Omron ZS Datasheet page 3

CMOS technology enables unique, surface-independent detection
Measures various types of different targets, offering high accuracy on all surfaces
Type profile inspection
Up to 9 sensor controllers
Monitor
SmartMonitor tool
Professional tool for
configuration, set up and
monitoring.
• Provides high-speed
simultaneous multi-channel
graphs
• Includes Excel macro for
simple analysis
• Supports documentation and
quality assurance tasks
Advanced Industrial Automation
Wafer thickness and warping inspection
Record
ZS-DSU data storage unit
Fast data storage allowing easy
debugging and system set up.
• High-speed sampling rate:
150 μs
• Powerful support for logging
data using various trigger
functions
• Supports compact flash card
for extended memory
Glass evenness inspection
High-speed bus
Control
ZS-MDC multi-sensing
controller unit
Coordinates data transfer between
sensor controllers and performs
high-speed calculation for
complex measurements tasks.
• Coordinates data between
up to nine controllers
• Fast calculation of
measurements such as:
- Thickness
- Evenness
- Warpage
- 4 different tasks
- Free math
PC board height inspection
Operate
ZS-LDC sensor controller
Ensures you always have the best
measurement performance.
• Supports a wide range of
sensor heads from short range
(20 mm) to long range
(350 mm)
• High accuracy – 0.4 μm
• Fast response time – 110 μs
• USB and RS-232 port
• Intuitive set up through
built-in keypad and digital
operator