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OLS5100-SAF
OLS5100-SMF
OLS5100-LAF
Instructions
OLS5100-EAF
OLS5100-HSU
OLS5100
3D Measuring Laser Microscope
Hardware
Notes
This instruction manual is for the Evident 3D Measuring Laser Microscope.
To ensure safety, obtain optimum performance and to familiarize yourself fully with the use
of this product, we recommend that you study this manual thoroughly before operating
this product, and always keep this manual at hand when operating this product.
Retain this instruction manual in an easily accessible place near the work desk for future
reference.
For details of products included in the configuration of this microscope, see pages from
Optical Microscope and Accessory
23 to 27.
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Table of Contents
Related Manuals for Evident OLS5100
Summary of Contents for Evident OLS5100
- Page 1 Hardware Notes This instruction manual is for the Evident 3D Measuring Laser Microscope. To ensure safety, obtain optimum performance and to familiarize yourself fully with the use of this product, we recommend that you study this manual thoroughly before operating this product, and always keep this manual at hand when operating this product.
- Page 2 In accordance with European Directive on Waste Electrical and Electronic Equipment, this symbol indicates that the product must not be disposed of as unsorted municipal waste, but should be collected separately. Refer to your local Evident distributor in EU for return and/or collection systems available in your country. Research Use Only This product is categorized as FCC Part15 Class A exempt device.
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Page 3: Table Of Contents
4 OLS5000 surface detection filter for transparent film ..................16 5 Stitching ........................................16 6 USB license key ..................................... 16 1 Before use ..............................17 1-1 Outline of OLS5100 ............................17 1-1-1 Principle ....................................... 17 1-1-2 System configuration ................................21 1-1-3 Block diagram ....................................23 1-2 Nomenclature and functions of units ................... - Page 4 2-13 External dimension and required space ................43 2-13-1 OLS5100-SAF, OLS5100-SMF ............................43 2-13-2 OLS5100-EAF ....................................44 2-13-3 OLS5100-LAF ....................................45 2-13-4 Scan unit ......................................46 2-13-5 Microscope control box ..............................46 2-14 Power consumption ..........................47 3 Guarantee..............................48 3-1 Guarantee period ............................48 3-2 Guarantee range .............................
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Page 5: Introduction
Data Acquisition OLS5100 instruction manual Image view, image measurement analysis, image management and Analysis reports OLS5100 Quick Reference Guide Simple operations of the microscope OLS5100 instruction manual Operations of the experiment total assist* Experiment Total Assist You can view the instruction manual “Data Acquisition”, “Analysis” or “Experiment Total Assist" in PDF format by selecting the corresponding menu from the [Help] menu of the data acquisition application, the analysis application or the experiment total assist application*. -
Page 6: Safety Precautions
Always use the product according to this instruction manual. <Applicable user of this instruction manual> This instruction manual applies to users of this product and Evident distributors. The following symbols are used in this instruction manual. - Page 7 It would cause fire, electric shock or failure of this product. When an event like this occurs, set the power of this product to OFF immediately and contact Evident for assistance. · Do not carry the scan unit by hand. It may be damaged as it is a very delicate product.
- Page 8 CAUTION - Electric safety - Always use the power cord provided by Evident. If the proper AC adapter and the power cord are not used, the electric safety and the EMC (Electro-Magnetic Compatibility) performance of the product cannot be assured. If no power cord is provided, please select the proper power cord by referring to the section “Proper selection of the power cord”...
- Page 9 OFF side.) Indicates that the seesaw type main switch is OFF. Indicates a potential fire hazard; be sure to use the designated fuse for replacement. When the caution labels are dirty or peeled off, contact Evident for replacement or inquiries.
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Page 10: Caution Labels
Caution labels The cautions are displayed on the portions which require special cautions during use and operation. Be sure to follow these instructions. Laser caution and class indication Label: Label position: Right side of microscope Label position:... - Page 11 Caution for pinching Label Label position: Right side of revolving nosepiece and right side of jack For OLS5100-LAF, three types of labels shown below are attached to the 300-mm motorized stage. Label: Label position: Near X-axis and Y-axis knobs Label: Label position: When the aluminum plate is removed from the stage top surface.
