cables
23
Generic Shielded Cable Description
24
The I/O Connector
25
Table 3: I/O Connector Pinout
25
Gas Pressure and Control
27
Pressure Limits
27
Installing the Unit
27
Figure 1: Downstream Pressure Control
28
Figure 2: Upstream Pressure Control
28
Dimensions
29
Side Port Version
29
Figure 3: Front and Back Views of the Side Port 640B Series Controller
29
Table 4: Fitting Dimension
29
Figure 4: Side View of the 640B Series Controller
30
Down Port Version
31
Figure 5: Top View of the down Port Type 640B Controller
31
Figure 6: Front and Side View of the down Port Type 640
31
Figure 7: Bottom View of the down Port 640
32
Figure 8: Bottom View of the down Port Seals
32
Side Port Controller Mounting Instructions
33
Fittings
33
Mounting Hardware
33
Figure 9: Bottom View of the Side Port 640B Series Controller
33
Down Port Controller Mounting Instructions
34
Table 5: SEMI Specifications for down Port Fitting Options
34
How to Connect the C-Seal Fittings
35
Table 6: SEMI 2787.1 C-Seal Retainer (EG&G Part Numbers)
35
Table 7: 0.445 Inch Diameter C-Seal Retainer
35
Figure 10: Exploded View of the C-Seal Components
36
How to Connect the W-Seal (SEMI 2878.3) Fittings
38
Figure 11: Exploded View of the W-Seal Components
38
Initial Configuration
40
Table 8: Initial Configuration
40
Chapter Three: Overview
43
General Information
43
Pressure Control Range
43
Figure 12: Top View of the 640B Series Controller
43
A Typical Control System
44
How the 640B Series Pressure Controller Works
45
Figure 13: Sample Pressure Control System
45
Tuning the 640B Series Pressure Controller
46
Proportional Term
46
Figure 14: Effects of the Proportional Control
46
Integral Term
47
Figure 15: Effects of the Integral Control
47
Tuning the 640B Controller
48
Figure 16: Controller Response with Initial P Term and I Term Values
48
Figure 17: Controller Response with Increased P Term
49
Figure 18: Controller Response with Increased I Term
49
Priority of Commands
50
Trip Points
51
Action of the Trip Points
51
Applications with a Large Differential Pressure
52
Labels
52
Figure 19: Serial Number Label
52
Chapter Four: Operation
53
How to Check the Zero
53
How to Zero a Type 640B (Absolute) Unit
53
How to Zero a Type 641 (Gage) Unit
54
Table 9: Highest Pressure Suggested for Zero Adjustment of an Absolute Transducer
54
How to Adjust the Span
55
How to Tune the 640B Series Controller
55
How to Adjust the Trip Point Values
56
How to Select the Trip Point Action
57
Figure 20: Jumper Positions on the Transducer Board
57
How to Use Trip Points as Error Indicators
59
How to Change the Pressure Output Signal Range
60
How to Select Upstream Control
61
Figure 21: Switch Settings on the Control Board
61
Appendix A: Product Specifications
63
Performance Specifications
63
Environmental Specifications
64
Trip Point Specifications
64
Physical Specifications
65
Appendix B: Valve Orifice Selection
67
General Information
67
Checking the Orifice Size
67
Table 10: Orifice Size
67
How to Verify the Orifice Selection
68
Table 11: Valve Orifice Index Number
68
Using Different Gases
70
Appendix C: Gas Density Table
71
Appendix D: Model Code Explanation
75
Model Code Description
75
Figure 22: Model Code Explanation
76
Table 12: Pressure Range Selection
76
Table 13: Fitting Type Selection
76
Table 14: Valve Type
77
Table 15: Seal Material Selection
77
Table 16: Valve Orifice Size Selection
78
Table 17: Trip Point Model Code Entry
78
Table 18: Valve Plug Material
79
Index
81

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MKS 641B Instruction Manual (84 pages)

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