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Matsusada Precision HECD Series Instruction Manual

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Instruction Manual
HECD series
MODEL
*284.9.001*
B/N：284.9.001
Rev 0.9
F-RA-001-3R4

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Summary of Contents for Matsusada Precision HECD Series

  • Page 1 Instruction Manual HECD series MODEL *284.9.001* B/N：284.9.001 Rev 0.9 F-RA-001-3R4...
  • Page 2 • No patent liability is assumed with respect to the use of the information contained herein. Moreover, because Matsusada Precision Inc. is constantly striving to improve its high- quality products, the information contained in this manual is subject to change without notice.

  • Page 3: For Safe Use Of The Product

    Bistable push button switch for preventing electric shock) Indicates the possible danger of death if you Bistable push button switch drink it and burns or blindness if it attaches. Indicates the possible danger of exposure to Alternative Current radiation. HECD series...
  • Page 4 ◆ Do not process or damage power cables It may result in electric shock or fire. ◆ Regarding the input voltage Check the page describing the input terminals and input voltage in the instruction manual. Do not provide any voltage out of the specifications. HECD series...
  • Page 5 In order to avoid electric shock, ground the terminals to discharge using a short-circuit grounding apparatus and check the voltage again. The terminals here mean all terminals like input and output terminals and terminals for communications and remote controls. HECD series...
  • Page 6 It requires to be replaced at regular intervals to extend the lifetime. For the replacement, contact us. (It requires a replacement charge separately. Do not replace it by yourself, as there is a risk of electric shock.) HECD series...

  • Page 7: Table Of Contents

    6-1-14 Displaying MAC Address/Setting DHCP ..........................18 6-1-15 Setting IP address/Subnet Mask ............................18 6-1-16 Setting Default Gateway ................................19 6-1-17 Setting Delimiter/Setting Baud Rate ........................... 19 7 Analog Control ........................................20 7-1 Analog Remote Connector ..................................20 7-2 External Control Mode .................................... 20 HECD series...

  • Page 8: Table Of Contents

    8-6-2 Command Response ..................................38 8-6-3 Available Characters for Commands ............................38 8-7 Matsusada Precision Original Command List ..........................39 8-8 Description of Matsusada Precision Original Command ......................40 8-9 Range for Setting Voltage and Current ............................46 8-10 EtherCAT (-LEc option) ..................................47 8-11 EtherCAT Profile ....................................
  • Page 9 10-4 Additional high-sensitivity current monitor (-LCm Option) ....................64 10-5 EtherCAT interface (-LCm Option) ..............................64 11 Troubleshooting in Digital Control ................................. 65 11-1 Troubleshooting in Digital Control ..............................65 11-2 Inquiry ......................................... 65 12 "Something Wrong?"....................................66 HECD series...

  • Page 10: Features And Specifications

    1-2 Overview The HECD series is a high voltage power supply unit with 2CH output developed specifically for electrostatic chucks. This model meets the needs for monitoring the wafer status as well as polarity switching and forced grounding functions.

  • Page 11: Specifications

    (ON: Polarity reverse every time high voltage turns OFF) Initial control mode Sets initial control mode (LO:Local control mode,EX:External control mode) Other functions Interlock, Remote switch Temperature and Operating temperature: 0℃ to +45℃, Storage temp.: -20℃ to +70℃ Humidity Relative humidity: 20% to 80% (No condensation) HECD series...

  • Page 12: Before Use

    After stopping and resetting the unit, send a command from the controller to it to gradually re-start its output while checking for any abnormality appearing on the display, besides the voltage or current.  When changing devices configuring the system such as load, turn off the power for all of them. HECD series...

  • Page 13: Installation Conditions

    Check the input voltage label on the rear panel of the unit to input the correct voltage. If a voltage out of specifications is input, it may damage the unit. For safety, make sure to ground the GND terminal of the unit at a single point. HECD series...

  • Page 14: External View

    (2) Analog remote connector Center tap connector (SHV) (D-sub 37 pin) (3) Interlock terminal OUTPUT1 connector (SHV) (4) LAN connector (10) GND terminal (M4) (5) USB connector (11) AC input connector (-L(AC) option) (6) RS-232C connector (12) EtherCAT connector (-LEc option) HECD series...