- Page 12 12. Otherwise, a failure may be caused. · Do not pull cables. · Do not stretch cables when using the product. · OLS5100-LAF is equipped with the emergency stop device for the motorized stage to secure the safety. (Option for OLS5100-SAF or OLS5100-EAF) Emergency stop device If an unexpected event should occur, this switch is used to forcibly stop supplying the power to the motor driver of the stage controller to minimize damage to human bodies or properties.
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Page 13: Power Cord
IEC61010-1 and Safety electrical code of your country. · For the monitor, use the power cord of the Evident DSX-UYCP series. · To secure electrical safety, plug the power cords into 3-core outlets with grounds. If the outlet is not grounded, the electric safety performance intended by Evident cannot be assured. -
Page 14: Handling Precautions
· Microsoft Windows has been installed on the controller of this product. · Be sure to back up the system data by yourself and keep it carefully. (Evident does not support the backup of your system data). - Page 15 · If you replace the controller with a newly purchased controller, its operation will not be ensured. · Evident does not support your connecting to a LAN. If you would like to connect this product to a LAN, you need to connect it yourself.
- Page 16 · Place whose environment could affect the human body (e.g., a restricted area) · When using OLS5100-SAF or OLS5100-EAF, do not touch the slide board of the stage with bare hand or do not apply foreign substances, such as oil, grease, etc. on it. Otherwise, the stage could be damaged.
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Page 17: Maintenance And Storage
Adjust the air pressure as needed. For adjustment method, refer to the instruction manual provided with the anti-vibration table. · To maintain accuracy, it is recommended to perform the Evident periodical check service (for checking accuracy, calibration, functionality, etc.) once or twice a year. This service is also recommended when moving the product. - Page 18 · The assembly and setup of this product is performed by dedicated engineers. Do not repair or move NOTE the product by yourself. If you want to move the product, contact Evident for assistance. If the product is repaired or moved by yourself, Evident shall not be liable for any consequence even if the product malfunctions or is damaged.
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Page 19: Sample That May Prevent You From Obtaining Appropriate Images
OLS5100 Application · The delivery package of this product includes the DVD that contains the applications. Use the DVD for the following cases. · If you need to reinstall the application due to some failures or other factors: · If you install the analysis application on PC: (For the analysis application, see "6 USB license key"... -
Page 20: Extended Frame
2 Extended frame · When the height adjustment block is attached to or removed from the microscope frame, adjust the stage angle. 3 Replacing the objective · When the objectives are replaced, register the objective information to the system in the Maintenance Tool. 4 OLS5000 surface detection filter for transparent film ·... -
Page 21: Before Use
1-1 Outline of OLS5100 1-1-1 Principle Configuration overview The 3D measuring laser microscope OLS5100 is equipped with 2 types of optical systems: color imaging optical system and laser confocal optical system. Laser confocal optical system Color imaging optical system... - Page 22 (Confocal image) XY scanner Note: XY scanner The Evident original optical scanner is installed on OLS5100. The electromagnetic induction type MEMS resonant scanner is used for the Incoming X-axis and the Galvano scanner is used for the Y-axis. These two axes are beam integrally configured.
- Page 23 Similarly, the data where the peak intensity is imaged becomes the image where all positions on the sample surface are in focus (Extended image). OLS5100 uses the analysis application to perform various measurements and analysis based on the height data, extended image and color image acquired by the color imaging optical system.
- Page 24 Therefore, in order to perform the precise measurement in height direction, it is recommended to use the objective with larger numerical aperture (N.A.). With OLS5100, the approximate relation between the numerical aperture (N.A.) and the I-Z curve is shown below. NA0.45 NA0.95...
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Page 25: System Configuration
Motorized stage Advanced analysis OLS5100-EAF package application application Scan unit Objective Motorized stage Controller Extended frame Monitor Joystick Height adjustment block Microscope OLS5100-HSU Control box Scan unit Objective Data acquisition application Analysis application 1-1 Outline of OLS5100... - Page 26 · Controller Commercially-available PC where the expansion board dedicated to OLS5100 is built in. · Data acquisition application This application observes the sample and acquires the image/measurement data by using the OLS5100 3D measuring laser microscope. · Analysis application This application displays, measures, analyzes, creates the report and manages the data acquired by the data acquisition application.
