Anest Iwata ISP-250C Instruction Manual page 7

For safe operation
Danger of exceeding permissible
temperature of intake gas
If intake gas temperature is over 50℃, be
sure to install a chiller or trap between
B e w a r e
vacuum pump and vacuum chamber so
t e m p e r a t u r e
that gas intake temperature of vacuum
pump keeps below 50℃. If not, vacuum
o f i n t a k e g a s
pump temperature can increase, resulting
in failure.
Danger of exceeding permissible
intake gas volume
When sending N
air-flush port, pressure should be the
same as atmospheric pressure and flow
Beware of intake
rate should be less than 10NL/min. If not,
gas volume
it can increase pressure inside vacuum
pump, resulting in failure.
CAUTION
exhausting vapor
gas or dry air into
2
opening air-flush
-5-
Danger of insufficient vapor
exhaust
After evacuating vapor, do air-flush
operation for at least one hour. If you close
air-flush port or stop vacuum pump soon
Caution after
after evacuating vapor, condensed water
will remain inside vacuum pump which will
cause failure.
Danger of remaining moisture
When evacuating moisture, be sure to
open air-flush port (air-flush operation). If
you evacuate vapor while air-flush port is
closed, condensed moisture will remain
Operate while
inside vacuum pump and cause failure.
port