  • Page 15: External Dimensions

    3 External View 3-3 External Dimensions Unit: [mm] Model HECD-0.5B20×2 HECD-1B10×2 HECD-1.5B7.5×2 HECD-2B5×2 237.5 HECD-4B1×2 HECD-4B2.5×2 HECD-5B2×2 HECD-7.5B1.2×2 302.5 HECD series...

  • Page 16: Wiring

    When the grounding method is poor, it becomes dangerous because it may result in electric shock or damage to the unit.  If a short circuit or discharge of the load is expected, make the ground wire even thicker and shorter. HECD series...

  • Page 17: Connecting Load

    If the sum of the center tap voltage and the output voltage settings exceeds the maximum output voltage, the output voltage will drop.  When the -LSep/-LCt option is installed, no center tap terminal is equipped on the rear panel. HECD series...

  • Page 18: Panel Description

    Left-direction key switch ( Moves the cursor to the left. Right-direction key switch ( Moves the cursor to the right. Numeric setting encoder Changes the numeric value of the position selected by the cursor. HECD series...

  • Page 19: Display

    Baud Rate ・In external analog control mode, VS, IS, RTU, RTD, ADC, ARV, and CMW settings are not reflected. ・With the -LSep option, VM are displayed for each channel. Also, VS and IS are set for each Channel. HECD series...

  • Page 20: Operations And Settings

    Press and hold the control selector. ＶＭ ＋１．５０ｋＶ ＣＭ０．５０ ＷＣ ＣＴＭ＋１．００ｋＶ ＬＯ Local control Press and hold the control selector. ＶＭ ＋１．５０ｋＶ ＣＭ０．５０ ＷＣ ＣＴＭ＋１．００ｋＶ ＥＸ External control This function is set by initial control mode setting when the unit is powered up. HECD series...

  • Page 21: Switching Screens

    １９２． １６８． ００１． ０１０ Setting IP address ＳＵＢ ２５５． ２５５． ２５５． ０００ Setting subnet mask Press the display selector. ＧＡＴ ０００． ０００． ０００． ０００ Setting default gateway Press the display selector. Setting Delimiter ＤＬＭ ＣＲ ＢＰＳ ９６００ Setting baud rate HECD series...

  • Page 22: Switching Screens (With -Lct Option)

    １９２． １６８． ００１． ０１０ Setting IP address ＳＵＢ ２５５． ２５５． ２５５． ０００ Setting subnet mask Press the display selector. ＧＡＴ ０００． ０００． ０００． ０００ Setting default gateway Press the display selector. Setting Delimiter ＤＬＭ ＣＲ ＢＰＳ ９６００ Setting baud rate HECD series...

  • Page 23: Switching Screens (With -Lsep Option)

    １９２． １６８． ００１． ０１０ Setting IP address ＳＵＢ ２５５． ２５５． ２５５． ０００ Setting subnet mask Press the display selector. ＧＡＴ ０００． ０００． ０００． ０００ Setting default gateway Press the display selector. Setting Delimiter ＤＬＭ ＣＲ ＢＰＳ ９６００ Setting baud rate HECD series...

  • Page 24: Moving Cursor

    Output1 voltage monitor Wafer capacitance monitor Wafer status ＶＭ ＋１．５０ｋＶ ＣＭ０．５０ ＷＣ －１．５０ｋＶ ＬＯ Output2 voltage monitor Local control Wafer status NW: No Wafer WP: Wafer Present WC: Wafer Clamped Local/External control LO: Local control EX: External control HECD series...

  • Page 25: Current Monitor

    Setting center tap voltage 6-1-11 Setting Output Voltage/Output Current Limit/Output Voltage 2/Output Current Limit 2 (with -LSep Option) Setting output1 voltage Setting output current limit ＶＳ ＋１．５０ｋＶ ＩＳ２．００ｍＡ －１．５０ｋＶ ２．００ｍＡ Setting output2 voltage Setting output current limit 2 HECD series...