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Page 27: Block Diagram
OLS5100 1-1-3 Block diagram OLS5100-SAF OLS5100-SAF is categorized as an optical microscope. 1-1 Outline of OLS5100... - Page 28 OLS5100-SMF OLS5100-SMF is categorized as an optical microscope. 1-1 Outline of OLS5100...
- Page 29 OLS5100 OLS5100-LAF OLS5100-LAF is categorized as an optical microscope. 1-1 Outline of OLS5100...
- Page 30 OLS5100-EAF OLS5100-EAF is categorized as an optical microscope. 1-1 Outline of OLS5100...
- Page 31 OLS5100 OLS5100-HSU * A stage is not provided with OLS5100-HSU. Please provide one yourself. OLS5100-HSU is categorized as an optical microscope. 1-1 Outline of OLS5100...
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Page 32: Nomenclature And Functions Of Units
1-2 Nomenclature and functions of units 1-2-1 Microscope (OLS5100-SAF) Right side and front side Left side POWER LED Scan unit Turns ON (in green) when the power of the system The image observation optical systems are installed. is ON. Polarizer selection lever LASER LED Selects IN/OUT of the polarizer. -
Page 33: Microscope (Ols5100-Smf)
OLS5100 1-2-2 Microscope (OLS5100-SMF) Right side and front side Left side POWER LED Scan unit Turns ON (in green) when the power of the system The image observation optical systems are installed. is ON. Polarizer selection lever LASER LED Selects IN/OUT of the polarizer. -
Page 34: Microscope (Ols5100-Laf)
1-2-3 Microscope (OLS5100-LAF) Right side and front side Left side POWER LED Coarse focusing knob Turns ON (in green) when the power of the system Moves the motorized stage vertically to bring the is ON. sample into focus approximately. LASER LED Fine focusing knob Turns ON (in blue) when the laser beam is irradiated. -
Page 35: Microscope (Ols5100-Eaf)
OLS5100 1-2-4 Microscope (OLS5100-EAF) Right side and front side POWER LED Slider insertion slot Turns ON (in green) when the power of the system Slot used for the OLS5000 surface detection filter is ON. for transparent film OLS50-QWP (option) or the DIC slider U-DICR (option). -
Page 36: Microscope (Ols5100-Hsu)
1-2-5 Microscope (OLS5100-HSU) Right side and front side POWER LED Scan unit Turns ON (in green) when the power of the system The image observation optical systems are installed. is ON. Polarizer selection lever LASER LED Selects IN/OUT of the polarizer. - Page 37 Connects to the motorized stage using the XY encoder cable. (OLS5100-SAF or OLS5100-EAF only) STAGE CONTROL connector Connects to the STAGE CONTROL slot B using the serial cable. (OLS5100-SAF or OLS5100-EAF only) JOYSTICK connector Connects to the joystick. (OLS5100-SAF or OLS5100-EAF only) EMERGENCY connector Connects to the emergency stop device.