  • Page 26: Setting Wafer Status Threshold-Value/Ramp Up Time/Ramp Down Time

    Set control mode when the unit is powered up. LO:Local control mode EX:External control mode 6-1-14 Displaying MAC Address/Setting DHCP MAC address ＭＡＣ５０－Ｃ２－００－Ｆ９－Ｅ４－００ ＤＨＣＰ ＯＮ Setting DHCP 6-1-15 Setting IP address/Subnet Mask Setting IP address ＩＰ １９２． １６８． ００１．０１０ ＳＵＢ ２５５． ２５５． ２５５．０００ Setting subnet mask HECD series...

  • Page 27: Setting Default Gateway

    6 Operations and Settings 6-1-16 Setting Default Gateway Setting default gateway ＧＡＴ ０００． ０００． ０００． 000 6-1-17 Setting Delimiter/Setting Baud Rate Setting delimiter Setting baud rate ＤＬＭ ＣＲ ＢＰＳ ９６００ HECD series...

  • Page 28: Analog Control

    PIN25 OUTPUT2 high-sensitivity current monitor. OUTPUT2 current limit status PIN31 PIN26 Common (PIN 1,2,3,4,5,6,7,20,21,22,23,25) OUTPUT2 HV ON status PIN30 PIN27 Output ON/OFF 2 (-LSep option) Forced grounding 2 (-LSep option) PIN29 PIN28 Polarity reversing 2 (-LCt, -LSep options) HECD series...

  • Page 29: Output On/Off

    +rated output voltage will be added to each output. If the sum of the output voltage and the bias settings exceeds the maximum output voltage, the bias settings will be given priority and the output voltage will drop. HECD series...

  • Page 30: Setting Output Current Limit By External Voltage

    -LSep option employs independent control of each output. Applying 5 to 24 Vdc in PIN10 will reverse the OUTPUT1 polarity. Applying 5 to 24 Vdc in PIN28 will reverse the OUTPUT2 polarity. With -LCt option, applying 5 to 24 Vdc in PIN28 will reverse the polarity of the center tap bias voltage. HECD series...

  • Page 31: Forced Grounding

    PIN34 outputs 0 to +10Vdc when OUTPUT1 is -1/100 of rated output current to +1/100 of rated output current. PIN25 outputs 0 to +10Vdc when OUTPUT2 is -1/100 of rated output current to +1/100 of rated output current. HECD series...

  • Page 32: Reference Output

    It is available for Output ON/OFF, Polarity reversing, and Forced grounding, etc. 7-12 Wafer Capacitance Monitor HECD series measures the capacitance by applying an AC voltage between OUTPUT1 and OUTPUT2. The wafer electrostatic capacitance monitor terminal on PIN6 outputs 0 to +10Vdc corresponding to the capacitance between OUTPUT1 and OUTPUT2.

  • Page 33: Wafer Detection Signal Off

    7-13 Wafer Detection Signal OFF The HECD series has the wafer capacitance measurement setting that outputs a sine wave of several volt all the time as the wafer detection signal. When the voltage of 5 to 24 Vdc is applied in PIN35 (Wafer detection signal OFF), the wafer detection signal will be zero and no wafer will be detected.

  • Page 34: Status Output

    If you do not use the interlock function, insert the supplied short circuit bracket as shown in the figure below between the interlock terminals. This is not function that satisfies the requirements of CE,UL. Internal circuit +24V Main Power Supply When not used External connection HV Power Supply Short circuit bracket HECD series...

  • Page 35: Digital Control

    When you have updated the network settings on the Web screen, the updated settings will be reflected by clicking the [LAN Reset] button on the Web screen or restarting the product by turning the [POWER] switch of the unit off once and then on. HECD series...

  • Page 36: Scpi Command Program

    The following units can be used for parameters for commands with units in the unit column. Volts [kV, V, mV] Amps [A, mA, uA] [s, ms] Using units (example1) SOURce:VOLTage 0.001kV (Voltage setting value: 1V ) Using units (example2) SOURce:CURRent 1000mA (Current setting value: 1A HECD series...

  • Page 37: Scpi Command List

    MAX/MIN sets the maximum/minimum value. Set the value ON with ON/1 and OFF with OFF/0. * Uppercase letters must be stated, and lowercase letters are optional. (e.g. SYSTEM:LOCAL is synonymous with SYST:LOC.) HECD series...

  • Page 38: Description Of Scpi Commands

    ([Output state] [Operation mode] [Wafer state] [Operation mode] [Error state] Remarks All errors will be returned when they are more than one. SYSTem:WAFer? Gets wafer status. Format SYST:WAF? Query ex. NW : No Wafer Remarks WP : Wafer Present WC : Wafer Clamped HECD series...
  • Page 39 - Rated current value to + Rated current value Unit "A", "mA", "uA" Format ex. MEAS:CURR:NEG? Query Returns the output current value (N). MEASure[:SCALar]:CAPacitance? Gets the wafer capacitance monitor value. Range 0.0 to 9.99 Format ex. MEAS:CURR:CAP? Query Returns the wafer capacitance value. HECD series...
  • Page 40 0 to Rated current value Unit "A", "mA", "uA" Format ex. SEC:CURR 0.00234 Initial value CURR 0.0 Query Returns the set current value (current2), responding to “SEC:CURR?” Remarks Regarding the setting range, refer to [8-9 Range for Setting Voltage and Current]. HECD series...
  • Page 41 Sets the output state (OUTPUT2). (for –LSep option) Range OFF | ON | 0 | 1 Format ex. OUTP:CH2 ON Initial value OUTP:CH2 OFF Query Returns the output state, responding to “OUTP:CH2?”. Remarks The OUTP:CH2 OFF resets the errors after various errors occurred. HECD series...
  • Page 42 OUTPut:POLArity:REVerse[:STATe] <OFF | ON | 0 | 1> Sets the polarity reversing ON/OFF. (Manual) Range OFF | ON | 0 | 1 Format ex. OUTP:POLA:REV ON Initial value OUTP:POLA:REV OFF Returns the ON/OFF setting for the polarity reversing, responding to Query “OUTP:POLA:REV?”. HECD series...
  • Page 43 Sets the ON/OFF for the wafer capacitance monitor 0 correction. Range OFF | ON | 0 | 1 Format ex. OUTP:CAP:ZERO ON Initial value OUTP:CAP:ZERO OFF Returns the ON/OFF setting for the wafer capacitance monitor 0 correction, Query responding to “OUTP:CAP:ZERO?”. HECD series...

  • Page 44: Tutorial

    ‘ Inquire about the set voltage value. VOLT? ‘ Inquire about the set current value. CURR? 8-5-3 Measuring Output Use the "MEASure" command to measure output. ‘ Inquire about output voltage values. MEAS:VOLT? ‘ Inquire about output current values. MEAS:CURR? HECD series...

  • Page 45: Matsusada Precision Original Command Program

    8 Digital Control 8-6 Matsusada Precision Original Command Program 8-6-1 Command Format (Example) Write as follows to set its output voltage to its max. ○○ FFFF 1) Delimiter 2) Parameter 3) Command 1） Enter the delimiter. Refer to [6-1-12 Setting Delimiter/Setting Baud Rate].

  • Page 46: Command Response

    ) only as a delimiter.  Alphabetic characters used in commands are not case sensitive.  Use a space (20 ) to separate "command" and "parameter" in a command string. Table: ASCII code Upper Lower ” & ‘ < ¥ > HECD series...

  • Page 47: Matsusada Precision Original Command List

    8 Digital Control 8-7 Matsusada Precision Original Command List Table: Matsusada Precision Original Command Classification Command Function Page Voltage VSET Sets the output voltage value. Sets the output voltage value (OUTPUT2). Voltage 2 V2SET (-LSep option) Output Sets the center tap voltage value.