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Page 38: Specifications
LCPLFLN20XLCD LCPLFLN50XLCD LCPLFLN100XLCD MPLFLN2.5X SLMPLN20X SLMPLN50X SLMPLN100X * Objective provided with the microscope For specifications of objectives, see "2-5 Objective" (page 37) or “1-6 Specifications and major purposes of OLS5100 objectives” in the instruction manual “Data Acquisition”. 2-1 System configuration... -
Page 39: Microscope
OLS5100 2-2 Microscope Item Specifications Microscopy method Image acquired by the reflection type confocal laser microscope Image acquired by the reflection type confocal laser DIC microscope (Laser-DIC) Color image Color DIC image Field number Optical zoom function 1.0X, 1.2X, 1.4X, 2X, 3X, 4X and 8X (for laser observation only) Field size When using 2.5X objective: 5.12 to 0.64 mm... -
Page 40: Xy Stage
0.120 mm (full stroke) Rotational stage is provided (Weight: 1.7 kg, Stage thickness: 14.5 mm) Joystick is provided Emergency stop button terminal 2-4 Frame Specifications Item OLS5100-SAF OLS5100-SMF OLS5100-EAF OLS5100-LAF Observable sample height 0 to 100 mm 0 to 40 mm... -
Page 41: Objective
OLS5100 2-5 Objective 2-5 Objective... -
Page 42: Accuracy Assurance
2-6 Accuracy assurance 2-6 Accuracy assurance... -
Page 43: Data Acquisition Mode
OLS5100 2-7 Data acquisition mode Item Specifications 3D shape data acquisition Fine Standard Fast Quick preview Z skip HDR scan Step Line profile data acquisition Single line data Film thickness data Film thickness data by single line layer acquisition Plane film thickness data acquisition Snapshot A single image acquired by color and/or laser observation can be saved. -
Page 44: Options
OLS50-QWP polarization characteristics. fixing mechanism (screws are fixed) This product can be used with OLS5000 and OLS5100. · Provided with rotation index sticker DIC prism Used for DIC observation. – U-DICR LWD objective for LEXT only See “1-6 Specifications and major... -
Page 45: Weight
Experiment total assist software the results for analyzing trends. You can display – OLS51-S-ETA multiple image data side by side, and correct and analyze the image at a time. SU-DRV_ROBO Cable for OLS5100-HSU – CBLR-DSC5 SU-DRV, 5 m Cable for OLS5100-HSU – CBL-DSC5... -
Page 46: Environment
2-12 Environment Item Specifications Installation environment Ambient temperature: 0 to 40 °C (32 to 104 °F) Humidity:30 to 85% (without condensation) Operating environment · Indoor use · Altitude: Max. 2000 meters · Ambient temperature: 15 to 30°C (59 to 86 °F) ·... -
Page 47: External Dimension And Required Space
OLS5100 2-13 External dimension and required space 2-13-1 OLS5100-SAF, OLS5100-SMF Required space Unit: mm 1750 External dimension of OLS5100-SAF External dimension of OLS5100-SMF 2-13 External dimension and required space... -
Page 48: Ols5100-Eaf
2-13-2 OLS5100-EAF Required space Unit: mm 1750 External dimension of OLS5100-EAF 2-13 External dimension and required space... -
Page 49: Ols5100-Laf
OLS5100 2-13-3 OLS5100-LAF Required space Unit: mm 2030 External dimension of OLS5100-LAF 2-13 External dimension and required space... -
Page 50: Scan Unit
2-13-4 Scan unit Unit: mm 2-13-5 Microscope control box Unit: mm 2-13 External dimension and required space... -
Page 51: Power Consumption
OLS5100 2-14 Power consumption This product requires 15 A capacity outlets in one circuit.(for a 100 V system). Check the capacity of outlets to be used before connecting each unit to them. For a 100 V system 300 mm stage... -
Page 52: Guarantee
· A failure or damage caused by using in an inappropriate environment (such as an atmosphere of a toxic chemical and a place where water is sprayed). Evident shall have no liability for any loss, lost profits or others caused by a failure of this product, repairs by a third party that Evident has not specified, or other factors. -
Page 53: Proper Selection Of The Power Supply Cord
If no power supply cord is provided, please select the proper power supply cord for the equipment by referring to “Specifications” and “Certified Cord” below: Caution : In case you use a non-approved power supply cord for Evident products, Evident can no longer warrant the electrical safety of the equipment. - Page 54 Table 2 HAR flexible cord Approval organizations and cordage harmonization marking methods Alternative marking utilizing Printed or embossed black-red-yellow thread (Length harmonization marking (May be of color section in mm) Approval organization located on jacket or insulation of internal wiring) Black Yellow Comite Electrotechnique Belge...
- Page 55 MEMO...
- Page 56 Distributed by Evident Europe GmbH Caffamacherreihe 8-10, 20355 Hamburg, Germany Evident Europe GmbH – UK Branch Part 2nd Floor Part A, Endeavour House, Coopers End Road, Stansted CM24 1AL, UK Evident Scientific, Inc. 48 Woerd Ave, Waltham, MA 02453, USA Evident Scientific Singapore PTE.
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