  • Page 48: Description Of Matsusada Precision Original Command

    8 Digital Control 8-8 Description of Matsusada Precision Original Command VSET command Sets the output voltage value. Range - (Rated voltage value x 2) to + (Rated voltage value x 2) Resolution Refer to [8-9 Range for Setting Voltage and Current].
  • Page 49 0 to 9.99 Resolution 0.01 CWCSET 1.23 Format ex. ⇒ Sets 1.23. Initial value Returns the set Wafer Clamped threshold-value, responding to CWCSET?". Query REsponse ex.: CWCSET=1.23 Remarks You cannot set a value below the Wafer Present threshold-value. HECD series...
  • Page 50 OUT1 OFF Query Returns OUT1=OFF or OUT1=ON, responding to "OUT1?". OUT2 command Sets the OUTPUT2 OFF/ON. (for –LSep option) Range OFF/ON OUT2 ON Format OUT2 OFF Initial value OUT2 OFF Query Returns OUT2=OFF or OUT2=ON, responding to "OUT2?". HECD series...
  • Page 51 REV OFF Query Returns REV=OFF or REV=ON, responding to "REV?". CMW command Sets the wafer capacitance measurement signal to ON/OFF Range OFF/ON CMW ON Format CMW OFF Initial value CMW ON Query Returns CMW=OFF or CMW=ON, responding to "CMW?". HECD series...
  • Page 52 Monitors the output voltage value (OUTPUT2). (for –LSep option) Range - Rated voltage value to + Rated voltage value Resolution Refer to [8-9 Range for Setting Voltage and Current]. Unit “V” Format V2GET V2GET=1230 Response ⇒ Outputs 1.23kV. HECD series...
  • Page 53 Refer to [8-9 Range for Setting Voltage and Current]. Unit “A” Format INGET INGET=0.00234 Response ⇒ Outputs 2.34mA. CGET command Monitors the capacitance. Range 0 to 9.99 Resolution 0.01 Format CGET CGET=1.23 Response ⇒ The capacitance is 1.23. HECD series...

  • Page 54: Range For Setting Voltage And Current

    Below 5 9990 Below 10 0.00000 0.00999 5 or more 99900 10 or more 0.0000 0.0999 Regarding the maximum value, the result of multiplying the rated voltage and rated current by coefficients for each model will be the maximum. HECD series...

  • Page 55: Ethercat (-Lec Option)

    ： Displays the bootloader version. Detail ➢ Identify Object (0x1018) ： Vender ID displays 192. Detail ： Product Code displays 20. ： Revision Number displays the revision number of the ESI file. ： Serial Number displays the serial number of the device. HECD series...

  • Page 56: Ethercat Comunication Data (Txpdo)

    Output Voltage 0x2104 REAL VCmoni Center Tap Voltage 0x2108 REAL V1moni CH1 Output Voltage 0x210C REAL V2moni CH2 Output Voltage 0x2110 REAL Cmoni Wafer Capacitance 0x2114 REAL I1moni CH1 Output Current 0x2118 REAL I2moni CH2 Output Current 0x211C HECD series...
  • Page 57 Actual CMW1 setpoint 0x10 USINT CMW2set Actual CMW2 setpoint 0x11 USINT CMZset Actual CMZ setpoint 0x12 USINT OUT1set Actual OUT1 setpoint 0x13 USINT OUT2set Actual OUT2 setpoint 0x14 USINT VsetDisable Actual VsetDisable setpoint 0x15 USINT IsetDisable Actual IsetDisable setpoint 0x16 HECD series...

  • Page 58: Details Of Ethercat Txpdo Data

    ： output ch2： Displays the output status of CH1. ： output： Displays the output status. ： Activ if either CH1 or CH2 is output. ： ovp status： Displays the over voltage status. ： ocp status： Displays the over current status. HECD series...
  • Page 59 ： CMZset： Displays the actual CMZ setpoint. ： OUT1set： Displays the actual OUT1 setpoint. ： OUT2set： Displays the actual OUT2 setpoint. ： VsetDisable： Displays the actual VsetDisable setpoint set by RxPDO. ： IsetDisable： Displays the actual IsetDisable setpoint set by RxPDO. HECD series...

  • Page 60: Ethercat Communication Data (Rxpdo)

    0:CH1 Output OFF 0x2233 USINT OUT1 1:CH1 Output ON 0:CH2 Output OFF 0x2234 USINT OUT2 1:CH2 Output ON 0x2235 USINT VsetDisable 1: Disable Voltage setpoint change in EtherCAT 0x2236 USINT IsetDisable 1: Disable Current Limit setpoint change in EtherCAT HECD series...

  • Page 61: Details Of Ethercat Rxpdo Data

    ： Sets the threshold of wafer status. （Wafer present） Detail ➢ RTU (0ｘ2224) ： Sets the ramp up time. Detail ➢ RTD (0ｘ2228) ： Sets the ramp down time. Detail ➢ ADC (0ｘ222C) ： Sets the grounding Enabel / Disabele. Detail HECD series...
  • Page 62 ： Sets the capacity monitor 0 correction ON/OFF. Detail ➢ VsetDisable (0ｘ2235) ： The voltage setpoint can be changed. Detail ➢ IsetDisable (0ｘ2236) ： The current limit setpoint can be changed. Detail (*1) Setpoint are valid only when Regulation/Control Mode(0ｘ7004) is 8. HECD series...

  • Page 63: Web Interface

    The location of the address input field varies depending on your web browser. When the TCP/IP mode is set to DHCP, check the settings of the DHCP server, and input the IP address. Then, the information of the corresponding unit will be displayed on the web browser. HECD series...

  • Page 64: Home Page

    9 Web Interface 9-3 Home Page Clicking the [Home] button will display LAN communication information as well as our product information, and so on. HECD series...

  • Page 65: Config Page

    Regarding "TCP/IP Mode", "Manual IP Address", "Subnet Mask", and "Default Gateway" changes will not be reflected immediately even clicking the [Apply] button. After clicking the [Apply] button, restart the unit. Clicking the [Cancel] button will discard the changes. (Valid only before clicking the [Apply] button.) HECD series...

  • Page 66: Control Page

    Changes the output setting values, wafer state threshold-value, and ramp time of the unit. Enter your desired values in digits in the text box and click the [Set] button. When the "Setting" values are updated, the change is complete.) HECD series...

  • Page 67: Control Page (Without Option)

    9 Web Interface 9-5-1 Control page (without option) HECD series...

  • Page 68: Control Page (With The -Lct Option)

    9 Web Interface 9-5-2 Control page (with the -LCt option) HECD series...

  • Page 69: Control Page (With The -Lsep Option)

    9 Web Interface 9-5-3 Control page (with the -LSep option) HECD series...

  • Page 70: Security Page

    The password is registered in the unit, so it will not be deleted or reset even if the input power is turned off. If you want to reset the password, execute the SCPI command "*RST". (Refer to [8-4 Description of SCPI Commands] - "*RST".) HECD series...

  • Page 71: Settings Page

    Select one from the following three options: 9600 bps, 19200 bps, or 38400 bps, and then click the [Apply] button. 9-8 Links Page Displays a collection of links to websites related to Matsusada Precision Inc. and its power supply units by clicking the [Links] button. HECD series...

  • Page 72: Center Tap Bias (-Lct Option)

    The current monitor on the display automatically switches range when in the low current range. Communication commands are the same as for normal current monitors. 10-5 EtherCAT interface (-LCm Option) Refer to [8-10]. LAN, USB or RS-232C is unavailable. HECD series...

  • Page 73: Troubleshooting In Digital Control

     Name of your company  Department  Name  Model and version  Connection status between remote operating equipment and the unit (Which communication interface is used?)  Date of delivery  Problem  Frequency HECD series...

  • Page 74: 12 "Something Wrong

    ☐ Is the input voltage/wiring method correct? (Refer to [1-5], [4].) the display" If nothing meets the above case, or if the problem is not solved after checking, please contact our sales office where you purchased the product. Please contact us for more information. HECD series...
  • Page 75 Revision History Rev. No. Rev. Date Description 2021/10 First edition 2021/12 Added description of -LCt option. 2022/06 Changed Lineup, Specifications, and descriptions as of Analog remote and Option. Provided an additional function in -LSep option, changed to Dsub37pin, and added 2022/10 -L(AC) option.

This manual is also suitable for:

Hecd-0.5b20x2Hecd-1b10x2Hecd-1,5b6x2Hecd-2b5x2Hecd-4b1x2Hecd-4b2.5x2 ... Show all

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